JPS5154379A - - Google Patents

Info

Publication number
JPS5154379A
JPS5154379A JP50108602A JP10860275A JPS5154379A JP S5154379 A JPS5154379 A JP S5154379A JP 50108602 A JP50108602 A JP 50108602A JP 10860275 A JP10860275 A JP 10860275A JP S5154379 A JPS5154379 A JP S5154379A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50108602A
Other languages
Japanese (ja)
Other versions
JPS5726417B2 (enExample
Inventor
Oburein Dabitsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Publication of JPS5154379A publication Critical patent/JPS5154379A/ja
Publication of JPS5726417B2 publication Critical patent/JPS5726417B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/60—Lateral BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0116—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including integrated injection logic [I2L]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10W10/0121—
    • H10W10/0126—
    • H10W10/0127—
    • H10W10/13—
    • H10W15/00—
    • H10W15/01—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/087—I2L integrated injection logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/096—Lateral transistor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/106—Masks, special
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/117—Oxidation, selective

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP10860275A 1974-10-29 1975-09-09 Expired JPS5726417B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/518,445 US3962717A (en) 1974-10-29 1974-10-29 Oxide isolated integrated injection logic with selective guard ring

Publications (2)

Publication Number Publication Date
JPS5154379A true JPS5154379A (enExample) 1976-05-13
JPS5726417B2 JPS5726417B2 (enExample) 1982-06-04

Family

ID=24063967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10860275A Expired JPS5726417B2 (enExample) 1974-10-29 1975-09-09

Country Status (12)

Country Link
US (1) US3962717A (enExample)
JP (1) JPS5726417B2 (enExample)
BE (1) BE834962A (enExample)
BR (1) BR7506172A (enExample)
CA (1) CA1030274A (enExample)
CH (1) CH594288A5 (enExample)
DE (1) DE2545892A1 (enExample)
FR (1) FR2290037A1 (enExample)
GB (1) GB1522958A (enExample)
HK (1) HK9582A (enExample)
IT (1) IT1047337B (enExample)
NL (1) NL186608C (enExample)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234682A (en) * 1975-06-19 1977-03-16 Texas Instruments Inc Semiconductor device and method of producing same
JPS5252378A (en) * 1976-10-01 1977-04-27 Sony Corp Semiconductor device
JPS5261977A (en) * 1975-11-18 1977-05-21 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit device and its production
JPS52141587A (en) * 1976-05-20 1977-11-25 Matsushita Electric Ind Co Ltd Semiconductor device and its process
JPS5331984A (en) * 1976-09-03 1978-03-25 Fairchild Camera Instr Co Semiconductor structure and method of producing same
JPS5338276A (en) * 1976-09-20 1978-04-08 Toshiba Corp Semiconductor device
JPS5367383A (en) * 1976-08-08 1978-06-15 Fairchild Camera Instr Co Method of producing small ic implantation logic semiconductor
JPS5368990A (en) * 1976-12-01 1978-06-19 Fujitsu Ltd Production of semiconductor integrated circuit
JPS53121485A (en) * 1977-03-30 1978-10-23 Mitsubishi Electric Corp Semiconductor logic circuit device of electrostatic induction type
JPS53136979A (en) * 1977-03-18 1978-11-29 Texas Instruments Inc I2l gate and method of producing same
JPS556899A (en) * 1979-07-06 1980-01-18 Toshiba Corp Semiconductor device
JPS5610959A (en) * 1980-03-17 1981-02-03 Toshiba Corp Manufacture of semiconductor device
JPS5658870U (enExample) * 1980-10-02 1981-05-20
JPS56122159A (en) * 1980-02-04 1981-09-25 Fairchild Camera Instr Co I2l with base connector selffaligned and method of manufacturing same
JPS58206171A (ja) * 1982-05-26 1983-12-01 Nec Corp 半導体集積回路装置
JPS5957471A (ja) * 1982-09-28 1984-04-03 Toshiba Corp 半導体装置

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561783B2 (enExample) * 1974-12-27 1981-01-16
DE2510593C3 (de) * 1975-03-11 1982-03-18 Siemens AG, 1000 Berlin und 8000 München Integrierte Halbleiter-Schaltungsanordnung
DE2532608C2 (de) * 1975-07-22 1982-09-02 Deutsche Itt Industries Gmbh, 7800 Freiburg Planardiffusionsverfahren zum Herstellen einer monolithisch integrierten Schaltung
JPS5247383A (en) * 1975-10-13 1977-04-15 Toshiba Corp Semiconductor device
US4084174A (en) * 1976-02-12 1978-04-11 Fairchild Camera And Instrument Corporation Graduated multiple collector structure for inverted vertical bipolar transistors
US4143455A (en) * 1976-03-11 1979-03-13 Siemens Aktiengesellschaft Method of producing a semiconductor component
US4137109A (en) * 1976-04-12 1979-01-30 Texas Instruments Incorporated Selective diffusion and etching method for isolation of integrated logic circuit
US4066473A (en) * 1976-07-15 1978-01-03 Fairchild Camera And Instrument Corporation Method of fabricating high-gain transistors
US4115797A (en) * 1976-10-04 1978-09-19 Fairchild Camera And Instrument Corporation Integrated injection logic with heavily doped injector base self-aligned with injector emitter and collector
NL7703941A (nl) * 1977-04-12 1978-10-16 Philips Nv Werkwijze ter vervaardiging van een halfgelei- derinrichting en inrichting, vervaardigd door toepassing van de werkwijze.
US4168999A (en) * 1978-12-26 1979-09-25 Fairchild Camera And Instrument Corporation Method for forming oxide isolated integrated injection logic semiconductor structures having minimal encroachment utilizing special masking techniques
DE3020609C2 (de) * 1979-05-31 1985-11-07 Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa Verfahren zum Herstellen einer integrierten Schaltung mit wenigstens einem I↑2↑L-Element
US4338622A (en) * 1979-06-29 1982-07-06 International Business Machines Corporation Self-aligned semiconductor circuits and process therefor
US4512075A (en) * 1980-08-04 1985-04-23 Fairchild Camera & Instrument Corporation Method of making an integrated injection logic cell having self-aligned collector and base reduced resistance utilizing selective diffusion from polycrystalline regions
JPS5792858A (en) * 1980-12-01 1982-06-09 Hitachi Ltd Semiconductor integrated circuit device and manufacture thereof
US4373252A (en) * 1981-02-17 1983-02-15 Fairchild Camera & Instrument Method for manufacturing a semiconductor structure having reduced lateral spacing between buried regions
US4374011A (en) * 1981-05-08 1983-02-15 Fairchild Camera & Instrument Corp. Process for fabricating non-encroaching planar insulating regions in integrated circuit structures
US4435225A (en) 1981-05-11 1984-03-06 Fairchild Camera & Instrument Corporation Method of forming self-aligned lateral bipolar transistor
US5166094A (en) * 1984-09-14 1992-11-24 Fairchild Camera & Instrument Corp. Method of fabricating a base-coupled transistor logic
US4925806A (en) * 1988-03-17 1990-05-15 Northern Telecom Limited Method for making a doped well in a semiconductor substrate
US5289024A (en) * 1990-08-07 1994-02-22 National Semiconductor Corporation Bipolar transistor with diffusion compensation
US5047117A (en) * 1990-09-26 1991-09-10 Micron Technology, Inc. Method of forming a narrow self-aligned, annular opening in a masking layer
JPH0785476B2 (ja) * 1991-06-14 1995-09-13 インターナショナル・ビジネス・マシーンズ・コーポレイション エミッタ埋め込み型バイポーラ・トランジスタ構造
US5573837A (en) * 1992-04-22 1996-11-12 Micron Technology, Inc. Masking layer having narrow isolated spacings and the method for forming said masking layer and the method for forming narrow isolated trenches defined by said masking layer
JPH10303291A (ja) * 1997-04-25 1998-11-13 Nippon Steel Corp 半導体装置及びその製造方法
JP2001217317A (ja) 2000-02-07 2001-08-10 Sony Corp 半導体装置およびその製造方法
DE50305348D1 (de) 2003-04-24 2006-11-23 Goldschmidt Gmbh Verfahren zur Herstellung von ablösbaren schmutz- und wasserabweisenden flächigen Beschichtungen
TR201906951A2 (tr) * 2019-05-09 2019-05-21 Ankara Ueniversitesi Rektoerluegue Enzimatik İşlemlerle Nar Suyu Kusurlarının Giderilmesi İçin Yöntem

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164386A (enExample) * 1974-10-09 1976-06-03 Philips Nv

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386865A (en) * 1965-05-10 1968-06-04 Ibm Process of making planar semiconductor devices isolated by encapsulating oxide filled channels
GB1153497A (en) * 1966-07-25 1969-05-29 Associated Semiconductor Mft Improvements in and relating to Semiconductor Devices
DE2021824C3 (de) * 1970-05-05 1980-08-14 Ibm Deutschland Gmbh, 7000 Stuttgart Monolithische Halbleiterschaltung
US3648125A (en) * 1971-02-02 1972-03-07 Fairchild Camera Instr Co Method of fabricating integrated circuits with oxidized isolation and the resulting structure
NL173110C (nl) * 1971-03-17 1983-12-01 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een uit ten minste twee deellagen van verschillend materiaal samengestelde maskeringslaag wordt aangebracht.
JPS5528229B1 (enExample) * 1971-03-19 1980-07-26
NL170901C (nl) * 1971-04-03 1983-01-03 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting.
US3873989A (en) * 1973-05-07 1975-03-25 Fairchild Camera Instr Co Double-diffused, lateral transistor structure
US3904450A (en) * 1974-04-26 1975-09-09 Bell Telephone Labor Inc Method of fabricating injection logic integrated circuits using oxide isolation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164386A (enExample) * 1974-10-09 1976-06-03 Philips Nv

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234682A (en) * 1975-06-19 1977-03-16 Texas Instruments Inc Semiconductor device and method of producing same
JPS5261977A (en) * 1975-11-18 1977-05-21 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit device and its production
JPS52141587A (en) * 1976-05-20 1977-11-25 Matsushita Electric Ind Co Ltd Semiconductor device and its process
JPS5367383A (en) * 1976-08-08 1978-06-15 Fairchild Camera Instr Co Method of producing small ic implantation logic semiconductor
JPS5331984A (en) * 1976-09-03 1978-03-25 Fairchild Camera Instr Co Semiconductor structure and method of producing same
JPS5338276A (en) * 1976-09-20 1978-04-08 Toshiba Corp Semiconductor device
JPS5252378A (en) * 1976-10-01 1977-04-27 Sony Corp Semiconductor device
JPS5368990A (en) * 1976-12-01 1978-06-19 Fujitsu Ltd Production of semiconductor integrated circuit
JPS53136979A (en) * 1977-03-18 1978-11-29 Texas Instruments Inc I2l gate and method of producing same
JPS53121485A (en) * 1977-03-30 1978-10-23 Mitsubishi Electric Corp Semiconductor logic circuit device of electrostatic induction type
JPS556899A (en) * 1979-07-06 1980-01-18 Toshiba Corp Semiconductor device
JPS56122159A (en) * 1980-02-04 1981-09-25 Fairchild Camera Instr Co I2l with base connector selffaligned and method of manufacturing same
JPS5610959A (en) * 1980-03-17 1981-02-03 Toshiba Corp Manufacture of semiconductor device
JPS5658870U (enExample) * 1980-10-02 1981-05-20
JPS58206171A (ja) * 1982-05-26 1983-12-01 Nec Corp 半導体集積回路装置
JPS5957471A (ja) * 1982-09-28 1984-04-03 Toshiba Corp 半導体装置

Also Published As

Publication number Publication date
CH594288A5 (enExample) 1978-01-13
BR7506172A (pt) 1976-08-17
AU8607775A (en) 1977-05-05
BE834962A (fr) 1976-02-16
FR2290037B1 (enExample) 1980-05-16
DE2545892A1 (de) 1976-05-13
FR2290037A1 (fr) 1976-05-28
CA1030274A (en) 1978-04-25
NL186608B (nl) 1990-08-01
US3962717A (en) 1976-06-08
GB1522958A (en) 1978-08-31
NL186608C (nl) 1991-01-02
JPS5726417B2 (enExample) 1982-06-04
HK9582A (en) 1982-03-12
IT1047337B (it) 1980-09-10
NL7512333A (nl) 1976-05-04

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