JPS51145268A - Epitaxial semiconductor device - Google Patents
Epitaxial semiconductor deviceInfo
- Publication number
- JPS51145268A JPS51145268A JP7064875A JP7064875A JPS51145268A JP S51145268 A JPS51145268 A JP S51145268A JP 7064875 A JP7064875 A JP 7064875A JP 7064875 A JP7064875 A JP 7064875A JP S51145268 A JPS51145268 A JP S51145268A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- epitaxial semiconductor
- substraight
- lessened
- dopant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE: Using substraight lessened local partiality of impurity (dopant) for eptaxial growth results in high yield rate of device.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7064875A JPS51145268A (en) | 1975-06-10 | 1975-06-10 | Epitaxial semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7064875A JPS51145268A (en) | 1975-06-10 | 1975-06-10 | Epitaxial semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51145268A true JPS51145268A (en) | 1976-12-14 |
Family
ID=13437668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7064875A Pending JPS51145268A (en) | 1975-06-10 | 1975-06-10 | Epitaxial semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51145268A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61174197A (en) * | 1985-01-25 | 1986-08-05 | Toshiba Ceramics Co Ltd | Production of epitaxial wafer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4832467A (en) * | 1971-08-27 | 1973-04-28 |
-
1975
- 1975-06-10 JP JP7064875A patent/JPS51145268A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4832467A (en) * | 1971-08-27 | 1973-04-28 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61174197A (en) * | 1985-01-25 | 1986-08-05 | Toshiba Ceramics Co Ltd | Production of epitaxial wafer |
JPH0456800B2 (en) * | 1985-01-25 | 1992-09-09 | Toshiba Ceramics Co |
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