JPS5552254A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5552254A JPS5552254A JP12556778A JP12556778A JPS5552254A JP S5552254 A JPS5552254 A JP S5552254A JP 12556778 A JP12556778 A JP 12556778A JP 12556778 A JP12556778 A JP 12556778A JP S5552254 A JPS5552254 A JP S5552254A
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- polysilicon
- film
- zone
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 4
- 229920005591 polysilicon Polymers 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 230000015654 memory Effects 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12556778A JPS5552254A (en) | 1978-10-11 | 1978-10-11 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12556778A JPS5552254A (en) | 1978-10-11 | 1978-10-11 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5552254A true JPS5552254A (en) | 1980-04-16 |
Family
ID=14913379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12556778A Pending JPS5552254A (en) | 1978-10-11 | 1978-10-11 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5552254A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5989452A (ja) * | 1982-10-07 | 1984-05-23 | シ−・アイ・アイ・ハネウエル・ブル | 多結晶半導体材料中に抵抗体を形成する方法、並びにこの方法により形成された抵抗体及び集積回路デバイス |
US5338968A (en) * | 1991-07-31 | 1994-08-16 | Sgs-Thomson | Method of forming isolated regions of oxide |
-
1978
- 1978-10-11 JP JP12556778A patent/JPS5552254A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5989452A (ja) * | 1982-10-07 | 1984-05-23 | シ−・アイ・アイ・ハネウエル・ブル | 多結晶半導体材料中に抵抗体を形成する方法、並びにこの方法により形成された抵抗体及び集積回路デバイス |
US5338968A (en) * | 1991-07-31 | 1994-08-16 | Sgs-Thomson | Method of forming isolated regions of oxide |
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