JPS55130842A - Method and device for continuously depositing solid substance layer on surface of substrate with high temperature - Google Patents

Method and device for continuously depositing solid substance layer on surface of substrate with high temperature

Info

Publication number
JPS55130842A
JPS55130842A JP1561380A JP1561380A JPS55130842A JP S55130842 A JPS55130842 A JP S55130842A JP 1561380 A JP1561380 A JP 1561380A JP 1561380 A JP1561380 A JP 1561380A JP S55130842 A JPS55130842 A JP S55130842A
Authority
JP
Japan
Prior art keywords
substrate
high temperature
solid substance
substance layer
continuously depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1561380A
Other languages
English (en)
Other versions
JPS6133904B2 (ja
Inventor
Karupusukopupu Rainharuto
Baumuberugaa Otsutoo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societa Italiana Vetro SIV SpA
Original Assignee
Societa Italiana Vetro SIV SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societa Italiana Vetro SIV SpA filed Critical Societa Italiana Vetro SIV SpA
Publication of JPS55130842A publication Critical patent/JPS55130842A/ja
Publication of JPS6133904B2 publication Critical patent/JPS6133904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/84—Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/212—TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C03C2217/241—Doped oxides with halides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C03C2217/244—Doped oxides with Sb
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters
JP1561380A 1979-02-14 1980-02-13 Method and device for continuously depositing solid substance layer on surface of substrate with high temperature Granted JPS55130842A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH141279A CH628600A5 (fr) 1979-02-14 1979-02-14 Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede.

Publications (2)

Publication Number Publication Date
JPS55130842A true JPS55130842A (en) 1980-10-11
JPS6133904B2 JPS6133904B2 (ja) 1986-08-05

Family

ID=4209839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1561380A Granted JPS55130842A (en) 1979-02-14 1980-02-13 Method and device for continuously depositing solid substance layer on surface of substrate with high temperature

Country Status (22)

Country Link
US (2) US4294868A (ja)
JP (1) JPS55130842A (ja)
KR (1) KR830002475B1 (ja)
AU (1) AU538579B2 (ja)
BE (1) BE881708A (ja)
BR (1) BR8000891A (ja)
CA (1) CA1136007A (ja)
CH (1) CH628600A5 (ja)
CS (1) CS274254B2 (ja)
DD (1) DD149058A5 (ja)
DE (1) DE3005797C2 (ja)
ES (1) ES8100356A1 (ja)
FR (1) FR2448943A1 (ja)
GB (1) GB2044137B (ja)
IT (1) IT1140560B (ja)
MX (1) MX154318A (ja)
NL (1) NL179043C (ja)
PL (1) PL126146B1 (ja)
SE (1) SE446091B (ja)
SU (1) SU1371499A3 (ja)
TR (1) TR20840A (ja)
ZA (1) ZA80824B (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62227091A (ja) * 1986-03-28 1987-10-06 Nippon Kokan Kk <Nkk> 連続処理ラインにおける化学気相蒸着方法
JPS63139033A (ja) * 1986-11-28 1988-06-10 Nec Corp プラズマディスプレイ用透明導電膜の製造方法
JP2001503005A (ja) * 1996-08-13 2001-03-06 ピルキントン ピーエルシー 平坦なガラス上に酸化スズコーティングおよび酸化チタンコーティングを堆積する方法およびこの方法により得られた被覆されたガラス
JP2008069071A (ja) * 1995-07-25 2008-03-27 Pilkington Group Ltd ガラスをコーティングする方法
JP2014520201A (ja) * 2011-03-23 2014-08-21 ピルキントン グループ リミテッド 薄膜コーティングを被覆するための装置およびこのような装置を用いた被覆方法
JP2018114504A (ja) * 2018-04-17 2018-07-26 東芝三菱電機産業システム株式会社 成膜装置
WO2023139925A1 (ja) * 2022-01-19 2023-07-27 東京エレクトロン株式会社 プラズマ成膜装置及びプラズマ成膜方法

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1134153B (it) * 1979-11-21 1986-07-31 Siv Soc Italiana Vetro Ugello per depositare in continuo su un substrato uno strato di una materia solida
CA1172918A (en) * 1980-02-15 1984-08-21 William E. Hofmann Process for making glass surfaces abrasion-resistant and article produced thereby
DE3123694A1 (de) * 1980-06-19 1982-03-18 Bfg Glassgroup, Paris Verfahren und vorrichtung zur beschichtung von glas
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4451000A (en) * 1982-06-11 1984-05-29 Hollis Engineering, Inc. Soldering apparatus exhaust system
US4477494A (en) * 1982-07-12 1984-10-16 Glass Containers Corporation Process for forming rust resistant tin oxide coatings on glass containers
US4524718A (en) * 1982-11-22 1985-06-25 Gordon Roy G Reactor for continuous coating of glass
GB2139612B (en) * 1983-05-13 1987-03-11 Glaverbel Coating a hot vitreous substrate
EP0173715B1 (en) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Method and apparatus for the gas jet deposition of conducting and dielectric thin solid films and products produced thereby
US4928627A (en) * 1985-12-23 1990-05-29 Atochem North America, Inc. Apparatus for coating a substrate
US5122394A (en) * 1985-12-23 1992-06-16 Atochem North America, Inc. Apparatus for coating a substrate
EP0276796B1 (en) * 1987-01-27 1992-04-08 Asahi Glass Company Ltd. Gas feeding nozzle for a chemical vapor deposition apparatus
GB2209176A (en) * 1987-08-28 1989-05-04 Pilkington Plc Coating glass
US4853257A (en) * 1987-09-30 1989-08-01 Ppg Industries, Inc. Chemical vapor deposition of tin oxide on float glass in the tin bath
US5136975A (en) * 1990-06-21 1992-08-11 Watkins-Johnson Company Injector and method for delivering gaseous chemicals to a surface
GB9300400D0 (en) * 1993-01-11 1993-03-03 Glaverbel A device and method for forming a coating by pyrolysis
US5453383A (en) * 1994-06-14 1995-09-26 General Mills, Inc. Method of applying sugar coating by using steam assisted discharge nozzle
US5534314A (en) * 1994-08-31 1996-07-09 University Of Virginia Patent Foundation Directed vapor deposition of electron beam evaporant
FR2724923B1 (fr) * 1994-09-27 1996-12-20 Saint Gobain Vitrage Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)
US5571332A (en) * 1995-02-10 1996-11-05 Jet Process Corporation Electron jet vapor deposition system
GB2302101B (en) * 1995-06-09 1999-03-10 Glaverbel A glazing panel having solar screening properties
US6231971B1 (en) * 1995-06-09 2001-05-15 Glaverbel Glazing panel having solar screening properties
GB2302102B (en) * 1995-06-09 1999-03-10 Glaverbel A glazing panel having solar screening properties and a process for making such a panel
CA2178032A1 (en) * 1995-06-09 1996-12-10 Robert Terneu Glazing panel having solar screening properties
MY129739A (en) * 1996-01-09 2007-04-30 Nippon Sheet Glass Co Ltd Coated glass for buildings
US5698262A (en) 1996-05-06 1997-12-16 Libbey-Owens-Ford Co. Method for forming tin oxide coating on glass
US6238738B1 (en) 1996-08-13 2001-05-29 Libbey-Owens-Ford Co. Method for depositing titanium oxide coatings on flat glass
US6027766A (en) 1997-03-14 2000-02-22 Ppg Industries Ohio, Inc. Photocatalytically-activated self-cleaning article and method of making same
US7096692B2 (en) 1997-03-14 2006-08-29 Ppg Industries Ohio, Inc. Visible-light-responsive photoactive coating, coated article, and method of making same
US6103015A (en) * 1998-01-19 2000-08-15 Libbey-Owens-Ford Co. Symmetrical CVD coater with lower upstream exhaust toe
US5904958A (en) * 1998-03-20 1999-05-18 Rexam Industries Corp. Adjustable nozzle for evaporation or organic monomers
US6268019B1 (en) 1998-06-04 2001-07-31 Atofina Chemicals, Inc. Preparation of fluorine modified, low haze, titanium dioxide films
DE19923591A1 (de) * 1999-05-21 2000-11-23 Fleissner Maschf Gmbh Co Vorrichtung mit einem Düsenbalken zur Erzeugung von Flüssigkeitsstrahlen zur Strahlbeaufschlagung der Fasern einer Warenbahn
GB9913315D0 (en) 1999-06-08 1999-08-11 Pilkington Plc Improved process for coating glass
DE10046557B4 (de) * 2000-09-19 2006-07-27 Datron-Electronic Gmbh Vorrichtung zum dosierten Ausbringen eines aus mehreren unterschiedlich viskosen Medien bestehenden Materialstranges mittels Koextrusion und mehrfunktionale Kombinationsdichtung
JP4124046B2 (ja) * 2003-07-10 2008-07-23 株式会社大阪チタニウムテクノロジーズ 金属酸化物被膜の成膜方法および蒸着装置
CN102154628B (zh) * 2004-08-02 2014-05-07 维高仪器股份有限公司 用于化学气相沉积反应器的多气体分配喷射器
US8398770B2 (en) * 2007-09-26 2013-03-19 Eastman Kodak Company Deposition system for thin film formation
US8709160B2 (en) * 2008-08-22 2014-04-29 United Technologies Corporation Deposition apparatus having thermal hood
US8404047B2 (en) * 2008-09-16 2013-03-26 United Technologies Corporation Electron beam vapor deposition apparatus and method
US20100104773A1 (en) * 2008-10-24 2010-04-29 Neal James W Method for use in a coating process
US8343591B2 (en) * 2008-10-24 2013-01-01 United Technologies Corporation Method for use with a coating process
US20100189929A1 (en) * 2009-01-28 2010-07-29 Neal James W Coating device and deposition apparatus
US20100247809A1 (en) * 2009-03-31 2010-09-30 Neal James W Electron beam vapor deposition apparatus for depositing multi-layer coating
GB201114242D0 (en) 2011-08-18 2011-10-05 Pilkington Group Ltd Tantalum oxide coatings
GB2510615A (en) * 2013-02-08 2014-08-13 Glyndwr University Gas blade injection system
US10704144B2 (en) 2015-10-12 2020-07-07 Universal Display Corporation Apparatus and method for printing multilayer organic thin films from vapor phase in an ultra-pure gas ambient
WO2017158145A1 (en) * 2016-03-18 2017-09-21 Basf Se Metal-doped tin oxide for electrocatalysis applications

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1307216A (en) * 1969-04-23 1973-02-14 Pilkington Brothers Ltd Treating glass
US3814327A (en) * 1971-04-06 1974-06-04 Gen Electric Nozzle for chemical reaction processes
CH544156A (de) * 1971-04-16 1973-11-15 Bbc Brown Boveri & Cie Verfahren zur Herstellung von oxydischen Halbleiterschichten und Vorrichtung zur Durchführung des Verfahrens
DE2121319A1 (de) * 1971-04-30 1973-01-18 Rocholl Martin Ggottfried Dipl Verfahren zum beschichten von glasscheiben mit einem optisch transparenten flaechenheizleiter
US3850679A (en) * 1972-12-15 1974-11-26 Ppg Industries Inc Chemical vapor deposition of coatings
FR2210675B1 (ja) * 1972-12-15 1978-05-12 Ppg Industries Inc
US3951100A (en) * 1972-12-15 1976-04-20 Ppg Industries, Inc. Chemical vapor deposition of coatings
DD109033A1 (ja) * 1973-12-11 1974-10-12

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62227091A (ja) * 1986-03-28 1987-10-06 Nippon Kokan Kk <Nkk> 連続処理ラインにおける化学気相蒸着方法
JPS63139033A (ja) * 1986-11-28 1988-06-10 Nec Corp プラズマディスプレイ用透明導電膜の製造方法
JPH0544418B2 (ja) * 1986-11-28 1993-07-06 Nippon Electric Co
JP2008069071A (ja) * 1995-07-25 2008-03-27 Pilkington Group Ltd ガラスをコーティングする方法
JP2001503005A (ja) * 1996-08-13 2001-03-06 ピルキントン ピーエルシー 平坦なガラス上に酸化スズコーティングおよび酸化チタンコーティングを堆積する方法およびこの方法により得られた被覆されたガラス
JP2008100913A (ja) * 1996-08-13 2008-05-01 Pilkington Group Ltd 平坦なガラス上に酸化スズコーティングを堆積する方法およびこの方法により得られた被覆されたガラス
JP2014520201A (ja) * 2011-03-23 2014-08-21 ピルキントン グループ リミテッド 薄膜コーティングを被覆するための装置およびこのような装置を用いた被覆方法
JP2018114504A (ja) * 2018-04-17 2018-07-26 東芝三菱電機産業システム株式会社 成膜装置
WO2023139925A1 (ja) * 2022-01-19 2023-07-27 東京エレクトロン株式会社 プラズマ成膜装置及びプラズマ成膜方法

Also Published As

Publication number Publication date
NL8000897A (nl) 1980-08-18
US4294868A (en) 1981-10-13
FR2448943B1 (ja) 1982-12-03
IT1140560B (it) 1986-10-01
DE3005797C2 (de) 1984-10-31
DD149058A5 (de) 1981-06-24
ES488517A0 (es) 1980-11-01
BE881708A (fr) 1980-05-30
GB2044137B (en) 1983-08-03
TR20840A (tr) 1982-10-19
CH628600A5 (fr) 1982-03-15
MX154318A (es) 1987-07-08
PL126146B1 (en) 1983-07-30
CS274254B2 (en) 1991-04-11
IT8019855A0 (it) 1980-02-12
CA1136007A (en) 1982-11-23
KR830001668A (ko) 1983-05-18
PL221965A1 (ja) 1980-11-17
AU5513980A (en) 1980-08-21
SE8001131L (sv) 1980-08-15
DE3005797A1 (de) 1980-08-28
ES8100356A1 (es) 1980-11-01
KR830002475B1 (ko) 1983-10-26
US4351267A (en) 1982-09-28
CS98280A2 (en) 1990-09-12
JPS6133904B2 (ja) 1986-08-05
ZA80824B (en) 1981-02-25
NL179043C (nl) 1986-07-01
SU1371499A3 (ru) 1988-01-30
SE446091B (sv) 1986-08-11
AU538579B2 (en) 1984-08-23
GB2044137A (en) 1980-10-15
FR2448943A1 (fr) 1980-09-12
BR8000891A (pt) 1980-10-21

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