JPS5394871A - Vapor growth method for gaas substrate - Google Patents

Vapor growth method for gaas substrate

Info

Publication number
JPS5394871A
JPS5394871A JP1004177A JP1004177A JPS5394871A JP S5394871 A JPS5394871 A JP S5394871A JP 1004177 A JP1004177 A JP 1004177A JP 1004177 A JP1004177 A JP 1004177A JP S5394871 A JPS5394871 A JP S5394871A
Authority
JP
Japan
Prior art keywords
growth method
gaas substrate
vapor growth
dudden
distrubution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1004177A
Other languages
Japanese (ja)
Inventor
Takao Oda
Takashi Ishii
Shigeru Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1004177A priority Critical patent/JPS5394871A/en
Publication of JPS5394871A publication Critical patent/JPS5394871A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain an active layer of the crystal featuring a dudden impurity concentration distrubution near the interface, by applying an extremely simple vapor growing method.
COPYRIGHT: (C)1978,JPO&Japio
JP1004177A 1977-01-31 1977-01-31 Vapor growth method for gaas substrate Pending JPS5394871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1004177A JPS5394871A (en) 1977-01-31 1977-01-31 Vapor growth method for gaas substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1004177A JPS5394871A (en) 1977-01-31 1977-01-31 Vapor growth method for gaas substrate

Publications (1)

Publication Number Publication Date
JPS5394871A true JPS5394871A (en) 1978-08-19

Family

ID=11739296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1004177A Pending JPS5394871A (en) 1977-01-31 1977-01-31 Vapor growth method for gaas substrate

Country Status (1)

Country Link
JP (1) JPS5394871A (en)

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