JPS52109867A - Manufacture for semiconductor crystal - Google Patents

Manufacture for semiconductor crystal

Info

Publication number
JPS52109867A
JPS52109867A JP2672976A JP2672976A JPS52109867A JP S52109867 A JPS52109867 A JP S52109867A JP 2672976 A JP2672976 A JP 2672976A JP 2672976 A JP2672976 A JP 2672976A JP S52109867 A JPS52109867 A JP S52109867A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor crystal
gaas
growning
ascl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2672976A
Other languages
Japanese (ja)
Inventor
Michihiro Ito
Hidejiro Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2672976A priority Critical patent/JPS52109867A/en
Publication of JPS52109867A publication Critical patent/JPS52109867A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To make uniform for the carrier density distribution, by saturating in advance As thru the mixing of GaAs crystal more than the solubility in Ga, in gas phase epitaxial growning of GaAs on the GaAs base by using Ga, AsCl3, H2 or inactive gas.
COPYRIGHT: (C)1977,JPO&Japio
JP2672976A 1976-03-12 1976-03-12 Manufacture for semiconductor crystal Pending JPS52109867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2672976A JPS52109867A (en) 1976-03-12 1976-03-12 Manufacture for semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2672976A JPS52109867A (en) 1976-03-12 1976-03-12 Manufacture for semiconductor crystal

Publications (1)

Publication Number Publication Date
JPS52109867A true JPS52109867A (en) 1977-09-14

Family

ID=12201396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2672976A Pending JPS52109867A (en) 1976-03-12 1976-03-12 Manufacture for semiconductor crystal

Country Status (1)

Country Link
JP (1) JPS52109867A (en)

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