JPS5267259A - Preparation of iii-v group compounds semiconductor epitaxial laminatio n crystal - Google Patents
Preparation of iii-v group compounds semiconductor epitaxial laminatio n crystalInfo
- Publication number
- JPS5267259A JPS5267259A JP14359475A JP14359475A JPS5267259A JP S5267259 A JPS5267259 A JP S5267259A JP 14359475 A JP14359475 A JP 14359475A JP 14359475 A JP14359475 A JP 14359475A JP S5267259 A JPS5267259 A JP S5267259A
- Authority
- JP
- Japan
- Prior art keywords
- iii
- crystal
- semiconductor epitaxial
- laminatio
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: A window is made at midway of gas lead tube which pierces into quartz reaction tube, and gas flown out through the window is regulated by the valve under the window. In this way, a III-V growp compounds semiconductor epitaxial lamination crystal can be secured with sharp impurity density.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14359475A JPS5826656B2 (en) | 1975-12-01 | 1975-12-01 | 3-5 Epitaxy method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14359475A JPS5826656B2 (en) | 1975-12-01 | 1975-12-01 | 3-5 Epitaxy method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5267259A true JPS5267259A (en) | 1977-06-03 |
JPS5826656B2 JPS5826656B2 (en) | 1983-06-04 |
Family
ID=15342343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14359475A Expired JPS5826656B2 (en) | 1975-12-01 | 1975-12-01 | 3-5 Epitaxy method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826656B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408719B (en) * | 2007-11-08 | 2013-09-11 | Futaba Denshi Kogyo Kk | Flourescent display tube |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6035249U (en) * | 1983-08-18 | 1985-03-11 | セイコーインスツルメンツ株式会社 | Automatic sample exchange device in X-ray analyzer |
-
1975
- 1975-12-01 JP JP14359475A patent/JPS5826656B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408719B (en) * | 2007-11-08 | 2013-09-11 | Futaba Denshi Kogyo Kk | Flourescent display tube |
Also Published As
Publication number | Publication date |
---|---|
JPS5826656B2 (en) | 1983-06-04 |
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