JPS5250165A - Semiconductor diffusion method - Google Patents
Semiconductor diffusion methodInfo
- Publication number
- JPS5250165A JPS5250165A JP12617375A JP12617375A JPS5250165A JP S5250165 A JPS5250165 A JP S5250165A JP 12617375 A JP12617375 A JP 12617375A JP 12617375 A JP12617375 A JP 12617375A JP S5250165 A JPS5250165 A JP S5250165A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion method
- type
- semiconductor diffusion
- diffusion
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To form P type and n type diffusion layers by one diffusion, by simultaneous diffusion of one or alloyed state impurities of three kinds of Al, Ga, P as an impurity source into an n type Si wafer by a sealed tube method.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12617375A JPS5250165A (en) | 1975-10-20 | 1975-10-20 | Semiconductor diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12617375A JPS5250165A (en) | 1975-10-20 | 1975-10-20 | Semiconductor diffusion method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5250165A true JPS5250165A (en) | 1977-04-21 |
Family
ID=14928475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12617375A Pending JPS5250165A (en) | 1975-10-20 | 1975-10-20 | Semiconductor diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5250165A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635415A (en) * | 1979-08-23 | 1981-04-08 | Westinghouse Electric Corp | Method of doping wafer of semiconductor material |
-
1975
- 1975-10-20 JP JP12617375A patent/JPS5250165A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635415A (en) * | 1979-08-23 | 1981-04-08 | Westinghouse Electric Corp | Method of doping wafer of semiconductor material |
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