JPH1116871A5 - - Google Patents

Info

Publication number
JPH1116871A5
JPH1116871A5 JP1997164623A JP16462397A JPH1116871A5 JP H1116871 A5 JPH1116871 A5 JP H1116871A5 JP 1997164623 A JP1997164623 A JP 1997164623A JP 16462397 A JP16462397 A JP 16462397A JP H1116871 A5 JPH1116871 A5 JP H1116871A5
Authority
JP
Japan
Prior art keywords
liquid
substrate
section
processing
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997164623A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1116871A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9164623A priority Critical patent/JPH1116871A/ja
Priority claimed from JP9164623A external-priority patent/JPH1116871A/ja
Priority to KR1019980012268A priority patent/KR100269416B1/ko
Publication of JPH1116871A publication Critical patent/JPH1116871A/ja
Publication of JPH1116871A5 publication Critical patent/JPH1116871A5/ja
Pending legal-status Critical Current

Links

JP9164623A 1997-06-20 1997-06-20 基板処理装置 Pending JPH1116871A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9164623A JPH1116871A (ja) 1997-06-20 1997-06-20 基板処理装置
KR1019980012268A KR100269416B1 (ko) 1997-06-20 1998-04-07 기판 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9164623A JPH1116871A (ja) 1997-06-20 1997-06-20 基板処理装置

Publications (2)

Publication Number Publication Date
JPH1116871A JPH1116871A (ja) 1999-01-22
JPH1116871A5 true JPH1116871A5 (enExample) 2005-03-03

Family

ID=15796723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9164623A Pending JPH1116871A (ja) 1997-06-20 1997-06-20 基板処理装置

Country Status (2)

Country Link
JP (1) JPH1116871A (enExample)
KR (1) KR100269416B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001284310A (ja) * 2000-03-31 2001-10-12 Shibaura Mechatronics Corp 基板の処理装置及び処理方法
KR100432053B1 (ko) * 2001-07-05 2004-05-17 (주)케이.씨.텍 건조장치
JP4365192B2 (ja) * 2003-11-25 2009-11-18 住友精密工業株式会社 搬送式基板処理装置
KR100725038B1 (ko) * 2005-06-22 2007-06-07 세메스 주식회사 기판 처리 장치

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