JPH11135400A5 - - Google Patents

Info

Publication number
JPH11135400A5
JPH11135400A5 JP1997299775A JP29977597A JPH11135400A5 JP H11135400 A5 JPH11135400 A5 JP H11135400A5 JP 1997299775 A JP1997299775 A JP 1997299775A JP 29977597 A JP29977597 A JP 29977597A JP H11135400 A5 JPH11135400 A5 JP H11135400A5
Authority
JP
Japan
Prior art keywords
stage
exposure apparatus
exposure
optical system
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997299775A
Other languages
English (en)
Japanese (ja)
Other versions
JP4210871B2 (ja
JPH11135400A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP29977597A priority Critical patent/JP4210871B2/ja
Priority claimed from JP29977597A external-priority patent/JP4210871B2/ja
Priority to AU96481/98A priority patent/AU9648198A/en
Priority to PCT/JP1998/004843 priority patent/WO1999023692A1/ja
Publication of JPH11135400A publication Critical patent/JPH11135400A/ja
Publication of JPH11135400A5 publication Critical patent/JPH11135400A5/ja
Application granted granted Critical
Publication of JP4210871B2 publication Critical patent/JP4210871B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP29977597A 1997-10-31 1997-10-31 露光装置 Expired - Fee Related JP4210871B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP29977597A JP4210871B2 (ja) 1997-10-31 1997-10-31 露光装置
AU96481/98A AU9648198A (en) 1997-10-31 1998-10-26 Aligner and exposure method
PCT/JP1998/004843 WO1999023692A1 (en) 1997-10-31 1998-10-26 Aligner and exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29977597A JP4210871B2 (ja) 1997-10-31 1997-10-31 露光装置

Publications (3)

Publication Number Publication Date
JPH11135400A JPH11135400A (ja) 1999-05-21
JPH11135400A5 true JPH11135400A5 (enExample) 2005-07-07
JP4210871B2 JP4210871B2 (ja) 2009-01-21

Family

ID=17876815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29977597A Expired - Fee Related JP4210871B2 (ja) 1997-10-31 1997-10-31 露光装置

Country Status (3)

Country Link
JP (1) JP4210871B2 (enExample)
AU (1) AU9648198A (enExample)
WO (1) WO1999023692A1 (enExample)

Families Citing this family (156)

* Cited by examiner, † Cited by third party
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