JPS5788771A - Electrostatic induction thyristor - Google Patents

Electrostatic induction thyristor

Info

Publication number
JPS5788771A
JPS5788771A JP55163382A JP16338280A JPS5788771A JP S5788771 A JPS5788771 A JP S5788771A JP 55163382 A JP55163382 A JP 55163382A JP 16338280 A JP16338280 A JP 16338280A JP S5788771 A JPS5788771 A JP S5788771A
Authority
JP
Japan
Prior art keywords
type
gate
layer
cathode
type layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55163382A
Other languages
English (en)
Other versions
JPH0126187B2 (ja
Inventor
Junichi Nishizawa
Tadahiro Omi
Yoshinobu Otsubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Denki Seizo KK
Semiconductor Research Foundation
Toyo Electric Manufacturing Ltd
Original Assignee
Toyo Denki Seizo KK
Semiconductor Research Foundation
Toyo Electric Manufacturing Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Denki Seizo KK, Semiconductor Research Foundation, Toyo Electric Manufacturing Ltd filed Critical Toyo Denki Seizo KK
Priority to JP55163382A priority Critical patent/JPS5788771A/ja
Priority to EP81903084A priority patent/EP0064561B1/en
Priority to PCT/JP1981/000354 priority patent/WO1982001788A1/ja
Priority to DE8181903084T priority patent/DE3174736D1/de
Publication of JPS5788771A publication Critical patent/JPS5788771A/ja
Priority to US07/215,037 priority patent/US4984049A/en
Publication of JPH0126187B2 publication Critical patent/JPH0126187B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1066—Gate region of field-effect devices with PN junction gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
    • H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025—Channel region of field-effect devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7391—Gated diode structures
    • H01L29/7392—Gated diode structures with PN junction gate, e.g. field controlled thyristors (FCTh), static induction thyristors (SITh)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Thyristors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP55163382A 1980-11-21 1980-11-21 Electrostatic induction thyristor Granted JPS5788771A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP55163382A JPS5788771A (en) 1980-11-21 1980-11-21 Electrostatic induction thyristor
EP81903084A EP0064561B1 (en) 1980-11-21 1981-11-21 Static induction thyristor
PCT/JP1981/000354 WO1982001788A1 (fr) 1980-11-21 1981-11-21 Tristor d'induction statique
DE8181903084T DE3174736D1 (en) 1980-11-21 1981-11-21 Static induction thyristor
US07/215,037 US4984049A (en) 1980-11-21 1988-07-05 Static induction thyristor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55163382A JPS5788771A (en) 1980-11-21 1980-11-21 Electrostatic induction thyristor

Publications (2)

Publication Number Publication Date
JPS5788771A true JPS5788771A (en) 1982-06-02
JPH0126187B2 JPH0126187B2 (ja) 1989-05-22

Family

ID=15772818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55163382A Granted JPS5788771A (en) 1980-11-21 1980-11-21 Electrostatic induction thyristor

Country Status (4)

Country Link
US (1) US4984049A (ja)
EP (1) EP0064561B1 (ja)
JP (1) JPS5788771A (ja)
WO (1) WO1982001788A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197868U (ja) * 1986-06-09 1987-12-16
US5847417A (en) * 1994-08-26 1998-12-08 Ngk Insulators, Ltd. Semiconductor device and method of manufacturing same
US6163460A (en) * 1997-10-11 2000-12-19 Temic Telefunken Microelectronic Gmbh Housing for electronic assemblies including board-mounted components and separate discrete components
JP2013149957A (ja) * 2011-12-22 2013-08-01 Ngk Insulators Ltd 半導体装置
CN106158943A (zh) * 2016-06-28 2016-11-23 长安大学 N沟碳化硅静电感应晶闸管及其制造方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940576A (ja) * 1982-08-30 1984-03-06 Junichi Nishizawa フオトサイリスタ
US4654679A (en) * 1983-10-05 1987-03-31 Toyo Denki Seizo Kabushiki Kaisha Static induction thyristor with stepped-doping gate region
JPS61198779A (ja) * 1985-02-28 1986-09-03 Res Dev Corp Of Japan 両面ゲ−ト静電誘導サイリスタ及びその製造方法
GB2230136B (en) * 1989-03-28 1993-02-10 Matsushita Electric Works Ltd Method for manufacturing static induction type semiconductor device and semiconductor devices manufactured thereby
US5270742A (en) * 1990-06-07 1993-12-14 Olympus Optical Co., Ltd. Image forming apparatus for forming electrostatic latent image using ions as medium, with high-speed driving means
JP2960506B2 (ja) * 1990-09-19 1999-10-06 株式会社日立製作所 ターンオフ形半導体素子
JP2801127B2 (ja) * 1993-07-28 1998-09-21 日本碍子株式会社 半導体装置およびその製造方法
JP3277075B2 (ja) * 1994-09-07 2002-04-22 日本碍子株式会社 半導体装置およびその製造方法
SE9704149D0 (sv) * 1997-11-13 1997-11-13 Abb Research Ltd A semiconductor device of SiC and a transistor of SiC having an insulated gate
JP2001024182A (ja) * 1999-07-12 2001-01-26 Ngk Insulators Ltd 半導体装置
US8102012B2 (en) * 2009-04-17 2012-01-24 Infineon Technologies Austria Ag Transistor component having a shielding structure
JP2013149956A (ja) * 2011-12-22 2013-08-01 Ngk Insulators Ltd 半導体装置
US10707340B2 (en) * 2018-09-07 2020-07-07 Semiconductor Components Industries, Llc Low turn-on voltage silicon carbide rectifiers

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179588A (ja) * 1974-12-27 1976-07-10 Stanley Electric Co Ltd Denkaikokatoranjisuta
JPS5422179A (en) * 1977-07-20 1979-02-19 Hitachi Ltd Semiconductor switching element
JPS5428579A (en) * 1977-08-05 1979-03-03 Hitachi Ltd Field effect switching element
JPS54152873A (en) * 1978-05-24 1979-12-01 Hitachi Ltd Field effect type thyristor
JPS5599772A (en) * 1979-01-24 1980-07-30 Semiconductor Res Found Electrostatic induction type thyristor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2299727A1 (fr) * 1975-01-28 1976-08-27 Alsthom Cgee Thyristor a caracteristiques de commutation ameliorees
US4086611A (en) * 1975-10-20 1978-04-25 Semiconductor Research Foundation Static induction type thyristor
US4171995A (en) * 1975-10-20 1979-10-23 Semiconductor Research Foundation Epitaxial deposition process for producing an electrostatic induction type thyristor
JPS5250177A (en) * 1975-10-20 1977-04-21 Semiconductor Res Found Process for production of electrostatic induction type thyristor
US4198645A (en) * 1976-01-27 1980-04-15 Semiconductor Research Foundation Semiconductor controlled rectifier having gate grid dividing surrounding zone into two different impurity concentration sections
US4060821A (en) * 1976-06-21 1977-11-29 General Electric Co. Field controlled thyristor with buried grid
JPS5399879A (en) * 1977-02-14 1978-08-31 Hitachi Ltd Junction-type field effect thyristor
JPS542077A (en) * 1977-06-08 1979-01-09 Hitachi Ltd Semiconductor switching element
US4170019A (en) * 1977-08-05 1979-10-02 General Electric Company Semiconductor device with variable grid openings for controlling turn-off pattern
GB1587540A (en) * 1977-12-20 1981-04-08 Philips Electronic Associated Gate turn-off diodes and arrangements including such diodes
US4364072A (en) * 1978-03-17 1982-12-14 Zaidan Hojin Handotai Kenkyu Shinkokai Static induction type semiconductor device with multiple doped layers for potential modification

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179588A (ja) * 1974-12-27 1976-07-10 Stanley Electric Co Ltd Denkaikokatoranjisuta
JPS5422179A (en) * 1977-07-20 1979-02-19 Hitachi Ltd Semiconductor switching element
JPS5428579A (en) * 1977-08-05 1979-03-03 Hitachi Ltd Field effect switching element
JPS54152873A (en) * 1978-05-24 1979-12-01 Hitachi Ltd Field effect type thyristor
JPS5599772A (en) * 1979-01-24 1980-07-30 Semiconductor Res Found Electrostatic induction type thyristor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197868U (ja) * 1986-06-09 1987-12-16
JPH0534116Y2 (ja) * 1986-06-09 1993-08-30
US5847417A (en) * 1994-08-26 1998-12-08 Ngk Insulators, Ltd. Semiconductor device and method of manufacturing same
US6159776A (en) * 1994-08-26 2000-12-12 Ngk Insulators, Ltd. Method for manufacturing semiconductor device
US6163460A (en) * 1997-10-11 2000-12-19 Temic Telefunken Microelectronic Gmbh Housing for electronic assemblies including board-mounted components and separate discrete components
JP2013149957A (ja) * 2011-12-22 2013-08-01 Ngk Insulators Ltd 半導体装置
CN106158943A (zh) * 2016-06-28 2016-11-23 长安大学 N沟碳化硅静电感应晶闸管及其制造方法

Also Published As

Publication number Publication date
JPH0126187B2 (ja) 1989-05-22
EP0064561A4 (en) 1984-02-03
EP0064561A1 (en) 1982-11-17
EP0064561B1 (en) 1986-05-28
US4984049A (en) 1991-01-08
WO1982001788A1 (fr) 1982-05-27

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