Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Sony Corp
Original Assignee
Sony Corp
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Filing date
Publication date
Application filed by Sony CorpfiledCriticalSony Corp
Priority to JP12764475ApriorityCriticalpatent/JPS5251865A/en
Publication of JPS5251865ApublicationCriticalpatent/JPS5251865A/en
PURPOSE: To control the carrier concentration of growing epitaxial layer at high reproducibility by controlling the effective contact area of group III elements and gaseous compound material of group V elements.
COPYRIGHT: (C)1977,JPO&Japio
JP12764475A1975-10-231975-10-23Vapor growth of group iii-v compound semiconductor crystal
PendingJPS5251865A
(en)