JPS5244193A - Epitaxial growth method - Google Patents

Epitaxial growth method

Info

Publication number
JPS5244193A
JPS5244193A JP11973775A JP11973775A JPS5244193A JP S5244193 A JPS5244193 A JP S5244193A JP 11973775 A JP11973775 A JP 11973775A JP 11973775 A JP11973775 A JP 11973775A JP S5244193 A JPS5244193 A JP S5244193A
Authority
JP
Japan
Prior art keywords
epitaxial growth
growth method
gaalas
epitaxy
gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11973775A
Other languages
Japanese (ja)
Inventor
Toshihisa Tsukada
Noriyuki Shige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11973775A priority Critical patent/JPS5244193A/en
Publication of JPS5244193A publication Critical patent/JPS5244193A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE: To use the exposed surface of GaAs excluding the GaAlAs layer on the surface thereby easily effecting epitaxy on GaAlAs.
COPYRIGHT: (C)1977,JPO&Japio
JP11973775A 1975-10-06 1975-10-06 Epitaxial growth method Pending JPS5244193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11973775A JPS5244193A (en) 1975-10-06 1975-10-06 Epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11973775A JPS5244193A (en) 1975-10-06 1975-10-06 Epitaxial growth method

Publications (1)

Publication Number Publication Date
JPS5244193A true JPS5244193A (en) 1977-04-06

Family

ID=14768867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11973775A Pending JPS5244193A (en) 1975-10-06 1975-10-06 Epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5244193A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474689A (en) * 1977-11-28 1979-06-14 Nippon Telegr & Teleph Corp <Ntt> Semiconductor laser device and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474689A (en) * 1977-11-28 1979-06-14 Nippon Telegr & Teleph Corp <Ntt> Semiconductor laser device and its manufacture

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