JPS5228864A - Process for multilayer epitaxial growth - Google Patents

Process for multilayer epitaxial growth

Info

Publication number
JPS5228864A
JPS5228864A JP10450475A JP10450475A JPS5228864A JP S5228864 A JPS5228864 A JP S5228864A JP 10450475 A JP10450475 A JP 10450475A JP 10450475 A JP10450475 A JP 10450475A JP S5228864 A JPS5228864 A JP S5228864A
Authority
JP
Japan
Prior art keywords
epitaxial growth
multilayer epitaxial
solution
multilayer
gaalas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10450475A
Other languages
Japanese (ja)
Other versions
JPS5741094B2 (en
Inventor
Yorimitsu Nishitani
Kenzo Akita
Kazuo Nakajima
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10450475A priority Critical patent/JPS5228864A/en
Publication of JPS5228864A publication Critical patent/JPS5228864A/en
Publication of JPS5741094B2 publication Critical patent/JPS5741094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To contact clean saturated solution to substrate by motion of screen plate and to grow desired epitaxial layer of GaAlAs so that bottom surface of the solution should not be deteriorated by the carbon.
COPYRIGHT: (C)1977,JPO&Japio
JP10450475A 1975-08-30 1975-08-30 Process for multilayer epitaxial growth Granted JPS5228864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10450475A JPS5228864A (en) 1975-08-30 1975-08-30 Process for multilayer epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10450475A JPS5228864A (en) 1975-08-30 1975-08-30 Process for multilayer epitaxial growth

Publications (2)

Publication Number Publication Date
JPS5228864A true JPS5228864A (en) 1977-03-04
JPS5741094B2 JPS5741094B2 (en) 1982-09-01

Family

ID=14382324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10450475A Granted JPS5228864A (en) 1975-08-30 1975-08-30 Process for multilayer epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5228864A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047661A (en) * 1983-08-23 1985-03-15 Shigeo Matsunaga Flavored egg and its preparation
JPS6147255U (en) * 1984-08-31 1986-03-29 井関農機株式会社 Culm cutting device in threshing machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047661A (en) * 1983-08-23 1985-03-15 Shigeo Matsunaga Flavored egg and its preparation
JPS6126340B2 (en) * 1983-08-23 1986-06-20 Shigeo Matsunaga
JPS6147255U (en) * 1984-08-31 1986-03-29 井関農機株式会社 Culm cutting device in threshing machine

Also Published As

Publication number Publication date
JPS5741094B2 (en) 1982-09-01

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