JPS5224475A - Planar thyristor process - Google Patents

Planar thyristor process

Info

Publication number
JPS5224475A
JPS5224475A JP10087075A JP10087075A JPS5224475A JP S5224475 A JPS5224475 A JP S5224475A JP 10087075 A JP10087075 A JP 10087075A JP 10087075 A JP10087075 A JP 10087075A JP S5224475 A JPS5224475 A JP S5224475A
Authority
JP
Japan
Prior art keywords
planar thyristor
planar
thyristor process
semiconductor wafer
time required
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10087075A
Other languages
Japanese (ja)
Inventor
Teruo Kusaka
Noriko Hatakeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10087075A priority Critical patent/JPS5224475A/en
Publication of JPS5224475A publication Critical patent/JPS5224475A/en
Pending legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)

Abstract

PURPOSE: Make formation of diffusion area to penetrate semiconductor wafer easy and reduce time required.
COPYRIGHT: (C)1977,JPO&Japio
JP10087075A 1975-08-20 1975-08-20 Planar thyristor process Pending JPS5224475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10087075A JPS5224475A (en) 1975-08-20 1975-08-20 Planar thyristor process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10087075A JPS5224475A (en) 1975-08-20 1975-08-20 Planar thyristor process

Publications (1)

Publication Number Publication Date
JPS5224475A true JPS5224475A (en) 1977-02-23

Family

ID=14285339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10087075A Pending JPS5224475A (en) 1975-08-20 1975-08-20 Planar thyristor process

Country Status (1)

Country Link
JP (1) JPS5224475A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106171A (en) * 1983-11-15 1985-06-11 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106171A (en) * 1983-11-15 1985-06-11 Toshiba Corp Manufacture of semiconductor device

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