JPS52152164A - Epitaxial wafer of group iii-v compound - Google Patents
Epitaxial wafer of group iii-v compoundInfo
- Publication number
- JPS52152164A JPS52152164A JP7003276A JP7003276A JPS52152164A JP S52152164 A JPS52152164 A JP S52152164A JP 7003276 A JP7003276 A JP 7003276A JP 7003276 A JP7003276 A JP 7003276A JP S52152164 A JPS52152164 A JP S52152164A
- Authority
- JP
- Japan
- Prior art keywords
- group iii
- compound
- epitaxial wafer
- wafers
- high quality
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To produce high quality epi wafers by adding Si at a specified concentration and epitaxially growing a group III-V compound semiconductor on GaP wafers of less than 5 × 104 cm-2 in dislocation density by an LEC method.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7003276A JPS52152164A (en) | 1976-06-14 | 1976-06-14 | Epitaxial wafer of group iii-v compound |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7003276A JPS52152164A (en) | 1976-06-14 | 1976-06-14 | Epitaxial wafer of group iii-v compound |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52152164A true JPS52152164A (en) | 1977-12-17 |
JPS5633852B2 JPS5633852B2 (en) | 1981-08-06 |
Family
ID=13419836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7003276A Granted JPS52152164A (en) | 1976-06-14 | 1976-06-14 | Epitaxial wafer of group iii-v compound |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52152164A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56105625A (en) * | 1980-01-26 | 1981-08-22 | Sumitomo Electric Ind Ltd | Manufacture of compound semiconductor thin film single crystal of high ratio resistance and low transition density |
JPH05110137A (en) * | 1991-10-15 | 1993-04-30 | Shin Etsu Handotai Co Ltd | Gap red light-emitting element |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182618A (en) * | 1984-08-31 | 1986-04-26 | 株式会社山武 | Leaf switch |
JPS6182622A (en) * | 1984-08-31 | 1986-04-26 | 株式会社山武 | Leaf switch |
JPS6182621A (en) * | 1984-08-31 | 1986-04-26 | 株式会社山武 | Leaf switch |
JPS6182623A (en) * | 1984-08-31 | 1986-04-26 | 株式会社山武 | Leaf switch |
JPS6182617A (en) * | 1984-08-31 | 1986-04-26 | 株式会社山武 | Leaf switch |
JPS6182620A (en) * | 1984-08-31 | 1986-04-26 | 株式会社山武 | Leaf switch |
JPS61104935U (en) * | 1984-12-14 | 1986-07-03 | ||
JPS62175625U (en) * | 1986-04-26 | 1987-11-07 | ||
JPH0682733U (en) * | 1990-12-29 | 1994-11-25 | 山武ハネウエル株式会社 | Leaf switch |
JPH0682734U (en) * | 1990-12-29 | 1994-11-25 | 山武ハネウエル株式会社 | Leaf switch |
-
1976
- 1976-06-14 JP JP7003276A patent/JPS52152164A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56105625A (en) * | 1980-01-26 | 1981-08-22 | Sumitomo Electric Ind Ltd | Manufacture of compound semiconductor thin film single crystal of high ratio resistance and low transition density |
JPH05110137A (en) * | 1991-10-15 | 1993-04-30 | Shin Etsu Handotai Co Ltd | Gap red light-emitting element |
Also Published As
Publication number | Publication date |
---|---|
JPS5633852B2 (en) | 1981-08-06 |
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