JPS5292475A - Growth method of semiconductor crystal - Google Patents
Growth method of semiconductor crystalInfo
- Publication number
- JPS5292475A JPS5292475A JP901076A JP901076A JPS5292475A JP S5292475 A JPS5292475 A JP S5292475A JP 901076 A JP901076 A JP 901076A JP 901076 A JP901076 A JP 901076A JP S5292475 A JPS5292475 A JP S5292475A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor crystal
- growth method
- growth
- semi
- uniform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To make crystal which is uniform and has few defects, and to remarkably improve the characteristic of the semi-conductor device, by controlling the oxygen concentration in the atmosphere gas used at the time of growth of the liquid phase epitaxy less than 0.1ppm.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP901076A JPS5292475A (en) | 1976-01-30 | 1976-01-30 | Growth method of semiconductor crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP901076A JPS5292475A (en) | 1976-01-30 | 1976-01-30 | Growth method of semiconductor crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5292475A true JPS5292475A (en) | 1977-08-03 |
Family
ID=11708669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP901076A Pending JPS5292475A (en) | 1976-01-30 | 1976-01-30 | Growth method of semiconductor crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5292475A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5992642A (en) * | 1996-05-17 | 1999-11-30 | Kabushiki Kaisha Syst | Filtering apparatus and filtering system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48102779A (en) * | 1972-04-10 | 1973-12-24 |
-
1976
- 1976-01-30 JP JP901076A patent/JPS5292475A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48102779A (en) * | 1972-04-10 | 1973-12-24 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5992642A (en) * | 1996-05-17 | 1999-11-30 | Kabushiki Kaisha Syst | Filtering apparatus and filtering system |
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