JPS5228864A - Process for multilayer epitaxial growth - Google Patents
Process for multilayer epitaxial growthInfo
- Publication number
- JPS5228864A JPS5228864A JP10450475A JP10450475A JPS5228864A JP S5228864 A JPS5228864 A JP S5228864A JP 10450475 A JP10450475 A JP 10450475A JP 10450475 A JP10450475 A JP 10450475A JP S5228864 A JPS5228864 A JP S5228864A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- multilayer epitaxial
- solution
- multilayer
- gaalas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To contact clean saturated solution to substrate by motion of screen plate and to grow desired epitaxial layer of GaAlAs so that bottom surface of the solution should not be deteriorated by the carbon.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10450475A JPS5228864A (en) | 1975-08-30 | 1975-08-30 | Process for multilayer epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10450475A JPS5228864A (en) | 1975-08-30 | 1975-08-30 | Process for multilayer epitaxial growth |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5228864A true JPS5228864A (en) | 1977-03-04 |
JPS5741094B2 JPS5741094B2 (en) | 1982-09-01 |
Family
ID=14382324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10450475A Granted JPS5228864A (en) | 1975-08-30 | 1975-08-30 | Process for multilayer epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228864A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047661A (en) * | 1983-08-23 | 1985-03-15 | Shigeo Matsunaga | Flavored egg and its preparation |
JPS6147255U (en) * | 1984-08-31 | 1986-03-29 | 井関農機株式会社 | Culm cutting device in threshing machine |
-
1975
- 1975-08-30 JP JP10450475A patent/JPS5228864A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047661A (en) * | 1983-08-23 | 1985-03-15 | Shigeo Matsunaga | Flavored egg and its preparation |
JPS6126340B2 (en) * | 1983-08-23 | 1986-06-20 | Shigeo Matsunaga | |
JPS6147255U (en) * | 1984-08-31 | 1986-03-29 | 井関農機株式会社 | Culm cutting device in threshing machine |
Also Published As
Publication number | Publication date |
---|---|
JPS5741094B2 (en) | 1982-09-01 |
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