JPS577939A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS577939A
JPS577939A JP8240980A JP8240980A JPS577939A JP S577939 A JPS577939 A JP S577939A JP 8240980 A JP8240980 A JP 8240980A JP 8240980 A JP8240980 A JP 8240980A JP S577939 A JPS577939 A JP S577939A
Authority
JP
Japan
Prior art keywords
phosphorus
silica glass
passivation film
stage
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8240980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6234152B2 (ko
Inventor
Noboru Okuyama
Takamichi Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8240980A priority Critical patent/JPS577939A/ja
Publication of JPS577939A publication Critical patent/JPS577939A/ja
Publication of JPS6234152B2 publication Critical patent/JPS6234152B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP8240980A 1980-06-18 1980-06-18 Manufacture of semiconductor device Granted JPS577939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8240980A JPS577939A (en) 1980-06-18 1980-06-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8240980A JPS577939A (en) 1980-06-18 1980-06-18 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS577939A true JPS577939A (en) 1982-01-16
JPS6234152B2 JPS6234152B2 (ko) 1987-07-24

Family

ID=13773785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8240980A Granted JPS577939A (en) 1980-06-18 1980-06-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS577939A (ko)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60248455A (ja) * 1984-02-15 1985-12-09 ブリード　オートモティブ　テクノロジィ　インク 低バイアスセンサ
JPS60248457A (ja) * 1984-02-15 1985-12-09 ブリード　オートモティブ　テクノロジィ　インク 機械センサ
JPS60248456A (ja) * 1984-02-15 1985-12-09 ブリード　オートモティブ　テクノロジィ　インク 衝撃感知装置
JPS63154449A (ja) * 1986-12-19 1988-06-27 Honda Motor Co Ltd 車輌用加速度検知装置
JPH05105030A (ja) * 1990-04-17 1993-04-27 Trw Repa Gmbh 自動車の緊張手段またはガスバツグ抑止装置の駆動機構
JPH0669192A (ja) * 1991-06-20 1994-03-11 Handotai Process Kenkyusho:Kk 半導体装置の製造方法
US5670764A (en) * 1991-09-09 1997-09-23 Aisin Seiki Kabushiki Kaisha Impact sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291621A (ja) * 1985-10-04 1987-04-27 Mazda Motor Corp Ｖ型エンジンの吸気装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60248455A (ja) * 1984-02-15 1985-12-09 ブリード　オートモティブ　テクノロジィ　インク 低バイアスセンサ
JPS60248457A (ja) * 1984-02-15 1985-12-09 ブリード　オートモティブ　テクノロジィ　インク 機械センサ
JPS60248456A (ja) * 1984-02-15 1985-12-09 ブリード　オートモティブ　テクノロジィ　インク 衝撃感知装置
JPS63154449A (ja) * 1986-12-19 1988-06-27 Honda Motor Co Ltd 車輌用加速度検知装置
JPH07461B2 (ja) * 1986-12-19 1995-01-11 本田技研工業株式会社 車輌用加速度検知装置
JPH05105030A (ja) * 1990-04-17 1993-04-27 Trw Repa Gmbh 自動車の緊張手段またはガスバツグ抑止装置の駆動機構
JPH0669192A (ja) * 1991-06-20 1994-03-11 Handotai Process Kenkyusho:Kk 半導体装置の製造方法
US5670764A (en) * 1991-09-09 1997-09-23 Aisin Seiki Kabushiki Kaisha Impact sensor

Also Published As

Publication number Publication date
JPS6234152B2 (ko) 1987-07-24

Similar Documents

Publication Publication Date Title
JPS54147789A (en) Semiconductor divice and its manufacture
JPS577939A (en) Manufacture of semiconductor device
JPS5555559A (en) Method of fabricating semiconductor device
JPS57136342A (en) Manufacture of semiconductor device
JPS55157241A (en) Manufacture of semiconductor device
JPS5522811A (en) Manufacturing of semiconductor apparatus
JPS57164546A (en) Semiconductor device
JPS56146254A (en) Manufacture of semiconductor device
JPS57204135A (en) Manufacture of semiconductor device
JPS57194523A (en) Manufacture of semiconductor device
JPS5555548A (en) Method of fabricating semiconductor device
JPS57147273A (en) Manufacture of semiconductor device
JPS5534470A (en) Production for solar battery
JPS5633840A (en) Manufacture of semiconductor device
JPS5615076A (en) Manuacture of semiconductor device
JPS57167635A (en) Manufacture of semiconductor device
JPS5776866A (en) Manufacture of semiconductor device
JPS577926A (en) Manufacture of semiconductor device
JPS6474754A (en) Semiconductor device
JPS57202778A (en) Substrate for semiconductor integrated circuit and manufacture thereof
JPS5776832A (en) Method for forming palladium silicide
JPS5621336A (en) Manufacture of semiconductor device
JPS55157267A (en) Manufacturing method for semiconductor device
JPS57196577A (en) Manufacture of semiconductor device
JPS5533084A (en) Method of fabricating semiconductor device