JPS51129172A - Method of liquid phase epitaxial growth - Google Patents
Method of liquid phase epitaxial growthInfo
- Publication number
- JPS51129172A JPS51129172A JP5358775A JP5358775A JPS51129172A JP S51129172 A JPS51129172 A JP S51129172A JP 5358775 A JP5358775 A JP 5358775A JP 5358775 A JP5358775 A JP 5358775A JP S51129172 A JPS51129172 A JP S51129172A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- base
- intimacy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To obtain the uniform grow surface by making intimacy between base and fused liquid fine, and by improving the crystallizing of epitaxial layer with mono-crystal base covered with evaporate membrane of liquid phase epitaxial growth especially of Ga.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5358775A JPS51129172A (en) | 1975-05-02 | 1975-05-02 | Method of liquid phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5358775A JPS51129172A (en) | 1975-05-02 | 1975-05-02 | Method of liquid phase epitaxial growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51129172A true JPS51129172A (en) | 1976-11-10 |
Family
ID=12946978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5358775A Pending JPS51129172A (en) | 1975-05-02 | 1975-05-02 | Method of liquid phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51129172A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4833352A (en) * | 1971-09-02 | 1973-05-09 |
-
1975
- 1975-05-02 JP JP5358775A patent/JPS51129172A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4833352A (en) * | 1971-09-02 | 1973-05-09 |
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