JPS52106690A - Preparation of gallium arsenide semiconductor unit - Google Patents

Preparation of gallium arsenide semiconductor unit

Info

Publication number
JPS52106690A
JPS52106690A JP2313176A JP2313176A JPS52106690A JP S52106690 A JPS52106690 A JP S52106690A JP 2313176 A JP2313176 A JP 2313176A JP 2313176 A JP2313176 A JP 2313176A JP S52106690 A JPS52106690 A JP S52106690A
Authority
JP
Japan
Prior art keywords
preparation
gallium arsenide
semiconductor unit
arsenide semiconductor
type gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2313176A
Other languages
Japanese (ja)
Inventor
Takatoshi Nakanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2313176A priority Critical patent/JPS52106690A/en
Publication of JPS52106690A publication Critical patent/JPS52106690A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prepare operational layer having less phase inversion density by growing in gas phase N+ type GaAs layer having the density of Si or Te of 1 × 1018/cm3 by adding Si or Te to N+ type GaAs base, and by growing in gas phase N type GaAs operational layer by adding S.
COPYRIGHT: (C)1977,JPO&Japio
JP2313176A 1976-03-05 1976-03-05 Preparation of gallium arsenide semiconductor unit Pending JPS52106690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2313176A JPS52106690A (en) 1976-03-05 1976-03-05 Preparation of gallium arsenide semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2313176A JPS52106690A (en) 1976-03-05 1976-03-05 Preparation of gallium arsenide semiconductor unit

Publications (1)

Publication Number Publication Date
JPS52106690A true JPS52106690A (en) 1977-09-07

Family

ID=12101963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2313176A Pending JPS52106690A (en) 1976-03-05 1976-03-05 Preparation of gallium arsenide semiconductor unit

Country Status (1)

Country Link
JP (1) JPS52106690A (en)

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