JPS5267260A - Manufacture of iii-v group compounds semiconductor epitaxial laminatio n crystal - Google Patents
Manufacture of iii-v group compounds semiconductor epitaxial laminatio n crystalInfo
- Publication number
- JPS5267260A JPS5267260A JP14359975A JP14359975A JPS5267260A JP S5267260 A JPS5267260 A JP S5267260A JP 14359975 A JP14359975 A JP 14359975A JP 14359975 A JP14359975 A JP 14359975A JP S5267260 A JPS5267260 A JP S5267260A
- Authority
- JP
- Japan
- Prior art keywords
- laminatio
- iii
- crystal
- manufacture
- semiconductor epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To easily secure sharp and complicated impurity density distribution by installing gas lead tube into quartz-made reaction tube, by creating a window at upper part of the gas lead tube near seed crystal substrate, and by controoling carrier gas amount by gas open/close adjusting valve.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14359975A JPS5826657B2 (en) | 1975-12-01 | 1975-12-01 | 3-5 Epitaxy and hand-wringing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14359975A JPS5826657B2 (en) | 1975-12-01 | 1975-12-01 | 3-5 Epitaxy and hand-wringing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5267260A true JPS5267260A (en) | 1977-06-03 |
JPS5826657B2 JPS5826657B2 (en) | 1983-06-04 |
Family
ID=15342459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14359975A Expired JPS5826657B2 (en) | 1975-12-01 | 1975-12-01 | 3-5 Epitaxy and hand-wringing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826657B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61198047A (en) * | 1985-02-07 | 1986-09-02 | Kiyataraa Kogyo Kk | Structure for insertion type oxigen detector |
JPH03111837U (en) * | 1990-02-28 | 1991-11-15 | ||
JPH03115337U (en) * | 1990-03-13 | 1991-11-28 |
-
1975
- 1975-12-01 JP JP14359975A patent/JPS5826657B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5826657B2 (en) | 1983-06-04 |
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