JPS5240967A - Method of diffusing impurities in compund semiconductor - Google Patents

Method of diffusing impurities in compund semiconductor

Info

Publication number
JPS5240967A
JPS5240967A JP11661175A JP11661175A JPS5240967A JP S5240967 A JPS5240967 A JP S5240967A JP 11661175 A JP11661175 A JP 11661175A JP 11661175 A JP11661175 A JP 11661175A JP S5240967 A JPS5240967 A JP S5240967A
Authority
JP
Japan
Prior art keywords
compund
semiconductor
diffusing impurities
compound semiconductor
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11661175A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11661175A priority Critical patent/JPS5240967A/en
Publication of JPS5240967A publication Critical patent/JPS5240967A/en
Pending legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To reduce occurence of a deep impurity level in a compound semiconductor wafer by using at least one of component elements for the compound semiconductor and silicon oxide containing diffusion impurity as a diffusion source.
COPYRIGHT: (C)1977,JPO&Japio
JP11661175A 1975-09-26 1975-09-26 Method of diffusing impurities in compund semiconductor Pending JPS5240967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11661175A JPS5240967A (en) 1975-09-26 1975-09-26 Method of diffusing impurities in compund semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11661175A JPS5240967A (en) 1975-09-26 1975-09-26 Method of diffusing impurities in compund semiconductor

Publications (1)

Publication Number Publication Date
JPS5240967A true JPS5240967A (en) 1977-03-30

Family

ID=14691447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11661175A Pending JPS5240967A (en) 1975-09-26 1975-09-26 Method of diffusing impurities in compund semiconductor

Country Status (1)

Country Link
JP (1) JPS5240967A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308900A (en) * 1988-06-06 1989-12-13 Canon Inc Production of diamond semiconductor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999474A (en) * 1973-01-30 1974-09-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999474A (en) * 1973-01-30 1974-09-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308900A (en) * 1988-06-06 1989-12-13 Canon Inc Production of diamond semiconductor

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