JPS52112276A - Liquid-phase epitaxial growth system - Google Patents
Liquid-phase epitaxial growth systemInfo
- Publication number
- JPS52112276A JPS52112276A JP2887676A JP2887676A JPS52112276A JP S52112276 A JPS52112276 A JP S52112276A JP 2887676 A JP2887676 A JP 2887676A JP 2887676 A JP2887676 A JP 2887676A JP S52112276 A JPS52112276 A JP S52112276A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- epitaxial growth
- phase epitaxial
- growth system
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To obtain the epitaxial layer of less defects by having temperature slops to lower the temperature of the upper solution portion less than the lower portion by several degrees using an appropriate medium.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2887676A JPS52112276A (en) | 1976-03-16 | 1976-03-16 | Liquid-phase epitaxial growth system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2887676A JPS52112276A (en) | 1976-03-16 | 1976-03-16 | Liquid-phase epitaxial growth system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52112276A true JPS52112276A (en) | 1977-09-20 |
JPS5516531B2 JPS5516531B2 (en) | 1980-05-02 |
Family
ID=12260575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2887676A Granted JPS52112276A (en) | 1976-03-16 | 1976-03-16 | Liquid-phase epitaxial growth system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52112276A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866370A (en) * | 1971-12-14 | 1973-09-11 | ||
JPS4946871A (en) * | 1972-09-09 | 1974-05-07 |
-
1976
- 1976-03-16 JP JP2887676A patent/JPS52112276A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866370A (en) * | 1971-12-14 | 1973-09-11 | ||
JPS4946871A (en) * | 1972-09-09 | 1974-05-07 |
Also Published As
Publication number | Publication date |
---|---|
JPS5516531B2 (en) | 1980-05-02 |
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