JPS53143163A - Epitaxial growth method - Google Patents

Epitaxial growth method

Info

Publication number
JPS53143163A
JPS53143163A JP5772277A JP5772277A JPS53143163A JP S53143163 A JPS53143163 A JP S53143163A JP 5772277 A JP5772277 A JP 5772277A JP 5772277 A JP5772277 A JP 5772277A JP S53143163 A JPS53143163 A JP S53143163A
Authority
JP
Japan
Prior art keywords
epitaxial growth
growth method
epitaxial layer
growing
buried regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5772277A
Other languages
Japanese (ja)
Inventor
Mitsuo Nanba
Masao Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5772277A priority Critical patent/JPS53143163A/en
Publication of JPS53143163A publication Critical patent/JPS53143163A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To avert autodoping by allowing the insulating mask which has been used to form buried regions of a locally high impurity concentration within a semiconductor substrate to be left intact, growing a first epitaxial layer only over the buried regions, thereafter removing the insulating mask and freshly growing a second epitaxial layer over the entire surface.
COPYRIGHT: (C)1978,JPO&Japio
JP5772277A 1977-05-20 1977-05-20 Epitaxial growth method Pending JPS53143163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5772277A JPS53143163A (en) 1977-05-20 1977-05-20 Epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5772277A JPS53143163A (en) 1977-05-20 1977-05-20 Epitaxial growth method

Publications (1)

Publication Number Publication Date
JPS53143163A true JPS53143163A (en) 1978-12-13

Family

ID=13063826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5772277A Pending JPS53143163A (en) 1977-05-20 1977-05-20 Epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS53143163A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148620A (en) * 1986-12-12 1988-06-21 Nec Corp Manufacture of semiconductor device
JPH0846023A (en) * 1994-07-30 1996-02-16 Nec Corp Semiconductor device and its manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148620A (en) * 1986-12-12 1988-06-21 Nec Corp Manufacture of semiconductor device
JPH0846023A (en) * 1994-07-30 1996-02-16 Nec Corp Semiconductor device and its manufacture

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