JPS53143163A - Epitaxial growth method - Google Patents
Epitaxial growth methodInfo
- Publication number
- JPS53143163A JPS53143163A JP5772277A JP5772277A JPS53143163A JP S53143163 A JPS53143163 A JP S53143163A JP 5772277 A JP5772277 A JP 5772277A JP 5772277 A JP5772277 A JP 5772277A JP S53143163 A JPS53143163 A JP S53143163A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- growth method
- epitaxial layer
- growing
- buried regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To avert autodoping by allowing the insulating mask which has been used to form buried regions of a locally high impurity concentration within a semiconductor substrate to be left intact, growing a first epitaxial layer only over the buried regions, thereafter removing the insulating mask and freshly growing a second epitaxial layer over the entire surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5772277A JPS53143163A (en) | 1977-05-20 | 1977-05-20 | Epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5772277A JPS53143163A (en) | 1977-05-20 | 1977-05-20 | Epitaxial growth method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53143163A true JPS53143163A (en) | 1978-12-13 |
Family
ID=13063826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5772277A Pending JPS53143163A (en) | 1977-05-20 | 1977-05-20 | Epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53143163A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63148620A (en) * | 1986-12-12 | 1988-06-21 | Nec Corp | Manufacture of semiconductor device |
JPH0846023A (en) * | 1994-07-30 | 1996-02-16 | Nec Corp | Semiconductor device and its manufacture |
-
1977
- 1977-05-20 JP JP5772277A patent/JPS53143163A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63148620A (en) * | 1986-12-12 | 1988-06-21 | Nec Corp | Manufacture of semiconductor device |
JPH0846023A (en) * | 1994-07-30 | 1996-02-16 | Nec Corp | Semiconductor device and its manufacture |
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