JPS5337184A - Epitaxially growing method in liquid phase - Google Patents
Epitaxially growing method in liquid phaseInfo
- Publication number
- JPS5337184A JPS5337184A JP10576877A JP10576877A JPS5337184A JP S5337184 A JPS5337184 A JP S5337184A JP 10576877 A JP10576877 A JP 10576877A JP 10576877 A JP10576877 A JP 10576877A JP S5337184 A JPS5337184 A JP S5337184A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxially growing
- growing method
- making
- molten liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To enable the thickness of the growth layer to be controlled and, at the same time, to promote the growth, by making capillaries between the substrate crystal and the frame opposing to it, allowing the molten liquid to rise owing to the capillarly action and making the molten liquid to grow epitaxially on the substrate crystal.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10576877A JPS5337184A (en) | 1977-09-05 | 1977-09-05 | Epitaxially growing method in liquid phase |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10576877A JPS5337184A (en) | 1977-09-05 | 1977-09-05 | Epitaxially growing method in liquid phase |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11002674A Division JPS535994B2 (en) | 1974-09-26 | 1974-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5337184A true JPS5337184A (en) | 1978-04-06 |
Family
ID=14416347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10576877A Pending JPS5337184A (en) | 1977-09-05 | 1977-09-05 | Epitaxially growing method in liquid phase |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5337184A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5767018A (en) * | 1980-10-09 | 1982-04-23 | Nippon Telegr & Teleph Corp <Ntt> | Formation of film |
-
1977
- 1977-09-05 JP JP10576877A patent/JPS5337184A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5767018A (en) * | 1980-10-09 | 1982-04-23 | Nippon Telegr & Teleph Corp <Ntt> | Formation of film |
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