JPS52103953A - Multi-layer liquid phase epitaxial method - Google Patents

Multi-layer liquid phase epitaxial method

Info

Publication number
JPS52103953A
JPS52103953A JP2034976A JP2034976A JPS52103953A JP S52103953 A JPS52103953 A JP S52103953A JP 2034976 A JP2034976 A JP 2034976A JP 2034976 A JP2034976 A JP 2034976A JP S52103953 A JPS52103953 A JP S52103953A
Authority
JP
Japan
Prior art keywords
liquid phase
layer liquid
phase epitaxial
epitaxial method
points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2034976A
Other languages
Japanese (ja)
Inventor
Masaaki Ayabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2034976A priority Critical patent/JPS52103953A/en
Publication of JPS52103953A publication Critical patent/JPS52103953A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To form better quality multi-layered epitaxial layer by providing the temperature of the basic board higher by 0.1°C or more against the epitaxial solutions to be contacted, at each points which just precede the points where contact take place.
COPYRIGHT: (C)1977,JPO&Japio
JP2034976A 1976-02-26 1976-02-26 Multi-layer liquid phase epitaxial method Pending JPS52103953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2034976A JPS52103953A (en) 1976-02-26 1976-02-26 Multi-layer liquid phase epitaxial method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2034976A JPS52103953A (en) 1976-02-26 1976-02-26 Multi-layer liquid phase epitaxial method

Publications (1)

Publication Number Publication Date
JPS52103953A true JPS52103953A (en) 1977-08-31

Family

ID=12024637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2034976A Pending JPS52103953A (en) 1976-02-26 1976-02-26 Multi-layer liquid phase epitaxial method

Country Status (1)

Country Link
JP (1) JPS52103953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60235792A (en) * 1984-05-04 1985-11-22 Hitachi Cable Ltd Device for liquid phase growth

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60235792A (en) * 1984-05-04 1985-11-22 Hitachi Cable Ltd Device for liquid phase growth

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