JPS58191451A - 集積回路の電気接触用孔への相互接続線の位置決め形成方法 - Google Patents

集積回路の電気接触用孔への相互接続線の位置決め形成方法

Info

Publication number
JPS58191451A
JPS58191451A JP58066286A JP6628683A JPS58191451A JP S58191451 A JPS58191451 A JP S58191451A JP 58066286 A JP58066286 A JP 58066286A JP 6628683 A JP6628683 A JP 6628683A JP S58191451 A JPS58191451 A JP S58191451A
Authority
JP
Japan
Prior art keywords
integrated circuit
electrical contact
layer
contact holes
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58066286A
Other languages
English (en)
Japanese (ja)
Inventor
ピエ−ル・ジユチ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of JPS58191451A publication Critical patent/JPS58191451A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/43—Layouts of interconnections

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)
JP58066286A 1982-04-14 1983-04-14 集積回路の電気接触用孔への相互接続線の位置決め形成方法 Pending JPS58191451A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8206409 1982-04-14
FR8206409A FR2525389A1 (fr) 1982-04-14 1982-04-14 Procede de positionnement d'une ligne d'interconnexion sur un trou de contact electrique d'un circuit integre

Publications (1)

Publication Number Publication Date
JPS58191451A true JPS58191451A (ja) 1983-11-08

Family

ID=9273015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58066286A Pending JPS58191451A (ja) 1982-04-14 1983-04-14 集積回路の電気接触用孔への相互接続線の位置決め形成方法

Country Status (5)

Country Link
US (1) US4505030A (enExample)
EP (1) EP0091870B1 (enExample)
JP (1) JPS58191451A (enExample)
DE (1) DE3361968D1 (enExample)
FR (1) FR2525389A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153530A (ja) * 1988-12-05 1990-06-13 Mitsubishi Electric Corp 半導体装置の製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2608839B1 (fr) * 1986-12-23 1989-04-21 Labo Electronique Physique Procede de realisation d'interconnexions et de croisements entre niveaux de metallisation d'un circuit integre
US4997781A (en) * 1987-11-24 1991-03-05 Texas Instruments Incorporated Method of making planarized EPROM array
US4822753A (en) * 1988-05-09 1989-04-18 Motorola, Inc. Method for making a w/tin contact
IT1225623B (it) * 1988-10-20 1990-11-22 Sgs Thomson Microelectronics Formazione di contatti autoallineati senza l'impiego di una relativa maschera
US5496771A (en) * 1994-05-19 1996-03-05 International Business Machines Corporation Method of making overpass mask/insulator for local interconnects
CN110572948B (zh) * 2019-09-26 2024-06-18 深圳明阳电路科技股份有限公司 一种激光雕刻线路板及其制作方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113344A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Electrode wiring and its manufacture

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518751A (en) * 1967-05-25 1970-07-07 Hughes Aircraft Co Electrical connection and/or mounting arrays for integrated circuit chips
FR1593881A (enExample) * 1967-12-12 1970-06-01
BE758160A (fr) * 1969-10-31 1971-04-01 Fairchild Camera Instr Co Structure metallique a couches multiples et procede de fabrication d'une telle structure
US4026742A (en) * 1972-11-22 1977-05-31 Katsuhiro Fujino Plasma etching process for making a microcircuit device
DE2315710C3 (de) * 1973-03-29 1975-11-13 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Herstellen einer Halbleiteranordnung
DE2426731A1 (de) * 1974-06-01 1975-12-11 Claas Maschf Gmbh Geb Vorrichtung zum verteilen und auflockern der von den hordenschuettlern eines maehdreschers bewegten strohmatte
JPS5222071A (en) * 1975-08-13 1977-02-19 Hitachi Ltd Method of selective etching of film of polyamide resin
US4185294A (en) * 1975-12-10 1980-01-22 Tokyo Shibaura Electric Co., Ltd. Semiconductor device and a method for manufacturing the same
FR2388410A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Procede de realisation de transistors a effet de champ de type mos, et transistors realises selon un tel procede
DE2730819A1 (de) * 1977-07-07 1979-01-25 Siemens Ag Plasma-aetzverfahren
US4289834A (en) * 1977-10-20 1981-09-15 Ibm Corporation Dense dry etched multi-level metallurgy with non-overlapped vias
FR2428915A1 (fr) * 1978-06-14 1980-01-11 Fujitsu Ltd Procede de fabrication d'un dispositif a semi-conducteurs
JPS6043656B2 (ja) * 1979-06-06 1985-09-30 株式会社東芝 半導体装置の製造方法
US4295924A (en) * 1979-12-17 1981-10-20 International Business Machines Corporation Method for providing self-aligned conductor in a V-groove device
US4357369A (en) * 1981-11-10 1982-11-02 Rca Corporation Method of plasma etching a substrate
US4370196A (en) * 1982-03-25 1983-01-25 Rca Corporation Anisotropic etching of aluminum

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113344A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Electrode wiring and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153530A (ja) * 1988-12-05 1990-06-13 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
FR2525389A1 (fr) 1983-10-21
FR2525389B1 (enExample) 1985-01-18
DE3361968D1 (en) 1986-03-13
EP0091870A1 (fr) 1983-10-19
EP0091870B1 (fr) 1986-01-29
US4505030A (en) 1985-03-19

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