JPS5638840A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5638840A JPS5638840A JP11459179A JP11459179A JPS5638840A JP S5638840 A JPS5638840 A JP S5638840A JP 11459179 A JP11459179 A JP 11459179A JP 11459179 A JP11459179 A JP 11459179A JP S5638840 A JPS5638840 A JP S5638840A
- Authority
- JP
- Japan
- Prior art keywords
- insulation film
- film
- polycrystalline
- metal
- insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000009413 insulation Methods 0.000 abstract 5
- 239000002184 metal Substances 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910021332 silicide Inorganic materials 0.000 abstract 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11459179A JPS5638840A (en) | 1979-09-06 | 1979-09-06 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11459179A JPS5638840A (en) | 1979-09-06 | 1979-09-06 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5638840A true JPS5638840A (en) | 1981-04-14 |
| JPS6227542B2 JPS6227542B2 (enrdf_load_stackoverflow) | 1987-06-15 |
Family
ID=14641684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11459179A Granted JPS5638840A (en) | 1979-09-06 | 1979-09-06 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5638840A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961179A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | バイポ−ラ半導体装置の製造方法 |
| JPS6037124A (ja) * | 1983-08-09 | 1985-02-26 | Seiko Epson Corp | 半導体装置 |
| JPS6041259A (ja) * | 1983-08-17 | 1985-03-04 | Nec Corp | 半導体装置 |
| JPS60115265A (ja) * | 1983-11-28 | 1985-06-21 | Nec Corp | 半導体装置及びその製造方法 |
| JPS60214563A (ja) * | 1984-04-09 | 1985-10-26 | Mitsubishi Electric Corp | バイポ−ラトランジスタの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5133983A (en) * | 1974-09-17 | 1976-03-23 | Mitsubishi Electric Corp | Handotaisochi no seizohoho |
-
1979
- 1979-09-06 JP JP11459179A patent/JPS5638840A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5133983A (en) * | 1974-09-17 | 1976-03-23 | Mitsubishi Electric Corp | Handotaisochi no seizohoho |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961179A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | バイポ−ラ半導体装置の製造方法 |
| JPS6037124A (ja) * | 1983-08-09 | 1985-02-26 | Seiko Epson Corp | 半導体装置 |
| JPS6041259A (ja) * | 1983-08-17 | 1985-03-04 | Nec Corp | 半導体装置 |
| JPS60115265A (ja) * | 1983-11-28 | 1985-06-21 | Nec Corp | 半導体装置及びその製造方法 |
| JPS60214563A (ja) * | 1984-04-09 | 1985-10-26 | Mitsubishi Electric Corp | バイポ−ラトランジスタの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6227542B2 (enrdf_load_stackoverflow) | 1987-06-15 |
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