JPS5968331A - 感光性樹脂組成物 - Google Patents

感光性樹脂組成物

Info

Publication number
JPS5968331A
JPS5968331A JP18016282A JP18016282A JPS5968331A JP S5968331 A JPS5968331 A JP S5968331A JP 18016282 A JP18016282 A JP 18016282A JP 18016282 A JP18016282 A JP 18016282A JP S5968331 A JPS5968331 A JP S5968331A
Authority
JP
Japan
Prior art keywords
acid
polyimide precursor
coating film
soln
molecule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18016282A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0368065B2 (US06650917-20031118-M00005.png
Inventor
Makoto Kojima
誠 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP18016282A priority Critical patent/JPS5968331A/ja
Publication of JPS5968331A publication Critical patent/JPS5968331A/ja
Publication of JPH0368065B2 publication Critical patent/JPH0368065B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)
  • Paints Or Removers (AREA)
JP18016282A 1982-10-13 1982-10-13 感光性樹脂組成物 Granted JPS5968331A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18016282A JPS5968331A (ja) 1982-10-13 1982-10-13 感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18016282A JPS5968331A (ja) 1982-10-13 1982-10-13 感光性樹脂組成物

Publications (2)

Publication Number Publication Date
JPS5968331A true JPS5968331A (ja) 1984-04-18
JPH0368065B2 JPH0368065B2 (US06650917-20031118-M00005.png) 1991-10-25

Family

ID=16078478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18016282A Granted JPS5968331A (ja) 1982-10-13 1982-10-13 感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JPS5968331A (US06650917-20031118-M00005.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280736A (ja) * 1986-05-29 1987-12-05 Japan Synthetic Rubber Co Ltd 感放射線性樹脂組成物
JPH03170547A (ja) * 1989-11-30 1991-07-24 Sumitomo Bakelite Co Ltd 感光性樹脂組成物
JPH0418450A (ja) * 1990-04-16 1992-01-22 Fujitsu Ltd 感光性耐熱樹脂組成物とそれを用いたパターン形成方法
WO2004092838A1 (ja) * 2003-04-15 2004-10-28 Kaneka Corporation 水系現像が可能な感光性樹脂組成物および感光性ドライフィルムレジスト、並びにその利用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130825A (US06650917-20031118-M00005.png) * 1974-04-05 1975-10-16
JPS5345352A (en) * 1976-10-06 1978-04-24 Nitto Electric Ind Co Ltd Resin compositions solubilized in water
JPS5382856A (en) * 1976-12-28 1978-07-21 Nitto Electric Ind Co Ltd Water-solubilized resin composition
JPS54145794A (en) * 1978-04-14 1979-11-14 Toray Ind Inc Heat-resistant photosensitive material
JPS57102926A (en) * 1980-12-17 1982-06-26 Hitachi Ltd Light- or radiation-sensitive polymer composition
JPS5915449A (ja) * 1982-07-16 1984-01-26 Nitto Electric Ind Co Ltd 感光性樹脂組成物

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130825A (US06650917-20031118-M00005.png) * 1974-04-05 1975-10-16
JPS5345352A (en) * 1976-10-06 1978-04-24 Nitto Electric Ind Co Ltd Resin compositions solubilized in water
JPS5382856A (en) * 1976-12-28 1978-07-21 Nitto Electric Ind Co Ltd Water-solubilized resin composition
JPS54145794A (en) * 1978-04-14 1979-11-14 Toray Ind Inc Heat-resistant photosensitive material
JPS57102926A (en) * 1980-12-17 1982-06-26 Hitachi Ltd Light- or radiation-sensitive polymer composition
JPS5915449A (ja) * 1982-07-16 1984-01-26 Nitto Electric Ind Co Ltd 感光性樹脂組成物

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280736A (ja) * 1986-05-29 1987-12-05 Japan Synthetic Rubber Co Ltd 感放射線性樹脂組成物
JPH03170547A (ja) * 1989-11-30 1991-07-24 Sumitomo Bakelite Co Ltd 感光性樹脂組成物
JPH0418450A (ja) * 1990-04-16 1992-01-22 Fujitsu Ltd 感光性耐熱樹脂組成物とそれを用いたパターン形成方法
WO2004092838A1 (ja) * 2003-04-15 2004-10-28 Kaneka Corporation 水系現像が可能な感光性樹脂組成物および感光性ドライフィルムレジスト、並びにその利用

Also Published As

Publication number Publication date
JPH0368065B2 (US06650917-20031118-M00005.png) 1991-10-25

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