JPH1116871A - 基板処理装置 - Google Patents

基板処理装置

Info

Publication number
JPH1116871A
JPH1116871A JP9164623A JP16462397A JPH1116871A JP H1116871 A JPH1116871 A JP H1116871A JP 9164623 A JP9164623 A JP 9164623A JP 16462397 A JP16462397 A JP 16462397A JP H1116871 A JPH1116871 A JP H1116871A
Authority
JP
Japan
Prior art keywords
liquid
substrate
processing
unit
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9164623A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1116871A5 (enExample
Inventor
Mitsuaki Yoshitani
光明 芳谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP9164623A priority Critical patent/JPH1116871A/ja
Priority to KR1019980012268A priority patent/KR100269416B1/ko
Publication of JPH1116871A publication Critical patent/JPH1116871A/ja
Publication of JPH1116871A5 publication Critical patent/JPH1116871A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP9164623A 1997-06-20 1997-06-20 基板処理装置 Pending JPH1116871A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9164623A JPH1116871A (ja) 1997-06-20 1997-06-20 基板処理装置
KR1019980012268A KR100269416B1 (ko) 1997-06-20 1998-04-07 기판 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9164623A JPH1116871A (ja) 1997-06-20 1997-06-20 基板処理装置

Publications (2)

Publication Number Publication Date
JPH1116871A true JPH1116871A (ja) 1999-01-22
JPH1116871A5 JPH1116871A5 (enExample) 2005-03-03

Family

ID=15796723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9164623A Pending JPH1116871A (ja) 1997-06-20 1997-06-20 基板処理装置

Country Status (2)

Country Link
JP (1) JPH1116871A (enExample)
KR (1) KR100269416B1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001284310A (ja) * 2000-03-31 2001-10-12 Shibaura Mechatronics Corp 基板の処理装置及び処理方法
WO2005053006A1 (ja) * 2003-11-25 2005-06-09 Sumitomo Precision Products Co., Ltd. 搬送式基板処理装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100432053B1 (ko) * 2001-07-05 2004-05-17 (주)케이.씨.텍 건조장치
KR100725038B1 (ko) * 2005-06-22 2007-06-07 세메스 주식회사 기판 처리 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001284310A (ja) * 2000-03-31 2001-10-12 Shibaura Mechatronics Corp 基板の処理装置及び処理方法
WO2005053006A1 (ja) * 2003-11-25 2005-06-09 Sumitomo Precision Products Co., Ltd. 搬送式基板処理装置

Also Published As

Publication number Publication date
KR19990006382A (ko) 1999-01-25
KR100269416B1 (ko) 2000-12-01

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