JPS5244562A - Epitaxial growth method - Google Patents
Epitaxial growth methodInfo
- Publication number
- JPS5244562A JPS5244562A JP12025275A JP12025275A JPS5244562A JP S5244562 A JPS5244562 A JP S5244562A JP 12025275 A JP12025275 A JP 12025275A JP 12025275 A JP12025275 A JP 12025275A JP S5244562 A JPS5244562 A JP S5244562A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- growth method
- laser beam
- wafer surface
- beam pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To locally heat wafer surface by using laser beam pulse thereby effecting epitaxial growth.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50120252A JPS5943815B2 (en) | 1975-10-07 | 1975-10-07 | epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50120252A JPS5943815B2 (en) | 1975-10-07 | 1975-10-07 | epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5244562A true JPS5244562A (en) | 1977-04-07 |
JPS5943815B2 JPS5943815B2 (en) | 1984-10-24 |
Family
ID=14781583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50120252A Expired JPS5943815B2 (en) | 1975-10-07 | 1975-10-07 | epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5943815B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56124229A (en) * | 1980-03-05 | 1981-09-29 | Matsushita Electric Ind Co Ltd | Manufacture of thin film |
JPS60118689A (en) * | 1983-11-29 | 1985-06-26 | Rikagaku Kenkyusho | Method for growing crystal |
JPS60126820A (en) * | 1983-12-13 | 1985-07-06 | Fujitsu Ltd | Chemical vapor growth method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49111585A (en) * | 1973-02-23 | 1974-10-24 |
-
1975
- 1975-10-07 JP JP50120252A patent/JPS5943815B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49111585A (en) * | 1973-02-23 | 1974-10-24 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56124229A (en) * | 1980-03-05 | 1981-09-29 | Matsushita Electric Ind Co Ltd | Manufacture of thin film |
JPS637020B2 (en) * | 1980-03-05 | 1988-02-15 | Matsushita Electric Ind Co Ltd | |
JPS60118689A (en) * | 1983-11-29 | 1985-06-26 | Rikagaku Kenkyusho | Method for growing crystal |
JPH052637B2 (en) * | 1983-11-29 | 1993-01-12 | Rikagaku Kenkyusho | |
JPS60126820A (en) * | 1983-12-13 | 1985-07-06 | Fujitsu Ltd | Chemical vapor growth method |
Also Published As
Publication number | Publication date |
---|---|
JPS5943815B2 (en) | 1984-10-24 |
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