JPS52153093A - Temperature control apparatus - Google Patents

Temperature control apparatus

Info

Publication number
JPS52153093A
JPS52153093A JP7005476A JP7005476A JPS52153093A JP S52153093 A JPS52153093 A JP S52153093A JP 7005476 A JP7005476 A JP 7005476A JP 7005476 A JP7005476 A JP 7005476A JP S52153093 A JPS52153093 A JP S52153093A
Authority
JP
Japan
Prior art keywords
control apparatus
temperature control
scan
substance
allowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7005476A
Other languages
Japanese (ja)
Inventor
Terubumi Honjo
Yoshiyasu Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7005476A priority Critical patent/JPS52153093A/en
Publication of JPS52153093A publication Critical patent/JPS52153093A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Lasers (AREA)
  • Control Of Temperature (AREA)

Abstract

PURPOSE: To control the surface temperature by allowing the laser beam to scan the surface of the substance to be heated.
COPYRIGHT: (C)1977,JPO&Japio
JP7005476A 1976-06-14 1976-06-14 Temperature control apparatus Pending JPS52153093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7005476A JPS52153093A (en) 1976-06-14 1976-06-14 Temperature control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7005476A JPS52153093A (en) 1976-06-14 1976-06-14 Temperature control apparatus

Publications (1)

Publication Number Publication Date
JPS52153093A true JPS52153093A (en) 1977-12-19

Family

ID=13420449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7005476A Pending JPS52153093A (en) 1976-06-14 1976-06-14 Temperature control apparatus

Country Status (1)

Country Link
JP (1) JPS52153093A (en)

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