JPS57134558A - Production of organic vapor deposited thin film - Google Patents

Production of organic vapor deposited thin film

Info

Publication number
JPS57134558A
JPS57134558A JP56021651A JP2165181A JPS57134558A JP S57134558 A JPS57134558 A JP S57134558A JP 56021651 A JP56021651 A JP 56021651A JP 2165181 A JP2165181 A JP 2165181A JP S57134558 A JPS57134558 A JP S57134558A
Authority
JP
Japan
Prior art keywords
org
thin film
deposited thin
vapor
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56021651A
Other languages
English (en)
Other versions
JPH0141700B2 (ja
Inventor
Goro Akashi
Akira Nahara
Yoshihiro Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP56021651A priority Critical patent/JPS57134558A/ja
Priority to DE19823205384 priority patent/DE3205384A1/de
Publication of JPS57134558A publication Critical patent/JPS57134558A/ja
Priority to US06/532,817 priority patent/US4543275A/en
Publication of JPH0141700B2 publication Critical patent/JPH0141700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/72—Protective coatings, e.g. anti-static or antifriction
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
    • B05D1/286—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers using a temporary backing to which the coating has been applied
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Magnetic Record Carriers (AREA)
JP56021651A 1981-02-16 1981-02-16 Production of organic vapor deposited thin film Granted JPS57134558A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56021651A JPS57134558A (en) 1981-02-16 1981-02-16 Production of organic vapor deposited thin film
DE19823205384 DE3205384A1 (de) 1981-02-16 1982-02-16 Verfahren zum herstellen eines duennen films aus einem organischen material durch bedampfen
US06/532,817 US4543275A (en) 1981-02-16 1983-09-16 Method of forming thin vapor deposited film of organic material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56021651A JPS57134558A (en) 1981-02-16 1981-02-16 Production of organic vapor deposited thin film

Publications (2)

Publication Number Publication Date
JPS57134558A true JPS57134558A (en) 1982-08-19
JPH0141700B2 JPH0141700B2 (ja) 1989-09-07

Family

ID=12060944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56021651A Granted JPS57134558A (en) 1981-02-16 1981-02-16 Production of organic vapor deposited thin film

Country Status (3)

Country Link
US (1) US4543275A (ja)
JP (1) JPS57134558A (ja)
DE (1) DE3205384A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177365A (ja) * 1983-03-24 1984-10-08 Matsushita Electric Ind Co Ltd 蒸発方法とその装置
JPS60116773A (ja) * 1983-11-30 1985-06-24 Hitachi Condenser Co Ltd イオンプレ−ティング装置
JPS60262971A (ja) * 1984-06-08 1985-12-26 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成方法
JPS6372107A (ja) * 1983-12-19 1988-04-01 スペクトラム　コントロール　インコーポレーテッド コンデンサを製造するための製造装置
JP2006336109A (ja) * 2006-06-22 2006-12-14 Toppan Printing Co Ltd 防汚性薄膜の形成方法
WO2012121238A1 (ja) * 2011-03-09 2012-09-13 コニカミノルタホールディングス株式会社 蒸着用シート、蒸着装置、及び蒸着用シートの製造方法
JP2013040357A (ja) * 2011-08-11 2013-02-28 Optorun Co Ltd 成膜装置
WO2017208826A1 (ja) * 2016-05-30 2017-12-07 ソニー株式会社 薄膜製造方法、薄膜製造装置、光電変換素子の製造方法、論理回路の製造方法、発光素子の製造方法及び調光素子の製造方法
JP2020139102A (ja) * 2019-03-01 2020-09-03 株式会社ニデック ハードコート付き樹脂体の製造方法

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
DE3682130D1 (de) * 1985-07-15 1991-11-28 Japan Res Dev Corp Verfahren zur herstellung von ultrafeinen organischen verbindungen.
US4650700A (en) * 1985-10-11 1987-03-17 Toyo Seikan Kaisha, Ltd. Method for surface treatment of metal blanks
US4675270A (en) * 1986-02-10 1987-06-23 Loctite (Ireland) Limited Imaging method for vapor deposited photoresists of anionically polymerizable monomer
US4675273A (en) * 1986-02-10 1987-06-23 Loctite (Ireland) Limited Resists formed by vapor deposition of anionically polymerizable monomer
US4954371A (en) * 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
JP2530350B2 (ja) * 1986-06-23 1996-09-04 スペクトラム コントロール，インコーポレイテッド モノマ―流体のフラッシュ蒸発
JPH068503B2 (ja) * 1987-03-31 1994-02-02 セントラル硝子株式会社 含フツ素樹脂被膜の形成方法
US4777109A (en) * 1987-05-11 1988-10-11 Robert Gumbinner RF plasma treated photosensitive lithographic printing plates
JP2678055B2 (ja) * 1989-03-30 1997-11-17 シャープ株式会社 有機化合物薄膜の製法
US4975299A (en) * 1989-11-02 1990-12-04 Eastman Kodak Company Vapor deposition process for depositing an organo-metallic compound layer on a substrate
US5271968A (en) * 1990-02-20 1993-12-21 General Electric Company Method for production of an acrylic coated polycarbonate article
US5863608A (en) * 1990-04-10 1999-01-26 Sheldahl, Inc. Method of preparing adherent/coherent amorphous fluorocarbon coatings
US5681575A (en) 1992-05-19 1997-10-28 Westaim Technologies Inc. Anti-microbial coating for medical devices
GEP20002074B (en) * 1992-05-19 2000-05-10 Westaim Tech Inc Ca Modified Material and Method for its Production
US5260095A (en) * 1992-08-21 1993-11-09 Battelle Memorial Institute Vacuum deposition and curing of liquid monomers
US5688556A (en) * 1994-04-01 1997-11-18 Mobil Oil Corporation Barrier films having vapor coated EVOH surfaces
US5593794A (en) * 1995-01-23 1997-01-14 Duracell Inc. Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell
US5607789A (en) * 1995-01-23 1997-03-04 Duracell Inc. Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same
KR100449961B1 (ko) * 1995-09-18 2004-09-24 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 피복 기재의 건조 장치
US6153259A (en) 1996-05-21 2000-11-28 Matsushita Electric Industrial Co., Ltd. Thin film, method and apparatus for forming the same, and electronic component incorporating the same
US5811156A (en) * 1997-01-24 1998-09-22 Eastman Kodak Company Method of making a color filter array by colorant transfer and etch
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
US6045864A (en) * 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
US6309508B1 (en) * 1998-01-15 2001-10-30 3M Innovative Properties Company Spinning disk evaporator
JP3586551B2 (ja) * 1998-01-27 2004-11-10 松下電器産業株式会社 光記録媒体の製造方法及び製造装置
US6589641B1 (en) 1998-06-04 2003-07-08 Seagate Technology Llc Thin films of crosslinked fluoropolymer on a carbon substrate
US6863851B2 (en) * 1998-10-23 2005-03-08 Avery Dennison Corporation Process for making angstrom scale and high aspect functional platelets
DE69913982T2 (de) * 1998-10-23 2004-12-09 Avery Dennison Corp., Pasadena Verfahren zur herstellung von metallplättchen
US6503564B1 (en) 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
US6617011B2 (en) * 1999-05-07 2003-09-09 Seagate Technology Llc Elastomeric lubricants for magnetic recording media
US6680079B1 (en) * 2000-06-02 2004-01-20 Seagate Technology Llc Planarization and corrosion protection of patterned magnetic media
DE60143926D1 (de) * 2000-06-22 2011-03-10 Junji Kido Vorrichtung und Verfahren zum Vakuum-Ausdampfen
AUPQ859000A0 (en) 2000-07-06 2000-07-27 Commonwealth Scientific And Industrial Research Organisation Apparatus for surface engineering
WO2002004552A1 (en) * 2000-07-06 2002-01-17 Commonwealth Scientific And Industrial Research Organisation A process for modifying the surface of a substrate containing a polymeric material by means of vaporising the surface modifying agent
US20030072689A1 (en) * 2001-08-15 2003-04-17 Third Wave Technologies, Inc. Polymer synthesizer
US6468595B1 (en) * 2001-02-13 2002-10-22 Sigma Technologies International, Inc. Vaccum deposition of cationic polymer systems
US6849304B1 (en) 2001-03-16 2005-02-01 Seagate Technology Llc Method of forming lubricant films
US20050241585A1 (en) * 2004-04-30 2005-11-03 Eastman Kodak Company System for vaporizing materials onto a substrate surface
US7195848B2 (en) * 2004-08-30 2007-03-27 Eastman Kodak Company Method of making inlaid color filter arrays
US8163090B2 (en) * 2007-12-10 2012-04-24 Solopower, Inc. Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation
DE102013109663A1 (de) * 2013-09-04 2015-03-05 Fhr Anlagenbau Gmbh Bedampfungseinrichtung zum Beschichten flächenförmiger Substrate
US9380813B2 (en) * 2014-02-11 2016-07-05 Timothy McCullough Drug delivery system and method
US10821240B2 (en) 2014-02-11 2020-11-03 Vapor Cartridge Technology Llc Methods and drug delivery devices using cannabis
US9220294B2 (en) 2014-02-11 2015-12-29 Timothy McCullough Methods and devices using cannabis vapors
TWI523962B (zh) * 2014-10-03 2016-03-01 Nat Inst Chung Shan Science & Technology Method and apparatus for stabilizing vapor deposition uniformity film
US11497249B2 (en) 2019-09-16 2022-11-15 Vapor Cartridge Technology Llc Drug delivery system with stackable substrates

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE635545A (ja) * 1962-08-14
US3296011A (en) * 1963-05-24 1967-01-03 Du Pont Surface treatment of perfluorocarbon polymer structures
US3362848A (en) * 1964-03-03 1968-01-09 Mc Donnell Douglas Corp Apparatus and method for evaporative coating
US3379803A (en) * 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
GB1168641A (en) * 1966-05-19 1969-10-29 British Iron Steel Research Formation of Polymer Coatings on Substrates.
GB1253124A (ja) * 1969-02-28 1971-11-10
JPS5249515B2 (ja) * 1972-09-11 1977-12-17
JPS5120356A (en) * 1974-08-08 1976-02-18 Mitsubishi Heavy Ind Ltd Fuookurifutono tentoboshisochi
FR2340995A1 (fr) * 1976-02-16 1977-09-09 Fuji Photo Film Co Ltd Procede de fabrication d'un materiau en feuille comportant une couche metallique deposee sous vide, et procede de fabrication d'un materiau d'enregistrement
DE2624700A1 (de) * 1976-06-02 1977-12-15 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zum gleichfoermigen beschichten von flaechigen substraten
JPS5321907A (en) * 1976-08-11 1978-02-28 Matsushita Electric Ind Co Ltd Magnetically recording and reproducing system
US4325986A (en) * 1979-05-29 1982-04-20 University Of Delaware Method for continuous deposition by vacuum evaporation

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH055894B2 (ja) * 1983-03-24 1993-01-25 Matsushita Electric Ind Co Ltd
JPS59177365A (ja) * 1983-03-24 1984-10-08 Matsushita Electric Ind Co Ltd 蒸発方法とその装置
JPH0379435B2 (ja) * 1983-11-30 1991-12-18 Hitachi Aic Inc
JPS60116773A (ja) * 1983-11-30 1985-06-24 Hitachi Condenser Co Ltd イオンプレ−ティング装置
JPS6372107A (ja) * 1983-12-19 1988-04-01 スペクトラム　コントロール　インコーポレーテッド コンデンサを製造するための製造装置
JPS6372108A (ja) * 1983-12-19 1988-04-01 スペクトラム　コントロール　インコーポレーテッド コンデンサを製造するための高速度製造方法
JPS60262971A (ja) * 1984-06-08 1985-12-26 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成方法
JP2006336109A (ja) * 2006-06-22 2006-12-14 Toppan Printing Co Ltd 防汚性薄膜の形成方法
WO2012121238A1 (ja) * 2011-03-09 2012-09-13 コニカミノルタホールディングス株式会社 蒸着用シート、蒸着装置、及び蒸着用シートの製造方法
JP2013040357A (ja) * 2011-08-11 2013-02-28 Optorun Co Ltd 成膜装置
WO2017208826A1 (ja) * 2016-05-30 2017-12-07 ソニー株式会社 薄膜製造方法、薄膜製造装置、光電変換素子の製造方法、論理回路の製造方法、発光素子の製造方法及び調光素子の製造方法
KR20190015702A (ko) * 2016-05-30 2019-02-14 소니 주식회사 박막 제조 방법, 박막 제조 장치, 광전 변환 소자의 제조 방법, 논리 회로의 제조 방법, 발광 소자의 제조 방법 및 조광 소자의 제조 방법
JPWO2017208826A1 (ja) * 2016-05-30 2019-03-28 ソニー株式会社 薄膜製造方法、薄膜製造装置、光電変換素子の製造方法、論理回路の製造方法、発光素子の製造方法及び調光素子の製造方法
US10679850B2 (en) 2016-05-30 2020-06-09 Sony Corporation Manufacturing method for forming a thin film between two terminals
JP2020139102A (ja) * 2019-03-01 2020-09-03 株式会社ニデック ハードコート付き樹脂体の製造方法

Also Published As

Publication number Publication date
DE3205384A1 (de) 1982-09-16
DE3205384C2 (ja) 1990-06-07
US4543275A (en) 1985-09-24
JPH0141700B2 (ja) 1989-09-07

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