JPS52153093A - Temperature control apparatus - Google Patents
Temperature control apparatusInfo
- Publication number
- JPS52153093A JPS52153093A JP7005476A JP7005476A JPS52153093A JP S52153093 A JPS52153093 A JP S52153093A JP 7005476 A JP7005476 A JP 7005476A JP 7005476 A JP7005476 A JP 7005476A JP S52153093 A JPS52153093 A JP S52153093A
- Authority
- JP
- Japan
- Prior art keywords
- control apparatus
- temperature control
- scan
- substance
- allowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Lasers (AREA)
- Control Of Temperature (AREA)
Abstract
PURPOSE: To control the surface temperature by allowing the laser beam to scan the surface of the substance to be heated.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7005476A JPS52153093A (en) | 1976-06-14 | 1976-06-14 | Temperature control apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7005476A JPS52153093A (en) | 1976-06-14 | 1976-06-14 | Temperature control apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52153093A true JPS52153093A (en) | 1977-12-19 |
Family
ID=13420449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7005476A Pending JPS52153093A (en) | 1976-06-14 | 1976-06-14 | Temperature control apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52153093A (en) |
-
1976
- 1976-06-14 JP JP7005476A patent/JPS52153093A/en active Pending
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