JPS53144474A - Apparatus for producing crystal semiconductor - Google Patents

Apparatus for producing crystal semiconductor

Info

Publication number
JPS53144474A
JPS53144474A JP5896377A JP5896377A JPS53144474A JP S53144474 A JPS53144474 A JP S53144474A JP 5896377 A JP5896377 A JP 5896377A JP 5896377 A JP5896377 A JP 5896377A JP S53144474 A JPS53144474 A JP S53144474A
Authority
JP
Japan
Prior art keywords
crystal semiconductor
producing crystal
fused liquid
groqth
pitchs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5896377A
Other languages
Japanese (ja)
Other versions
JPS5827239B2 (en
Inventor
Toshio Tanaka
Kenji Ikeda
Ryoichi Hirano
Jun Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5896377A priority Critical patent/JPS5827239B2/en
Publication of JPS53144474A publication Critical patent/JPS53144474A/en
Publication of JPS5827239B2 publication Critical patent/JPS5827239B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To provide a semiconductor crystal producing apparatus which enables plural frequencies of epitaxial growth with a single preparation of fused liquid and the free setting of growing velocity of each layer according to the groqth thickness through sliding within the growth vessel so as to pitchs for the fused liquid on the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP5896377A 1977-05-21 1977-05-21 Semiconductor crystal manufacturing equipment Expired JPS5827239B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5896377A JPS5827239B2 (en) 1977-05-21 1977-05-21 Semiconductor crystal manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5896377A JPS5827239B2 (en) 1977-05-21 1977-05-21 Semiconductor crystal manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS53144474A true JPS53144474A (en) 1978-12-15
JPS5827239B2 JPS5827239B2 (en) 1983-06-08

Family

ID=13099485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5896377A Expired JPS5827239B2 (en) 1977-05-21 1977-05-21 Semiconductor crystal manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5827239B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6248354A (en) * 1985-08-28 1987-03-03 Fujiwara Jiyouki Sangyo Kk Apparatus for automatic feeding of cake filter cloth in apparatus for peeling cake of unrefined sake

Also Published As

Publication number Publication date
JPS5827239B2 (en) 1983-06-08

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