JPS5249766A - Apparatus for producing semiconductor crystal - Google Patents
Apparatus for producing semiconductor crystalInfo
- Publication number
- JPS5249766A JPS5249766A JP12603275A JP12603275A JPS5249766A JP S5249766 A JPS5249766 A JP S5249766A JP 12603275 A JP12603275 A JP 12603275A JP 12603275 A JP12603275 A JP 12603275A JP S5249766 A JPS5249766 A JP S5249766A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor crystal
- producing semiconductor
- cnclosing
- letting
- molten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To make a uniform epitaxial layer free from fusion penetration, by cnclosing a GaAs substrate and the molten-liquid of a semiconductor material in a chamber containing Ga+As solution and letting epitaxial growth take place therein.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12603275A JPS5249766A (en) | 1975-10-20 | 1975-10-20 | Apparatus for producing semiconductor crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12603275A JPS5249766A (en) | 1975-10-20 | 1975-10-20 | Apparatus for producing semiconductor crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5249766A true JPS5249766A (en) | 1977-04-21 |
JPS5428264B2 JPS5428264B2 (en) | 1979-09-14 |
Family
ID=14924989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12603275A Granted JPS5249766A (en) | 1975-10-20 | 1975-10-20 | Apparatus for producing semiconductor crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5249766A (en) |
-
1975
- 1975-10-20 JP JP12603275A patent/JPS5249766A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5428264B2 (en) | 1979-09-14 |
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