JPS55105380A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS55105380A JPS55105380A JP1370379A JP1370379A JPS55105380A JP S55105380 A JPS55105380 A JP S55105380A JP 1370379 A JP1370379 A JP 1370379A JP 1370379 A JP1370379 A JP 1370379A JP S55105380 A JPS55105380 A JP S55105380A
- Authority
- JP
- Japan
- Prior art keywords
- film
- impurity
- heat
- covered
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1370379A JPS55105380A (en) | 1979-02-07 | 1979-02-07 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1370379A JPS55105380A (en) | 1979-02-07 | 1979-02-07 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55105380A true JPS55105380A (en) | 1980-08-12 |
Family
ID=11840561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1370379A Pending JPS55105380A (en) | 1979-02-07 | 1979-02-07 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55105380A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57126168A (en) * | 1981-01-29 | 1982-08-05 | Sumitomo Electric Ind Ltd | Schottky gate field effect transistor |
JPS5851572A (ja) * | 1981-09-22 | 1983-03-26 | Fujitsu Ltd | 半導体装置の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5115985A (en) * | 1974-07-31 | 1976-02-07 | Hitachi Ltd | Hatsukodaioodono seizohoho |
JPS5265664A (en) * | 1975-11-26 | 1977-05-31 | Sharp Corp | Selective introduction of impurity in compound semiconductor substrate |
-
1979
- 1979-02-07 JP JP1370379A patent/JPS55105380A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5115985A (en) * | 1974-07-31 | 1976-02-07 | Hitachi Ltd | Hatsukodaioodono seizohoho |
JPS5265664A (en) * | 1975-11-26 | 1977-05-31 | Sharp Corp | Selective introduction of impurity in compound semiconductor substrate |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57126168A (en) * | 1981-01-29 | 1982-08-05 | Sumitomo Electric Ind Ltd | Schottky gate field effect transistor |
JPS5851572A (ja) * | 1981-09-22 | 1983-03-26 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH0324059B2 (ja) * | 1981-09-22 | 1991-04-02 | Fujitsu Ltd |
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