JPS5240967A - Method of diffusing impurities in compund semiconductor - Google Patents
Method of diffusing impurities in compund semiconductorInfo
- Publication number
- JPS5240967A JPS5240967A JP11661175A JP11661175A JPS5240967A JP S5240967 A JPS5240967 A JP S5240967A JP 11661175 A JP11661175 A JP 11661175A JP 11661175 A JP11661175 A JP 11661175A JP S5240967 A JPS5240967 A JP S5240967A
- Authority
- JP
- Japan
- Prior art keywords
- compund
- semiconductor
- diffusing impurities
- compound semiconductor
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To reduce occurence of a deep impurity level in a compound semiconductor wafer by using at least one of component elements for the compound semiconductor and silicon oxide containing diffusion impurity as a diffusion source.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11661175A JPS5240967A (en) | 1975-09-26 | 1975-09-26 | Method of diffusing impurities in compund semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11661175A JPS5240967A (en) | 1975-09-26 | 1975-09-26 | Method of diffusing impurities in compund semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5240967A true JPS5240967A (en) | 1977-03-30 |
Family
ID=14691447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11661175A Pending JPS5240967A (en) | 1975-09-26 | 1975-09-26 | Method of diffusing impurities in compund semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5240967A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01308900A (en) * | 1988-06-06 | 1989-12-13 | Canon Inc | Production of diamond semiconductor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4999474A (en) * | 1973-01-30 | 1974-09-19 |
-
1975
- 1975-09-26 JP JP11661175A patent/JPS5240967A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4999474A (en) * | 1973-01-30 | 1974-09-19 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01308900A (en) * | 1988-06-06 | 1989-12-13 | Canon Inc | Production of diamond semiconductor |
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