JPS5364465A - Semiconductor crystal production apparatus - Google Patents
Semiconductor crystal production apparatusInfo
- Publication number
- JPS5364465A JPS5364465A JP14005076A JP14005076A JPS5364465A JP S5364465 A JPS5364465 A JP S5364465A JP 14005076 A JP14005076 A JP 14005076A JP 14005076 A JP14005076 A JP 14005076A JP S5364465 A JPS5364465 A JP S5364465A
- Authority
- JP
- Japan
- Prior art keywords
- production apparatus
- semiconductor crystal
- crystal production
- melt
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To reduce mixing of different melts at the time of growing epitaxial crystals and make possible arbitrary controlling of the supply rate of the melt for adjusting the concentration of the grown layer to a specified value.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14005076A JPS5364465A (en) | 1976-11-19 | 1976-11-19 | Semiconductor crystal production apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14005076A JPS5364465A (en) | 1976-11-19 | 1976-11-19 | Semiconductor crystal production apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5364465A true JPS5364465A (en) | 1978-06-08 |
Family
ID=15259809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14005076A Pending JPS5364465A (en) | 1976-11-19 | 1976-11-19 | Semiconductor crystal production apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364465A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6169119A (en) * | 1984-09-12 | 1986-04-09 | Nec Corp | Boat for liquid-phase epitaxial growth |
JPH03112931U (en) * | 1990-03-06 | 1991-11-19 |
-
1976
- 1976-11-19 JP JP14005076A patent/JPS5364465A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6169119A (en) * | 1984-09-12 | 1986-04-09 | Nec Corp | Boat for liquid-phase epitaxial growth |
JPH0534820B2 (en) * | 1984-09-12 | 1993-05-25 | Nippon Electric Co | |
JPH03112931U (en) * | 1990-03-06 | 1991-11-19 |
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