JPH11274462A - 固体撮像装置 - Google Patents
固体撮像装置Info
- Publication number
- JPH11274462A JPH11274462A JP10074392A JP7439298A JPH11274462A JP H11274462 A JPH11274462 A JP H11274462A JP 10074392 A JP10074392 A JP 10074392A JP 7439298 A JP7439298 A JP 7439298A JP H11274462 A JPH11274462 A JP H11274462A
- Authority
- JP
- Japan
- Prior art keywords
- imaging device
- solid
- state imaging
- photoelectric conversion
- mos transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
- H10F39/8033—Photosensitive area
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10074392A JPH11274462A (ja) | 1998-03-23 | 1998-03-23 | 固体撮像装置 |
| GB9906454A GB2335793B (en) | 1998-03-23 | 1999-03-19 | Solid state imaging device |
| US09/273,271 US6326655B1 (en) | 1998-03-23 | 1999-03-22 | Solid state imaging device having a gate electrode formed over a potential dip |
| KR1019990009916A KR100605436B1 (ko) | 1998-03-23 | 1999-03-23 | 고체 촬상 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10074392A JPH11274462A (ja) | 1998-03-23 | 1998-03-23 | 固体撮像装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011083064A Division JP2011142344A (ja) | 2011-04-04 | 2011-04-04 | 固体撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11274462A true JPH11274462A (ja) | 1999-10-08 |
| JPH11274462A5 JPH11274462A5 (enExample) | 2005-08-04 |
Family
ID=13545876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10074392A Pending JPH11274462A (ja) | 1998-03-23 | 1998-03-23 | 固体撮像装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6326655B1 (enExample) |
| JP (1) | JPH11274462A (enExample) |
| KR (1) | KR100605436B1 (enExample) |
| GB (1) | GB2335793B (enExample) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004510355A (ja) * | 2000-09-25 | 2004-04-02 | フォベオン・インコーポレーテッド | 垂直型カラーフィルタ検出器群及びアレイ |
| JP2004336006A (ja) * | 2003-04-30 | 2004-11-25 | Hynix Semiconductor Inc | 複数のフローティング拡散領域を備えるcmosイメージセンサの単位画素 |
| JP2005101442A (ja) * | 2003-09-26 | 2005-04-14 | Fujitsu Ltd | 固体撮像装置とその製造方法 |
| JP2006121093A (ja) * | 2004-10-20 | 2006-05-11 | Samsung Electronics Co Ltd | 非平面トランジスタを有する固体イメージセンサ素子及びその製造方法 |
| JP2006521697A (ja) * | 2003-03-12 | 2006-09-21 | マイクロン・テクノロジー・インコーポレイテッド | トレンチ分離のための傾斜注入 |
| JP2006253309A (ja) * | 2005-03-09 | 2006-09-21 | Toshiba Corp | 固体撮像装置 |
| JP2010251800A (ja) * | 2010-07-26 | 2010-11-04 | Fujitsu Semiconductor Ltd | 固体撮像装置の製造方法 |
| WO2011004708A1 (ja) * | 2009-07-10 | 2011-01-13 | 株式会社島津製作所 | 固体撮像素子 |
| JP2011142344A (ja) * | 2011-04-04 | 2011-07-21 | Sony Corp | 固体撮像装置 |
| JP2014135515A (ja) * | 2014-04-08 | 2014-07-24 | Sony Corp | 固体撮像装置 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4604296B2 (ja) * | 1999-02-09 | 2011-01-05 | ソニー株式会社 | 固体撮像装置及びその製造方法 |
| JP3688980B2 (ja) * | 2000-06-28 | 2005-08-31 | 株式会社東芝 | Mos型固体撮像装置及びその製造方法 |
| JP2004303982A (ja) * | 2003-03-31 | 2004-10-28 | Matsushita Electric Ind Co Ltd | 固体撮像素子 |
| US7391066B2 (en) * | 2003-04-25 | 2008-06-24 | Micron Technology, Inc. | Imager floating diffusion region and process for forming same |
| JP4703163B2 (ja) | 2004-10-19 | 2011-06-15 | 株式会社東芝 | 固体撮像装置 |
| US20150021668A1 (en) * | 2013-07-19 | 2015-01-22 | Stmicroelectronics Sa | Photosensitive cell of an image sensor |
| JP2017054947A (ja) * | 2015-09-10 | 2017-03-16 | セイコーエプソン株式会社 | 固体撮像素子及びその製造方法、並びに、電子機器 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4148048A (en) * | 1977-01-24 | 1979-04-03 | Hitachi, Ltd. | Solid-state imaging device |
| JPS5815280A (ja) * | 1981-07-21 | 1983-01-28 | Nec Corp | 固体撮像素子 |
| JPS59198756A (ja) * | 1983-04-27 | 1984-11-10 | Hitachi Ltd | 固体撮像素子およびその製造方法 |
| JPH0230183A (ja) * | 1988-07-19 | 1990-01-31 | Nec Corp | 固体撮像素子 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144447A (en) * | 1988-03-31 | 1992-09-01 | Hitachi, Ltd. | Solid-state image array with simultaneously activated line drivers |
| JP3070146B2 (ja) * | 1991-06-19 | 2000-07-24 | ソニー株式会社 | 固体撮像装置 |
| DE69228838T2 (de) * | 1991-07-12 | 1999-10-21 | Sony Corp., Tokio/Tokyo | Verfahren zur Steuerung einer Ladungstransferschaltung |
| JP2832136B2 (ja) * | 1992-12-28 | 1998-12-02 | シャープ株式会社 | 固体撮像装置及びその製造方法 |
| KR950002084A (ko) * | 1993-06-22 | 1995-01-04 | 오가 노리오 | 전하전송장치 |
-
1998
- 1998-03-23 JP JP10074392A patent/JPH11274462A/ja active Pending
-
1999
- 1999-03-19 GB GB9906454A patent/GB2335793B/en not_active Expired - Lifetime
- 1999-03-22 US US09/273,271 patent/US6326655B1/en not_active Expired - Lifetime
- 1999-03-23 KR KR1019990009916A patent/KR100605436B1/ko not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4148048A (en) * | 1977-01-24 | 1979-04-03 | Hitachi, Ltd. | Solid-state imaging device |
| JPS5815280A (ja) * | 1981-07-21 | 1983-01-28 | Nec Corp | 固体撮像素子 |
| JPS59198756A (ja) * | 1983-04-27 | 1984-11-10 | Hitachi Ltd | 固体撮像素子およびその製造方法 |
| JPH0230183A (ja) * | 1988-07-19 | 1990-01-31 | Nec Corp | 固体撮像素子 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004510355A (ja) * | 2000-09-25 | 2004-04-02 | フォベオン・インコーポレーテッド | 垂直型カラーフィルタ検出器群及びアレイ |
| JP2006521697A (ja) * | 2003-03-12 | 2006-09-21 | マイクロン・テクノロジー・インコーポレイテッド | トレンチ分離のための傾斜注入 |
| US7919797B2 (en) | 2003-03-12 | 2011-04-05 | Aptina Imaging Corporation | Angled implant for trench isolation |
| JP2004336006A (ja) * | 2003-04-30 | 2004-11-25 | Hynix Semiconductor Inc | 複数のフローティング拡散領域を備えるcmosイメージセンサの単位画素 |
| JP2005101442A (ja) * | 2003-09-26 | 2005-04-14 | Fujitsu Ltd | 固体撮像装置とその製造方法 |
| JP2006121093A (ja) * | 2004-10-20 | 2006-05-11 | Samsung Electronics Co Ltd | 非平面トランジスタを有する固体イメージセンサ素子及びその製造方法 |
| JP2006253309A (ja) * | 2005-03-09 | 2006-09-21 | Toshiba Corp | 固体撮像装置 |
| WO2011004708A1 (ja) * | 2009-07-10 | 2011-01-13 | 株式会社島津製作所 | 固体撮像素子 |
| JP2010251800A (ja) * | 2010-07-26 | 2010-11-04 | Fujitsu Semiconductor Ltd | 固体撮像装置の製造方法 |
| JP2011142344A (ja) * | 2011-04-04 | 2011-07-21 | Sony Corp | 固体撮像装置 |
| JP2014135515A (ja) * | 2014-04-08 | 2014-07-24 | Sony Corp | 固体撮像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9906454D0 (en) | 1999-05-12 |
| KR100605436B1 (ko) | 2006-07-28 |
| KR19990078166A (ko) | 1999-10-25 |
| GB2335793A (en) | 1999-09-29 |
| GB2335793B (en) | 2003-03-05 |
| US6326655B1 (en) | 2001-12-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050113 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050113 |
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| A977 | Report on retrieval |
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| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070501 |
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| A02 | Decision of refusal |
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| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090105 |
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| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20090109 |
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| A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20090130 |