JPS561559A - One-transistor type dynamic memory cell - Google Patents
One-transistor type dynamic memory cellInfo
- Publication number
- JPS561559A JPS561559A JP7717079A JP7717079A JPS561559A JP S561559 A JPS561559 A JP S561559A JP 7717079 A JP7717079 A JP 7717079A JP 7717079 A JP7717079 A JP 7717079A JP S561559 A JPS561559 A JP S561559A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- type
- layer
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 abstract 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
- 229920005591 polysilicon Polymers 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000005260 alpha ray Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7717079A JPS561559A (en) | 1979-06-19 | 1979-06-19 | One-transistor type dynamic memory cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7717079A JPS561559A (en) | 1979-06-19 | 1979-06-19 | One-transistor type dynamic memory cell |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS561559A true JPS561559A (en) | 1981-01-09 |
Family
ID=13626308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7717079A Pending JPS561559A (en) | 1979-06-19 | 1979-06-19 | One-transistor type dynamic memory cell |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS561559A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5670658A (en) * | 1979-11-14 | 1981-06-12 | Mitsubishi Electric Corp | Semiconductor capacitor |
EP0092985A2 (en) * | 1982-04-28 | 1983-11-02 | Kabushiki Kaisha Toshiba | Dynamic memory device |
FR2554954A1 (fr) * | 1983-11-11 | 1985-05-17 | Hitachi Ltd | Dispositif de memoire a semi-conducteurs |
JPS61186985U (ja) * | 1985-05-07 | 1986-11-21 | ||
JPH01149296A (ja) * | 1987-12-03 | 1989-06-12 | Mitsubishi Electric Corp | 半導体記憶装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50125684A (ja) * | 1974-03-20 | 1975-10-02 | ||
JPS5417681A (en) * | 1977-07-08 | 1979-02-09 | Fujitsu Ltd | Manufacture of semiconductor memory device |
JPS5454588A (en) * | 1977-10-08 | 1979-04-28 | Cho Lsi Gijutsu Kenkyu Kumiai | Semiconductor ic |
-
1979
- 1979-06-19 JP JP7717079A patent/JPS561559A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50125684A (ja) * | 1974-03-20 | 1975-10-02 | ||
JPS5417681A (en) * | 1977-07-08 | 1979-02-09 | Fujitsu Ltd | Manufacture of semiconductor memory device |
JPS5454588A (en) * | 1977-10-08 | 1979-04-28 | Cho Lsi Gijutsu Kenkyu Kumiai | Semiconductor ic |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5670658A (en) * | 1979-11-14 | 1981-06-12 | Mitsubishi Electric Corp | Semiconductor capacitor |
EP0092985A2 (en) * | 1982-04-28 | 1983-11-02 | Kabushiki Kaisha Toshiba | Dynamic memory device |
FR2554954A1 (fr) * | 1983-11-11 | 1985-05-17 | Hitachi Ltd | Dispositif de memoire a semi-conducteurs |
JPS61186985U (ja) * | 1985-05-07 | 1986-11-21 | ||
JPH01149296A (ja) * | 1987-12-03 | 1989-06-12 | Mitsubishi Electric Corp | 半導体記憶装置 |
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