JPS51140474A - Method of fabricating semiconductor crystal - Google Patents
Method of fabricating semiconductor crystalInfo
- Publication number
- JPS51140474A JPS51140474A JP6423075A JP6423075A JPS51140474A JP S51140474 A JPS51140474 A JP S51140474A JP 6423075 A JP6423075 A JP 6423075A JP 6423075 A JP6423075 A JP 6423075A JP S51140474 A JPS51140474 A JP S51140474A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor crystal
- fabricating semiconductor
- supphire
- misfit
- grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To reduce a dislocation generated in Si crystal due to misfit by irradiating ion to supphire substrate before Si si grown in an expitaxial growth.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6423075A JPS51140474A (en) | 1975-05-30 | 1975-05-30 | Method of fabricating semiconductor crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6423075A JPS51140474A (en) | 1975-05-30 | 1975-05-30 | Method of fabricating semiconductor crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140474A true JPS51140474A (en) | 1976-12-03 |
Family
ID=13252093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6423075A Pending JPS51140474A (en) | 1975-05-30 | 1975-05-30 | Method of fabricating semiconductor crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140474A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS544580A (en) * | 1977-06-13 | 1979-01-13 | Matsushita Electric Ind Co Ltd | Production of semiconductor devices |
-
1975
- 1975-05-30 JP JP6423075A patent/JPS51140474A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS544580A (en) * | 1977-06-13 | 1979-01-13 | Matsushita Electric Ind Co Ltd | Production of semiconductor devices |
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