JPS5337184A - Epitaxially growing method in liquid phase - Google Patents

Epitaxially growing method in liquid phase

Info

Publication number
JPS5337184A
JPS5337184A JP10576877A JP10576877A JPS5337184A JP S5337184 A JPS5337184 A JP S5337184A JP 10576877 A JP10576877 A JP 10576877A JP 10576877 A JP10576877 A JP 10576877A JP S5337184 A JPS5337184 A JP S5337184A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxially growing
growing method
making
molten liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10576877A
Other languages
Japanese (ja)
Inventor
Tsuguo Fukuda
Hitoshi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10576877A priority Critical patent/JPS5337184A/en
Publication of JPS5337184A publication Critical patent/JPS5337184A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To enable the thickness of the growth layer to be controlled and, at the same time, to promote the growth, by making capillaries between the substrate crystal and the frame opposing to it, allowing the molten liquid to rise owing to the capillarly action and making the molten liquid to grow epitaxially on the substrate crystal.
COPYRIGHT: (C)1978,JPO&Japio
JP10576877A 1977-09-05 1977-09-05 Epitaxially growing method in liquid phase Pending JPS5337184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10576877A JPS5337184A (en) 1977-09-05 1977-09-05 Epitaxially growing method in liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10576877A JPS5337184A (en) 1977-09-05 1977-09-05 Epitaxially growing method in liquid phase

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11002674A Division JPS535994B2 (en) 1974-09-26 1974-09-26

Publications (1)

Publication Number Publication Date
JPS5337184A true JPS5337184A (en) 1978-04-06

Family

ID=14416347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10576877A Pending JPS5337184A (en) 1977-09-05 1977-09-05 Epitaxially growing method in liquid phase

Country Status (1)

Country Link
JP (1) JPS5337184A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767018A (en) * 1980-10-09 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Formation of film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767018A (en) * 1980-10-09 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Formation of film

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