JPS52116072A - Process for doping nitrogen to gallium phosphide - Google Patents
Process for doping nitrogen to gallium phosphideInfo
- Publication number
- JPS52116072A JPS52116072A JP3340576A JP3340576A JPS52116072A JP S52116072 A JPS52116072 A JP S52116072A JP 3340576 A JP3340576 A JP 3340576A JP 3340576 A JP3340576 A JP 3340576A JP S52116072 A JPS52116072 A JP S52116072A
- Authority
- JP
- Japan
- Prior art keywords
- gallium phosphide
- doping nitrogen
- doping
- nitrogen
- phosphide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To dope N2 to GaP by increasing the concentration of NH3 in carrier gas with a progress of epitaxial growth.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3340576A JPS52116072A (en) | 1976-03-25 | 1976-03-25 | Process for doping nitrogen to gallium phosphide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3340576A JPS52116072A (en) | 1976-03-25 | 1976-03-25 | Process for doping nitrogen to gallium phosphide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52116072A true JPS52116072A (en) | 1977-09-29 |
JPS5524692B2 JPS5524692B2 (en) | 1980-07-01 |
Family
ID=12385678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3340576A Granted JPS52116072A (en) | 1976-03-25 | 1976-03-25 | Process for doping nitrogen to gallium phosphide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52116072A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5453977A (en) * | 1977-10-07 | 1979-04-27 | Toshiba Corp | Manufacture for gallium phosphide green light emitting element |
JPS5453975A (en) * | 1977-10-07 | 1979-04-27 | Toshiba Corp | Manufacture for gallium phosphide green light emitting element |
JPS54133889A (en) * | 1978-04-08 | 1979-10-17 | Toshiba Corp | Manufacture of gallium-phosphide green luminous element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49127588A (en) * | 1973-04-06 | 1974-12-06 |
-
1976
- 1976-03-25 JP JP3340576A patent/JPS52116072A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49127588A (en) * | 1973-04-06 | 1974-12-06 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5453977A (en) * | 1977-10-07 | 1979-04-27 | Toshiba Corp | Manufacture for gallium phosphide green light emitting element |
JPS5453975A (en) * | 1977-10-07 | 1979-04-27 | Toshiba Corp | Manufacture for gallium phosphide green light emitting element |
JPS6136396B2 (en) * | 1977-10-07 | 1986-08-18 | Tokyo Shibaura Electric Co | |
JPS6136395B2 (en) * | 1977-10-07 | 1986-08-18 | Tokyo Shibaura Electric Co | |
JPS54133889A (en) * | 1978-04-08 | 1979-10-17 | Toshiba Corp | Manufacture of gallium-phosphide green luminous element |
JPS6136397B2 (en) * | 1978-04-08 | 1986-08-18 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS5524692B2 (en) | 1980-07-01 |
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