JPS5286775A - Bebeling method for semiconductor substrate - Google Patents

Bebeling method for semiconductor substrate

Info

Publication number
JPS5286775A
JPS5286775A JP283476A JP283476A JPS5286775A JP S5286775 A JPS5286775 A JP S5286775A JP 283476 A JP283476 A JP 283476A JP 283476 A JP283476 A JP 283476A JP S5286775 A JPS5286775 A JP S5286775A
Authority
JP
Japan
Prior art keywords
bebeling
semiconductor substrate
ingot
beveling
slicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP283476A
Other languages
Japanese (ja)
Inventor
Akio Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP283476A priority Critical patent/JPS5286775A/en
Publication of JPS5286775A publication Critical patent/JPS5286775A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE: To obtain a flat vapor growth surface by beveling the cut end surface of a of a fixed ingot, then slicing the ingot.
COPYRIGHT: (C)1977,JPO&Japio
JP283476A 1976-01-14 1976-01-14 Bebeling method for semiconductor substrate Pending JPS5286775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP283476A JPS5286775A (en) 1976-01-14 1976-01-14 Bebeling method for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP283476A JPS5286775A (en) 1976-01-14 1976-01-14 Bebeling method for semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5286775A true JPS5286775A (en) 1977-07-19

Family

ID=11540437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP283476A Pending JPS5286775A (en) 1976-01-14 1976-01-14 Bebeling method for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5286775A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55160426A (en) * 1979-05-31 1980-12-13 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55160426A (en) * 1979-05-31 1980-12-13 Fujitsu Ltd Manufacture of semiconductor device

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