JPS5417681A - Manufacture of semiconductor memory device - Google Patents

Manufacture of semiconductor memory device

Info

Publication number
JPS5417681A
JPS5417681A JP8182477A JP8182477A JPS5417681A JP S5417681 A JPS5417681 A JP S5417681A JP 8182477 A JP8182477 A JP 8182477A JP 8182477 A JP8182477 A JP 8182477A JP S5417681 A JPS5417681 A JP S5417681A
Authority
JP
Japan
Prior art keywords
manufacture
memory device
semiconductor memory
memory
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8182477A
Other languages
Japanese (ja)
Inventor
Takashi Sato
Hiroshi Yano
Haruo Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8182477A priority Critical patent/JPS5417681A/en
Publication of JPS5417681A publication Critical patent/JPS5417681A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE:To manufacture a memory device by increasing the capacity of a memory capacitor without changing the occupied area of a memory cell and the depth of a drain layer.
JP8182477A 1977-07-08 1977-07-08 Manufacture of semiconductor memory device Pending JPS5417681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8182477A JPS5417681A (en) 1977-07-08 1977-07-08 Manufacture of semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8182477A JPS5417681A (en) 1977-07-08 1977-07-08 Manufacture of semiconductor memory device

Publications (1)

Publication Number Publication Date
JPS5417681A true JPS5417681A (en) 1979-02-09

Family

ID=13757222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8182477A Pending JPS5417681A (en) 1977-07-08 1977-07-08 Manufacture of semiconductor memory device

Country Status (1)

Country Link
JP (1) JPS5417681A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561559A (en) * 1979-06-19 1981-01-09 Fujitsu Ltd One-transistor type dynamic memory cell
JPS59124154A (en) * 1982-12-29 1984-07-18 Fujitsu Ltd Semiconductor memory device
JPS6344755A (en) * 1987-08-10 1988-02-25 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561559A (en) * 1979-06-19 1981-01-09 Fujitsu Ltd One-transistor type dynamic memory cell
JPS59124154A (en) * 1982-12-29 1984-07-18 Fujitsu Ltd Semiconductor memory device
JPH0474870B2 (en) * 1982-12-29 1992-11-27
JPS6344755A (en) * 1987-08-10 1988-02-25 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit device

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