JPS5661138A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5661138A JPS5661138A JP13688279A JP13688279A JPS5661138A JP S5661138 A JPS5661138 A JP S5661138A JP 13688279 A JP13688279 A JP 13688279A JP 13688279 A JP13688279 A JP 13688279A JP S5661138 A JPS5661138 A JP S5661138A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- emitter
- layers
- film
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13688279A JPS5661138A (en) | 1979-10-23 | 1979-10-23 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13688279A JPS5661138A (en) | 1979-10-23 | 1979-10-23 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5661138A true JPS5661138A (en) | 1981-05-26 |
Family
ID=15185742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13688279A Pending JPS5661138A (en) | 1979-10-23 | 1979-10-23 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5661138A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59191372A (ja) * | 1983-04-14 | 1984-10-30 | Nec Corp | 半導体装置の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5380174A (en) * | 1976-12-25 | 1978-07-15 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1979
- 1979-10-23 JP JP13688279A patent/JPS5661138A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5380174A (en) * | 1976-12-25 | 1978-07-15 | Fujitsu Ltd | Manufacture of semiconductor device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59191372A (ja) * | 1983-04-14 | 1984-10-30 | Nec Corp | 半導体装置の製造方法 |
JPH0425705B2 (ja) * | 1983-04-14 | 1992-05-01 | Nippon Electric Co |
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