JPS5851561A - 半導体集積回路装置 - Google Patents
半導体集積回路装置Info
- Publication number
- JPS5851561A JPS5851561A JP56149433A JP14943381A JPS5851561A JP S5851561 A JPS5851561 A JP S5851561A JP 56149433 A JP56149433 A JP 56149433A JP 14943381 A JP14943381 A JP 14943381A JP S5851561 A JPS5851561 A JP S5851561A
- Authority
- JP
- Japan
- Prior art keywords
- type
- circuit
- region
- semiconductor integrated
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 25
- 239000012535 impurity Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 230000000295 complement effect Effects 0.000 claims description 26
- 230000005669 field effect Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 5
- 239000003990 capacitor Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 8
- 108090000699 N-Type Calcium Channels Proteins 0.000 abstract 1
- 102000004129 N-Type Calcium Channels Human genes 0.000 abstract 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 abstract 1
- 238000000034 method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 241000238557 Decapoda Species 0.000 description 2
- 101001019013 Homo sapiens Mitotic interactor and substrate of PLK1 Proteins 0.000 description 2
- 102100033607 Mitotic interactor and substrate of PLK1 Human genes 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 241001481833 Coryphaena hippurus Species 0.000 description 1
- 235000008708 Morus alba Nutrition 0.000 description 1
- 240000000249 Morus alba Species 0.000 description 1
- 101100366940 Mus musculus Stom gene Proteins 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003601 intercostal effect Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8248—Combination of bipolar and field-effect technology
- H01L21/8249—Bipolar and MOS technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8248—Combination of bipolar and field-effect technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
- H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
- H01L27/0233—Integrated injection logic structures [I2L]
- H01L27/0244—I2L structures integrated in combination with analog structures
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/0175—Coupling arrangements; Interface arrangements
- H03K19/018—Coupling arrangements; Interface arrangements using bipolar transistors only
- H03K19/01806—Interface arrangements
- H03K19/01818—Interface arrangements for integrated injection logic (I2L)
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Priority Applications (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56149433A JPS5851561A (ja) | 1981-09-24 | 1981-09-24 | 半導体集積回路装置 |
IT23326/82A IT1153730B (it) | 1981-09-24 | 1982-09-17 | Dispositivi a circuito integrato a semiconduttori e procedimento per la loro fabbricazione |
FR8215875A FR2514200A1 (fr) | 1981-09-24 | 1982-09-21 | Dispositif possedant un circuit a transistors a effet de champs a grille isolee complementaire et un circuit logique integre a injection sur le meme substrat semi-conducteur, ainsi que son procede de fabrication |
GB08227060A GB2107117B (en) | 1981-09-24 | 1982-09-22 | Semiconductor integrated circuit devices |
DE19823235409 DE3235409A1 (de) | 1981-09-24 | 1982-09-24 | Integrierte halbleiterschaltungsanordnung und verfahren zu ihrer herstellung |
FR8318617A FR2533367B1 (fr) | 1981-09-24 | 1983-11-23 | Procede de fabrication d'un dispositif possedant un circuit a transistors a effet de champs a grille isolee complementaire et un circuit logique integre a injection sur le meme substrat semiconducteur |
GB08502453A GB2154060B (en) | 1981-09-24 | 1985-01-31 | Semiconductor integrated circuit devices |
GB08502454A GB2154061B (en) | 1981-09-24 | 1985-01-31 | Methods of manufacturing semiconductor circuit devices |
SG40887A SG40887G (en) | 1981-09-24 | 1987-05-06 | Semiconductor integrated circuit devices and method of manufacturing the same |
SG40987A SG40987G (en) | 1981-09-24 | 1987-05-06 | Methods of manufacturing semiconductor circuit devices |
HK691/87A HK69187A (en) | 1981-09-24 | 1987-09-24 | Semiconductor integrated circuit devices and method of manufacturing the same |
HK698/87A HK69887A (en) | 1981-09-24 | 1987-09-24 | Methods of manufacturing semiconductor circuit devices |
MY644/87A MY8700644A (en) | 1981-09-24 | 1987-12-30 | Semiconductor integrated circuit devices and method of manufacturing the same |
MY648/87A MY8700648A (en) | 1981-09-24 | 1987-12-30 | Methods of manufacturing semiconductor circuit devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56149433A JPS5851561A (ja) | 1981-09-24 | 1981-09-24 | 半導体集積回路装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5851561A true JPS5851561A (ja) | 1983-03-26 |
Family
ID=15474999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56149433A Pending JPS5851561A (ja) | 1981-09-24 | 1981-09-24 | 半導体集積回路装置 |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS5851561A (fr) |
DE (1) | DE3235409A1 (fr) |
FR (2) | FR2514200A1 (fr) |
GB (3) | GB2107117B (fr) |
HK (2) | HK69187A (fr) |
IT (1) | IT1153730B (fr) |
MY (1) | MY8700644A (fr) |
SG (1) | SG40887G (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60253261A (ja) * | 1984-05-29 | 1985-12-13 | Clarion Co Ltd | Iil素子を含む集積回路 |
JPH0387403A (ja) * | 1989-08-31 | 1991-04-12 | Mitsubishi Electric Corp | 融雪装置 |
JPH03235802A (ja) * | 1990-02-14 | 1991-10-21 | Mitsubishi Electric Corp | 融雪装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5955052A (ja) * | 1982-09-24 | 1984-03-29 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
KR920015363A (ko) * | 1991-01-22 | 1992-08-26 | 김광호 | Ttl 입력 버퍼회로 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52117086A (en) * | 1976-03-29 | 1977-10-01 | Sharp Corp | Semiconductor device for touch type switch |
JPS5611661A (en) * | 1979-07-09 | 1981-02-05 | Sankyo Seiki Mfg Co Ltd | Magnetic card reader of normal card containing type |
JPS56116661A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3594241A (en) * | 1968-01-11 | 1971-07-20 | Tektronix Inc | Monolithic integrated circuit including field effect transistors and bipolar transistors,and method of making |
IT947674B (it) * | 1971-04-28 | 1973-05-30 | Ibm | Tecnica di diffusione epitassiale per la fabbricazione di transisto ri bipolari e transistori fet |
JPS52156580A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Semiconductor integrated circuit device and its production |
US4258379A (en) * | 1978-09-25 | 1981-03-24 | Hitachi, Ltd. | IIL With in and outdiffused emitter pocket |
US4429326A (en) * | 1978-11-29 | 1984-01-31 | Hitachi, Ltd. | I2 L Memory with nonvolatile storage |
-
1981
- 1981-09-24 JP JP56149433A patent/JPS5851561A/ja active Pending
-
1982
- 1982-09-17 IT IT23326/82A patent/IT1153730B/it active
- 1982-09-21 FR FR8215875A patent/FR2514200A1/fr active Granted
- 1982-09-22 GB GB08227060A patent/GB2107117B/en not_active Expired
- 1982-09-24 DE DE19823235409 patent/DE3235409A1/de not_active Withdrawn
-
1983
- 1983-11-23 FR FR8318617A patent/FR2533367B1/fr not_active Expired
-
1985
- 1985-01-31 GB GB08502453A patent/GB2154060B/en not_active Expired
- 1985-01-31 GB GB08502454A patent/GB2154061B/en not_active Expired
-
1987
- 1987-05-06 SG SG40887A patent/SG40887G/en unknown
- 1987-09-24 HK HK691/87A patent/HK69187A/xx unknown
- 1987-09-24 HK HK698/87A patent/HK69887A/xx unknown
- 1987-12-30 MY MY644/87A patent/MY8700644A/xx unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52117086A (en) * | 1976-03-29 | 1977-10-01 | Sharp Corp | Semiconductor device for touch type switch |
JPS5611661A (en) * | 1979-07-09 | 1981-02-05 | Sankyo Seiki Mfg Co Ltd | Magnetic card reader of normal card containing type |
JPS56116661A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60253261A (ja) * | 1984-05-29 | 1985-12-13 | Clarion Co Ltd | Iil素子を含む集積回路 |
JPH0387403A (ja) * | 1989-08-31 | 1991-04-12 | Mitsubishi Electric Corp | 融雪装置 |
JPH03235802A (ja) * | 1990-02-14 | 1991-10-21 | Mitsubishi Electric Corp | 融雪装置 |
Also Published As
Publication number | Publication date |
---|---|
GB2154061A (en) | 1985-08-29 |
DE3235409A1 (de) | 1983-04-14 |
IT8223326A0 (it) | 1982-09-17 |
GB2154060B (en) | 1986-05-14 |
FR2514200B1 (fr) | 1984-07-27 |
MY8700644A (en) | 1987-12-31 |
GB2154060A (en) | 1985-08-29 |
GB2154061B (en) | 1986-04-09 |
HK69887A (en) | 1987-10-02 |
GB2107117B (en) | 1986-04-09 |
FR2533367B1 (fr) | 1986-01-24 |
HK69187A (en) | 1987-10-02 |
GB8502453D0 (en) | 1985-03-06 |
FR2533367A1 (fr) | 1984-03-23 |
SG40887G (en) | 1987-07-17 |
FR2514200A1 (fr) | 1983-04-08 |
GB8502454D0 (en) | 1985-03-06 |
IT1153730B (it) | 1987-01-14 |
GB2107117A (en) | 1983-04-20 |
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