JPS53144474A - Apparatus for producing crystal semiconductor - Google Patents
Apparatus for producing crystal semiconductorInfo
- Publication number
- JPS53144474A JPS53144474A JP5896377A JP5896377A JPS53144474A JP S53144474 A JPS53144474 A JP S53144474A JP 5896377 A JP5896377 A JP 5896377A JP 5896377 A JP5896377 A JP 5896377A JP S53144474 A JPS53144474 A JP S53144474A
- Authority
- JP
- Japan
- Prior art keywords
- crystal semiconductor
- producing crystal
- fused liquid
- groqth
- pitchs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To provide a semiconductor crystal producing apparatus which enables plural frequencies of epitaxial growth with a single preparation of fused liquid and the free setting of growing velocity of each layer according to the groqth thickness through sliding within the growth vessel so as to pitchs for the fused liquid on the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5896377A JPS5827239B2 (en) | 1977-05-21 | 1977-05-21 | Semiconductor crystal manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5896377A JPS5827239B2 (en) | 1977-05-21 | 1977-05-21 | Semiconductor crystal manufacturing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53144474A true JPS53144474A (en) | 1978-12-15 |
JPS5827239B2 JPS5827239B2 (en) | 1983-06-08 |
Family
ID=13099485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5896377A Expired JPS5827239B2 (en) | 1977-05-21 | 1977-05-21 | Semiconductor crystal manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5827239B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6248354A (en) * | 1985-08-28 | 1987-03-03 | Fujiwara Jiyouki Sangyo Kk | Apparatus for automatic feeding of cake filter cloth in apparatus for peeling cake of unrefined sake |
-
1977
- 1977-05-21 JP JP5896377A patent/JPS5827239B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5827239B2 (en) | 1983-06-08 |
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