JPS5968331A - 感光性樹脂組成物 - Google Patents
感光性樹脂組成物Info
- Publication number
- JPS5968331A JPS5968331A JP18016282A JP18016282A JPS5968331A JP S5968331 A JPS5968331 A JP S5968331A JP 18016282 A JP18016282 A JP 18016282A JP 18016282 A JP18016282 A JP 18016282A JP S5968331 A JPS5968331 A JP S5968331A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- polyimide precursor
- coating film
- soln
- molecule
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Polymerisation Methods In General (AREA)
- Graft Or Block Polymers (AREA)
- Paints Or Removers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18016282A JPS5968331A (ja) | 1982-10-13 | 1982-10-13 | 感光性樹脂組成物 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18016282A JPS5968331A (ja) | 1982-10-13 | 1982-10-13 | 感光性樹脂組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5968331A true JPS5968331A (ja) | 1984-04-18 |
JPH0368065B2 JPH0368065B2 (US06650917-20031118-M00005.png) | 1991-10-25 |
Family
ID=16078478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18016282A Granted JPS5968331A (ja) | 1982-10-13 | 1982-10-13 | 感光性樹脂組成物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5968331A (US06650917-20031118-M00005.png) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62280736A (ja) * | 1986-05-29 | 1987-12-05 | Japan Synthetic Rubber Co Ltd | 感放射線性樹脂組成物 |
JPH03170547A (ja) * | 1989-11-30 | 1991-07-24 | Sumitomo Bakelite Co Ltd | 感光性樹脂組成物 |
JPH0418450A (ja) * | 1990-04-16 | 1992-01-22 | Fujitsu Ltd | 感光性耐熱樹脂組成物とそれを用いたパターン形成方法 |
WO2004092838A1 (ja) * | 2003-04-15 | 2004-10-28 | Kaneka Corporation | 水系現像が可能な感光性樹脂組成物および感光性ドライフィルムレジスト、並びにその利用 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50130825A (US06650917-20031118-M00005.png) * | 1974-04-05 | 1975-10-16 | ||
JPS5345352A (en) * | 1976-10-06 | 1978-04-24 | Nitto Electric Ind Co Ltd | Resin compositions solubilized in water |
JPS5382856A (en) * | 1976-12-28 | 1978-07-21 | Nitto Electric Ind Co Ltd | Water-solubilized resin composition |
JPS54145794A (en) * | 1978-04-14 | 1979-11-14 | Toray Ind Inc | Heat-resistant photosensitive material |
JPS57102926A (en) * | 1980-12-17 | 1982-06-26 | Hitachi Ltd | Light- or radiation-sensitive polymer composition |
JPS5915449A (ja) * | 1982-07-16 | 1984-01-26 | Nitto Electric Ind Co Ltd | 感光性樹脂組成物 |
-
1982
- 1982-10-13 JP JP18016282A patent/JPS5968331A/ja active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50130825A (US06650917-20031118-M00005.png) * | 1974-04-05 | 1975-10-16 | ||
JPS5345352A (en) * | 1976-10-06 | 1978-04-24 | Nitto Electric Ind Co Ltd | Resin compositions solubilized in water |
JPS5382856A (en) * | 1976-12-28 | 1978-07-21 | Nitto Electric Ind Co Ltd | Water-solubilized resin composition |
JPS54145794A (en) * | 1978-04-14 | 1979-11-14 | Toray Ind Inc | Heat-resistant photosensitive material |
JPS57102926A (en) * | 1980-12-17 | 1982-06-26 | Hitachi Ltd | Light- or radiation-sensitive polymer composition |
JPS5915449A (ja) * | 1982-07-16 | 1984-01-26 | Nitto Electric Ind Co Ltd | 感光性樹脂組成物 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62280736A (ja) * | 1986-05-29 | 1987-12-05 | Japan Synthetic Rubber Co Ltd | 感放射線性樹脂組成物 |
JPH03170547A (ja) * | 1989-11-30 | 1991-07-24 | Sumitomo Bakelite Co Ltd | 感光性樹脂組成物 |
JPH0418450A (ja) * | 1990-04-16 | 1992-01-22 | Fujitsu Ltd | 感光性耐熱樹脂組成物とそれを用いたパターン形成方法 |
WO2004092838A1 (ja) * | 2003-04-15 | 2004-10-28 | Kaneka Corporation | 水系現像が可能な感光性樹脂組成物および感光性ドライフィルムレジスト、並びにその利用 |
Also Published As
Publication number | Publication date |
---|---|
JPH0368065B2 (US06650917-20031118-M00005.png) | 1991-10-25 |
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