JPS55133042A - Pattern forming method - Google Patents
Pattern forming methodInfo
- Publication number
- JPS55133042A JPS55133042A JP3972679A JP3972679A JPS55133042A JP S55133042 A JPS55133042 A JP S55133042A JP 3972679 A JP3972679 A JP 3972679A JP 3972679 A JP3972679 A JP 3972679A JP S55133042 A JPS55133042 A JP S55133042A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- film
- cyclohexyl methacrylate
- monomer
- 90mol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3972679A JPS55133042A (en) | 1979-04-04 | 1979-04-04 | Pattern forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3972679A JPS55133042A (en) | 1979-04-04 | 1979-04-04 | Pattern forming method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55133042A true JPS55133042A (en) | 1980-10-16 |
JPS574893B2 JPS574893B2 (ja) | 1982-01-28 |
Family
ID=12560977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3972679A Granted JPS55133042A (en) | 1979-04-04 | 1979-04-04 | Pattern forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55133042A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58116532A (ja) * | 1981-12-29 | 1983-07-11 | Fujitsu Ltd | パタ−ン形成方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0670395A (ja) * | 1992-08-19 | 1994-03-11 | Onkyo Corp | スピーカ用リード線と端子金具との接続構造 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49103632A (ja) * | 1972-12-21 | 1974-10-01 | Philips Nv | |
JPS51105353A (ja) * | 1975-03-07 | 1976-09-17 | Hitachi Ltd | Denshisenkannoseikobunshisoseibutsu |
JPS51117577A (en) * | 1975-03-20 | 1976-10-15 | Philips Nv | Positive operation type electron resist |
JPS5332718A (en) * | 1976-09-07 | 1978-03-28 | Agency Of Ind Science & Technol | Polymer material having positive type image formation ability |
JPS5353314A (en) * | 1976-10-26 | 1978-05-15 | Agency Of Ind Science & Technol | Sensitive high polymer composition and picture imae forming method usingsaid composition |
JPS5466122A (en) * | 1977-11-07 | 1979-05-28 | Fujitsu Ltd | Pattern formation material |
JPS5466776A (en) * | 1977-11-07 | 1979-05-29 | Fujitsu Ltd | Fine pattern forming method |
JPS5466829A (en) * | 1977-11-07 | 1979-05-29 | Fujitsu Ltd | Pattern formation materil |
-
1979
- 1979-04-04 JP JP3972679A patent/JPS55133042A/ja active Granted
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49103632A (ja) * | 1972-12-21 | 1974-10-01 | Philips Nv | |
JPS51105353A (ja) * | 1975-03-07 | 1976-09-17 | Hitachi Ltd | Denshisenkannoseikobunshisoseibutsu |
JPS51117577A (en) * | 1975-03-20 | 1976-10-15 | Philips Nv | Positive operation type electron resist |
JPS5332718A (en) * | 1976-09-07 | 1978-03-28 | Agency Of Ind Science & Technol | Polymer material having positive type image formation ability |
JPS5353314A (en) * | 1976-10-26 | 1978-05-15 | Agency Of Ind Science & Technol | Sensitive high polymer composition and picture imae forming method usingsaid composition |
JPS5466122A (en) * | 1977-11-07 | 1979-05-28 | Fujitsu Ltd | Pattern formation material |
JPS5466776A (en) * | 1977-11-07 | 1979-05-29 | Fujitsu Ltd | Fine pattern forming method |
JPS5466829A (en) * | 1977-11-07 | 1979-05-29 | Fujitsu Ltd | Pattern formation materil |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58116532A (ja) * | 1981-12-29 | 1983-07-11 | Fujitsu Ltd | パタ−ン形成方法 |
JPH0262859B2 (ja) * | 1981-12-29 | 1990-12-26 | Fujitsu Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS574893B2 (ja) | 1982-01-28 |
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