JPS5367383A - Method of producing small ic implantation logic semiconductor - Google Patents
Method of producing small ic implantation logic semiconductorInfo
- Publication number
- JPS5367383A JPS5367383A JP9425177A JP9425177A JPS5367383A JP S5367383 A JPS5367383 A JP S5367383A JP 9425177 A JP9425177 A JP 9425177A JP 9425177 A JP9425177 A JP 9425177A JP S5367383 A JPS5367383 A JP S5367383A
- Authority
- JP
- Japan
- Prior art keywords
- producing small
- logic semiconductor
- implantation
- implantation logic
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
- Logic Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70772876A | 1976-08-08 | 1976-08-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5367383A true JPS5367383A (en) | 1978-06-15 |
JPS5525505B2 JPS5525505B2 (en) | 1980-07-07 |
Family
ID=24842920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9425177A Granted JPS5367383A (en) | 1976-08-08 | 1977-08-08 | Method of producing small ic implantation logic semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5367383A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6241881Y2 (en) * | 1981-02-27 | 1987-10-27 | ||
JPS638512Y2 (en) * | 1981-06-23 | 1988-03-14 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5017584A (en) * | 1973-05-07 | 1975-02-24 | ||
JPS5140773A (en) * | 1974-07-25 | 1976-04-05 | Siemens Ag | Handotaidebaisuno seizohoho |
JPS5154379A (en) * | 1974-10-29 | 1976-05-13 | Fairchild Camera Instr Co |
-
1977
- 1977-08-08 JP JP9425177A patent/JPS5367383A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5017584A (en) * | 1973-05-07 | 1975-02-24 | ||
JPS5140773A (en) * | 1974-07-25 | 1976-04-05 | Siemens Ag | Handotaidebaisuno seizohoho |
JPS5154379A (en) * | 1974-10-29 | 1976-05-13 | Fairchild Camera Instr Co |
Also Published As
Publication number | Publication date |
---|---|
JPS5525505B2 (en) | 1980-07-07 |
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