JPS5244562A - Epitaxial growth method - Google Patents

Epitaxial growth method

Info

Publication number
JPS5244562A
JPS5244562A JP12025275A JP12025275A JPS5244562A JP S5244562 A JPS5244562 A JP S5244562A JP 12025275 A JP12025275 A JP 12025275A JP 12025275 A JP12025275 A JP 12025275A JP S5244562 A JPS5244562 A JP S5244562A
Authority
JP
Japan
Prior art keywords
epitaxial growth
growth method
laser beam
wafer surface
beam pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12025275A
Other languages
Japanese (ja)
Other versions
JPS5943815B2 (en
Inventor
Minoru Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50120252A priority Critical patent/JPS5943815B2/en
Publication of JPS5244562A publication Critical patent/JPS5244562A/en
Publication of JPS5943815B2 publication Critical patent/JPS5943815B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To locally heat wafer surface by using laser beam pulse thereby effecting epitaxial growth.
COPYRIGHT: (C)1977,JPO&Japio
JP50120252A 1975-10-07 1975-10-07 epitaxial growth method Expired JPS5943815B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50120252A JPS5943815B2 (en) 1975-10-07 1975-10-07 epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50120252A JPS5943815B2 (en) 1975-10-07 1975-10-07 epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS5244562A true JPS5244562A (en) 1977-04-07
JPS5943815B2 JPS5943815B2 (en) 1984-10-24

Family

ID=14781583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50120252A Expired JPS5943815B2 (en) 1975-10-07 1975-10-07 epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5943815B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124229A (en) * 1980-03-05 1981-09-29 Matsushita Electric Ind Co Ltd Manufacture of thin film
JPS60118689A (en) * 1983-11-29 1985-06-26 Rikagaku Kenkyusho Method for growing crystal
JPS60126820A (en) * 1983-12-13 1985-07-06 Fujitsu Ltd Chemical vapor growth method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111585A (en) * 1973-02-23 1974-10-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111585A (en) * 1973-02-23 1974-10-24

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124229A (en) * 1980-03-05 1981-09-29 Matsushita Electric Ind Co Ltd Manufacture of thin film
JPS637020B2 (en) * 1980-03-05 1988-02-15 Matsushita Electric Ind Co Ltd
JPS60118689A (en) * 1983-11-29 1985-06-26 Rikagaku Kenkyusho Method for growing crystal
JPH052637B2 (en) * 1983-11-29 1993-01-12 Rikagaku Kenkyusho
JPS60126820A (en) * 1983-12-13 1985-07-06 Fujitsu Ltd Chemical vapor growth method

Also Published As

Publication number Publication date
JPS5943815B2 (en) 1984-10-24

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