JPH10303114A - Immersion aligner - Google Patents

Immersion aligner

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Publication number
JPH10303114A
JPH10303114A JP12175797A JP12175797A JPH10303114A JP H10303114 A JPH10303114 A JP H10303114A JP 12175797 A JP12175797 A JP 12175797A JP 12175797 A JP12175797 A JP 12175797A JP H10303114 A JPH10303114 A JP H10303114A
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Prior art keywords
wafer
liquid
surface
exposure apparatus
immersion
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JP12175797A
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Japanese (ja)
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JP3747566B2 (en )
Inventor
Kyoichi Suwa
Kazuo Ushida
一雄 牛田
恭一 諏訪
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Nikon Corp
株式会社ニコン
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70216Systems for imaging mask onto workpiece
    • G03F7/70341Immersion
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/708Construction of apparatus, e.g. environment, hygiene aspects or materials
    • G03F7/70858Environment aspects, e.g. pressure of beam-path gas, temperature

Abstract

PROBLEM TO BE SOLVED: To provide an immersion aligner which does not cause the deterioration of its image forming performance. SOLUTION: An immersion aligner which is provided with a projection optical system PL which transfers a pattern Pa drawn on a reticle R to the surface of a wafer W and print-transfers the pattern Pa, and in which at least part of the working distance L between the lens surface Pe of the optical system PL closest to the wafer W and the wafer W, is filled up with a liquid LQ which transmits exposing light IL is constituted so that the working distance L may meet a relation, L<=λ/(0.3×|N|) (where, λ and N (1/ deg.C) respectively represent the wavelength of the light IL and the temperature coefficient of the refractive index of the liquid IQ). In addition, the liquid LQ is prepared by adding an additive which reduces the surface tension of pure water or increases the interface activity of the pure water to the pure water.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は、レチクル上に描画されたパターンを投影光学系によってウエハに焼付ける露光装置に関し、特に液浸型の露光装置に関する。 The present invention relates to relates to a baked exposure apparatus to the wafer by the drawing pattern on the reticle projection optical system, and more particularly to an immersion type exposure apparatus.

【0002】 [0002]

【従来の技術】光学系の最終レンズ面と像面との間の間隔をワーキングディスタンスというが、従来の露光装置の投影光学系のワーキングディスタンスは、空気で満たされていた。 It says working distance the distance between the last lens surface and the image plane of the Related Art Optical systems, but the working distance of the projection optical system of a conventional exposure apparatus, was filled with air. このワーキングディスタンスは、オートフォーカス光学系を介在させるなどの都合により、10m The working distance, on account of such an intervening autofocus optical system, 10m
m以上取るのが普通であった。 Take m or more were common. 他方、ウエハに転写するパターンについては、その微細化がますます望まれており、そのためには露光波長の短波長化を図るか、あるいは開口数の増大を図る必要がある。 On the other hand, the pattern to be transferred to the wafer, the which miniaturization is increasingly desirable, in order that it is necessary to achieve or improve the shorter exposure wavelength, or an increase in the numerical aperture. しかるに短波長の光を透過するガラス材料の種類には限度があるから、ワーキングディスタンスを液体で満たして開口数の増大を図ることにより、露光パターンの微細化を図る液浸型の露光装置が提案されている。 Since however the type of glass material that transmits light of a short wavelength is limited, by promoting an increase in the numerical aperture satisfy the working distance with a liquid immersion type exposure apparatus to miniaturize the exposure pattern proposed It is.

【0003】液浸型の露光装置では、ワーキングディスタンスに介在させた液体の温度分布によって、屈折率に分布が生じるおそれがある。 [0003] In the liquid immersion type exposure apparatus, the temperature distribution of the liquid which is interposed working distance, there is a possibility that distribution occurs in the refractive index. そこで液体の温度変化に起因する結像性能の劣化への対策として、次のような技術が提案されている。 So as a countermeasure to the deterioration of the imaging performance due to a temperature change of the liquid, the following technique has been proposed. すなわち、(あ)液体の温度安定機構によって温度の安定化を図るものとして、米国特許4,346,164号の図3に開示された技術が提案されており、加振撹拌機構によって温度の均一化を図るものとして、特開平6−124873号公報に開示された技術が提案されている。 That is, (a) as to stabilize the temperature by a temperature stabilization mechanism of the liquid, it has been proposed disclosed in US 3 of patent 4,346,164 technique, uniform temperature by vibration stirring mechanism as to achieve reduction, technique disclosed in Japanese Patent Laid-Open No. 6-124873 it has been proposed. また、(い)液体の温度モニター機構によって温度調節にフィードバックするものとして、同じく特開平6−124873号公報に温度、又は屈折率を計測することが提案されている。 Further, it has been proposed to measure the temperature control as being fed back to, also JP-A 6-124873 discloses a temperature or refractive index with temperature monitoring mechanisms (ii) liquid.

【0004】 [0004]

【発明が解決しようとする課題】しかし(あ)においては、温度をどの程度安定させれば実用上問題ないかと言った議論は成されておらず、実際には下記に示すように、現実的とは言いがたい精度での温度コントロールが必要になる。 In The object of the invention is to be Solved However, (a), discussions said that if no practical problem if caused to what extent stabilize the temperature is not made is, as actually shown in the following, realistic it is necessary to temperature control of a good hard precision and. また、(い)についても、結像性能に最も影響するのが液体の温度不均一であることを考慮すると、有効な対策とは言い難い。 As for the (ii), if the most effect on the imaging performance is considered to be the temperature non-uniformity of the liquid, it is hard to say that an effective measure. このように液浸型露光装置に関する従来公知の技術においては、ワーキングディスタンスのような投影光学系の光学パラメーターそのものについての制約に言及した例はなく、液浸型の特殊事情が考慮されているとは言えない状況であった。 In this manner known art relating to liquid immersion type exposure apparatus, examples mentioned constraints on the optical parameters itself of the projection optical system such as a working distance is not, when special circumstances of the immersion type is considered It was in a situation where it can not be said. したがって本発明は、ワーキングディスタンスを満たす液体の温度制御を容易にして、結像性能の劣化を招くことのない液浸型露光装置を提供することを課題とする。 The invention thus facilitates the temperature control of the liquid filling the working distance, and to provide that no liquid immersion type exposure apparatus deteriorating the imaging performance.

【0005】 [0005]

【課題を解決するための手段】本発明は上記課題を解決するためになされたものであり、すなわち、レチクル上に描画されたパターンをウエハ上に焼付転写する投影光学系を有し、該投影光学系のウエハに最も近接したレンズ面とウエハとの間のワーキングディスタンスのうちの少なくとも一部分を、露光光を透過する液体で満たした液浸型露光装置において、ワーキングディスタンスの長さをLとし、露光光の波長をλとし、液体の屈折率の温度係数をN(1/℃)としたとき、 L≦λ/(0.3×|N|) となるように形成したことを特徴とする液浸型露光装置であり、また、前記液体として、純水の表面張力を減少させ又は純水の界面活性度を増大させる添加剤を純水に添加したものを用いたことを特徴とする液浸型露光装置である。 The present invention SUMMARY OF] has been made to solve the above problems, i.e., has a projection optical system for baking transferring the drawn pattern on a reticle onto a wafer, the projection in the liquid immersion type exposure apparatus that at least a portion, filled with a liquid which transmits the exposure light of the working distance between the nearest lens surface and the wafer in the optical system of the wafer, the length of the working distance is L, the wavelength of the exposure light is lambda, when the temperature coefficient of the refractive index of the liquid was N (1 / ℃), L ≦ λ / characterized by being formed so as to be (0.3 × | | N) a liquid immersion type exposure apparatus, the liquid which is characterized in that used as said as a liquid was added an additive increasing the surface activity of the pure surface tension of water is reduced or pure water in the pure water it is an immersion type exposure apparatus.

【0006】以下に本発明の作用を説明する。 [0006] a description will be given of the operation of the present invention will be described below. 投影光学系の先端のガラス面から結像面までの距離、すなわちワーキングディスタンスをLとし、ワーキングディスタンスLを満たす媒質の温度分布の幅をΔTとし、この温度分布ΔTに起因する結像波面の収差をΔFとし、液体の屈折率の温度係数をNとすると、近似的に以下の式(1)が成立する。 Distance from the glass surface of the tip of the projection optical system to the imaging surface, i.e. the working distance is L, the width of the temperature distribution of the medium to meet the working distance L and [Delta] T, the aberration of the imaging wavefront due to the temperature distribution [Delta] T It was a [Delta] F, when the temperature coefficient of the refractive index of the liquid is N, approximately the following equation (1) is satisfied. ΔF=L×|N|×ΔT ‥‥(1) ΔF = L × | N | × ΔT ‥‥ (1)

【0007】媒質の温度分布ΔTについては、その均一化を図るためにいかにコントロールしようとも、ΔT= [0007] The temperature distribution [Delta] T of the medium, no matter how the control in order to achieve the uniform, [Delta] T =
0.01℃程度の温度分布が存在すると想定される。 It is assumed that there is a temperature distribution of about 0.01 ° C.. したがって、結像波面収差ΔFは、少なくとも、 ΔF=L×|N|×0.01 ‥‥(1a) だけは存在する。 Thus, imaging wavefront aberration [Delta] F is at least, ΔF = L × | N | only × 0.01 ‥‥ (1a) is present. ここでNは、屈折率の温度係数を1/ Where N is the temperature coefficient of the refractive index 1 /
℃単位で表した値である。 ℃ is a value expressed in units.

【0008】屈折率の温度係数Nの値は液体と気体で大きく異なり、例えば空気ではN=−9×10 -7 /℃であるのに対して、水の場合はN=−8×10 -5 /℃であり、100倍近い差がある。 [0008] The value of the temperature coefficient N of the refractive index is greatly different liquid and gas, for example, whereas in the air is N = -9 × 10 -7 / ℃ , when the water is N = -8 × 10 - a 5 / ° C., there are nearly 100 times difference. 他方、縮小投影露光装置の投影光学系のワーキングディスタンスLは、通常L>1 On the other hand, the working distance L of a projection optical system of the reduction projection exposure apparatus is generally L> 1
0mmであるが、L=10mmであるとしても、結像波面収差ΔFは以下のようになる。 It is a 0 mm, as is L = 10 mm, the imaging wavefront aberration ΔF is as follows. 空気:ΔF=10mm×|−9×10 -7 /℃|×0.01℃ =0.09nm 水 :ΔF=10mm×|−8×10 -5 /℃|×0.01℃ =8.0nm Air: ΔF = 10mm × | -9 × 10 -7 /℃|×0.01℃ = 0.09nm water: ΔF = 10mm × | -8 × 10 -5 /℃|×0.01℃ = 8.0nm

【0009】しかるに一般に結像波面収差ΔFは、露光波長λの1/30以下が望ましく、すなわち、 ΔF≦λ/30 ‥‥(2) が成立することが好ましい。 [0009] However in general imaging wavefront aberration [Delta] F is desirably 1/30 or less of the exposure wavelength lambda, i.e., it is preferable that ΔF ≦ λ / 30 ‥‥ (2) is satisfied. 例えば波長193nmのA For example, with a wavelength of 193nm A
rFエキシマレーザーを露光光として用いるときには、 The rF excimer laser when used as the exposure light,
ΔF<6.4nmが望ましい。 ΔF <6.4nm is desirable. ワーキングディスタンスを満たす媒質が水の場合には、従来技術のようにワーキングディスタンスLがL>10mmでは、媒質の温度分布による結像波面収差の発生量が大きすぎて、実用上問題を生ずることが分かる。 If the medium to meet the working distance is water, the working distance L is L> 10 mm as in the prior art, too size the amount of generated imaging wavefront aberration due to the temperature distribution of the medium, that produce practical problems It can be seen.

【0010】(1a)式と(2)式とから、 L≦λ/(0.3×|N|) ‥‥(3) を得る。 [0010] From (1a) formula and (2), L ≦ λ / obtain ‥‥ a (3) (0.3 × | | N). したがって(3)式を満たすことにより、実現可能な温度安定性(温度分布)のもとに、浸液中の温度分布によって生じる波面収差発生量が露光波長の1/3 Therefore, by satisfying the expression (3), under the achievable temperature stability (temperature distribution), the wavefront aberration generation amount caused by the temperature distribution in the immersion liquid in exposure wavelength 1/3
0以下に抑えられた投影光学系を搭載した液浸型露光装置が得られる。 0 immersion exposure apparatus suppresses was equipped with a projection optical system to obtain less. 以上のように本発明においては、温度分布を持った媒質中を露光光が通過することで発生する波面収差量が、温度分布量と媒質中の光路長の積に依存することに着目し、光路長に上限を設けることにより、温度分布に対する要求を緩和している。 In the present invention, as described above, attention is focused on the fact that the wavefront aberration amount generated by in a medium having a temperature distribution exposure light passes, depends on the product of the optical path length of the temperature distribution volume and medium, by providing an upper limit to the optical path length, and relaxing the requirements for temperature distribution. これにより実現可能なレベルでの浸液の温度コントロールのもとで、液浸型露光装置を実用に供することができる。 Thus it is possible to provide under the temperature control of the immersion liquid in a feasible level, the liquid immersion type exposure apparatus to practical use.

【0011】 [0011]

【発明の実施の形態】以下に本発明に好適ないくつかの実施例を説明する。 Some examples suitable to the present invention DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS be described.

【0012】 [0012]

【第1の実施例の説明】図1は、本発明の第1の実施例による投影露光装置の全体構成を示し、ここでは、物体側と像側の両側においてテレセントリックに構成された円形イメージフィールドを有する縮小投影レンズ系PL Figure 1 [Description of the first embodiment] shows the overall configuration of a projection exposure apparatus according to a first embodiment of the present invention, in which a circular image field which is telecentric on both sides of the object side and the image side reduction projection lens system PL having
を介して、レチクルR上の回路パターンを半導体ウエハW上に投影しつつ、レチクルRとウエハWとを投影レンズ系PLに対して相対走査するレンズ・スキャン方式の投影露光装置を示す。 Through, while projecting a circuit pattern on the reticle R onto the wafer W, showing a projection exposure apparatus of a lens scan type which relatively scanning the reticle R and the wafer W relative to the projection lens system PL. 図1において照明系10は、波長193nmのパルス光を放射するArFエキシマレーザ光源(不図示)、その光源からのパルス光の断面形状を整形するビームエクスパンダ(不図示)、その整形されたパルス光を入射して2次光源像(複数の点光源の集まり)を生成するフライ・アイレンズ等のオプチカルインテグレータ(不図示)、その2次光源像からのパルス光を均一な照度分布のパルス照明光にする集光レンズ系(不図示)、そのパルス照明光の形状を走査露光時の走査方向(Y方向)と直交した方向(X方向)に長い矩形状に整形するレチクルブラインド(照明視野絞り、不図示)、及びそのレチクルブラインドの矩形状の開口からのパルス光ILを図1中のコンデンサーレンズ系12、 The illumination system 10 in FIG. 1, ArF excimer laser light source (not shown), a beam expander (not shown), the shaped pulse shaping the pulse light sectional shape from the light source that emits pulse light having a wavelength of 193nm an optical integrator of the fly-eye lens or the like for generating a secondary light source image by incident light (set of a plurality of point light sources) (not shown), a pulse lighting of uniform illuminance distribution pulse light from the secondary light source images a condenser lens system to light (not shown), throttle reticle blind (an illumination field for shaping the shape of the pulse illumination light into a long rectangular scanning direction during scanning exposure (Y direction) orthogonal directions (X-direction) , not shown), and a condenser lens system 12 of figure 1 pulsed light IL from rectangular opening of the reticle blind,
ミラー14と協働してレチクルR上にスリット状又は矩形状の照明領域AIとして結像するためのリレー光学系(不図示)とを含んでいる。 It includes mirror 14 in cooperation with a slit-shaped or a relay optical system for imaging a rectangular illumination area AI on the reticle R with a (not shown).

【0013】レチクルRは、走査露光時には大きなストロークで1次元方向に等速移動可能なレチクルステージ16上に真空吸着(場合によっては静電吸着、機械締結)される。 [0013] The reticle R is vacuum suction (In some cases electrostatic attraction, mechanical fastening) on ​​a constant velocity movable reticle stage 16 in a one-dimensional direction with a large stroke at the time of scanning exposure is. レチクルステージ16は、図1においては装置本体のコラム構造体19上を図中の左右(Y方向) The reticle stage 16, the left and right in the figure on the column structure 19 of the apparatus main body in FIG. 1 (Y-direction)
にスキャン移動するようにガイドされ、図の紙面と垂直な方向(X方向)にも移動するようにガイドされる。 To be guided so as to scan movement, it is guided to also move to the direction perpendicular to the paper in FIG. (X direction). そのレチクルステージ16のXY平面内での座標位置や微小回転量は、レチクルステージ16の一部に取り付けられた移動鏡(平面鏡やコーナーミラー)MRrにレーザビームを投射して、その反射ビームを受光するレーザ干渉計システム17によって逐次計測される。 Coordinate position and a minute amount of rotation of the XY plane of the reticle stage 16, by projecting a laser beam to the moving mirror (plane mirror or corner mirror) MRr attached to a portion of the reticle stage 16, receiving the reflected beam It is successively measured by a laser interferometer system 17. そしてレチクルステージ制御器20は、干渉計システム17によって計測されるXY座標位置に基づいてレチクルステージ16を駆動するためのリニアモータやボイスコイル等のモータ18を制御し、レチクルステージ16のスキャン方向の移動と非スキャン方向の移動とを制御する。 The reticle stage controller 20, based on the XY coordinate positions measured by the interferometer system 17 controls the linear motor or a voice coil of the motor 18 for driving the reticle stage 16, the scanning direction of the reticle stage 16 It controls the movement of the moving and non-scanning direction.

【0014】さて、コンデンサーレンズ系12とミラー14から射出された矩形状のパルス照明光ILがレチクルR上の回路パターン領域の一部を照射すると、その照明領域AI内に存在するパターンからの結像光束が1/ [0014] Now, when the condenser lens system 12 and the rectangular pulse illumination light IL emitted from the mirror 14 illuminates a portion of the circuit pattern area on the reticle R, forming from the pattern present in the illumination area AI image light flux is 1 /
4倍の縮小投影レンズ系PLを通して、ウエハWの表面に塗布された感応性のレジスト層に結像投影される。 Through four times the reduction projection lens system PL, is imaged projected to sensitive resist layer applied to the surface of the wafer W. その投影レンズ系PLの光軸AXは、円形イメージフィールドの中心点を通り、照明系10とコンデンサーレンズ系12の各光軸とも同軸になるように配置されている。 Its optical axis AX of the projection lens system PL, passes through the center point of the circular image field, are arranged so as to be coaxial with the optical axis of the illumination system 10 and the condenser lens system 12.
また投影レンズ系PLは、波長193nmの紫外線に対して高い透過率を有する石英と螢石の2種類の硝材で作られた複数枚のレンズ素子で構成され、螢石は主に正のパワーを持つレンズ素子に使われる。 The projection lens system PL is constituted by a plurality of lens elements made of two kinds of glass materials of quartz and fluorite having a high transmittance for ultraviolet rays having a wavelength of 193 nm, fluorite mainly positive power It is used in the lens element having. さらに投影レンズ系PLの複数枚のレンズ素子を固定する鏡筒の内部は、 Further the barrel for securing a plurality of lens elements of the projection lens system PL,
波長193nmのパルス照明光の酸素による吸収を避けるために窒素ガスに置換されている。 It has been replaced with nitrogen gas in order to avoid absorption by oxygen pulse illumination light having a wavelength 193 nm. このような窒素ガスによる置換は照明系10の内部からコンデンサーレンズ系12(又はミラー14)までの光路に対しても同様に行われる。 Such substitution with nitrogen gas is carried out similarly to the optical path from the interior of the illumination system 10 to the condenser lens system 12 (or mirror 14).

【0015】ところで、ウエハWはその裏面を吸着するホルダテーブルWH上に保持される。 By the way, the wafer W is held on a holder table WH for adsorbing the back surface. このホルダテーブルWHの外周部全体には一定の高さで壁部LBが設けられ、この壁部LBの内側には液体LQが所定の深さで満たされている。 This entire outer periphery of the holder table WH wall portion LB is provided at a certain height, the liquid LQ is filled in a predetermined depth inside the wall portion LB. そしてウエハWは、ホルダテーブルWH And the wafer W, holder table WH
の内底部の窪み部分に真空吸着される。 Is vacuum adsorbed to the recessed portion of the inner bottom portion of the. またホルダテーブルWHの内底部の周辺には、ウエハWの外周を所定の幅で取り囲むような環状の補助プレート部HRSが設けられている。 Also in the neighborhood of the inner bottom portion of the holder table WH, auxiliary plate portion HRS annular to surround the outer periphery of the wafer W at a predetermined width is provided. この補助プレート部HRSの表面の高さは、ホルダテーブルWH上に吸着された標準的なウエハWの表面の高さとほぼ一致するように定められている。 The height of the surface of the auxiliary plate portion HRS is determined so as substantially to match the height of the holder table WH on adsorbed standard surface of the wafer W to.

【0016】この補助プレート部HRSの主要な機能は、フォーカス・レベリングセンサーの検出点がウエハWの外形エッジの外側に位置するような場合の代替のフォーカス検出面として利用されることである。 [0016] The primary function of this auxiliary plate portion HRS, is that the detection point of the focus leveling sensor is used as the focus detection surface of an alternative case that is located outside the outer edge of the wafer W. また補助プレート部HRSは、ウエハW上のショット領域とレチクルR上の回路パターンとを相対的に位置合わせするときに使われるアライメントセンサーのキャリブレーションや、ショット領域を走査露光するときに使われるフォーカス・レベリングセンサーのキャリブレーションにも兼用可能である。 The auxiliary plate section HRS the focus to be used when scanning exposure and calibration of the alignment sensor, a shot area to be used when a circuit pattern on the shot area and the reticle R on the wafer W to align relative positions - it can be also used to leveling sensor calibration. ただしアライメントセンサーやフォーカス・レベリングセンサーのキャリブレーションは、補助プレート部HRSと個別に設けられた専用の基準マーク板を使う方が望ましい。 However alignment sensor or focus leveling sensors for calibration, it is desirable to use an auxiliary plate portion HRS and dedicated reference mark plate provided separately. この場合、基準マーク板も液浸状態で投影レンズ系PLの投影像面とほぼ同一の高さになるようにホルダテーブルWH上に取り付けられ、アライメントセンサーは基準マーク板上に形成された各種の基準マークを液浸状態で検出することになる。 In this case, the reference mark plate also mounted on the holder table WH to be substantially the same height as the projection image plane of the projection lens system PL by the liquid immersion state, the alignment sensor various formed on the reference mark plate on It will detect the reference mark in immersed state. なお、 It should be noted that,
テーブル上の基準マーク板を使ってフォーカスセンサーのシステム・オフセットをキャリブレーションする方法の一例は、例えば米国特許4,650,983号に開示され、各種アライメントセンサーのキャリブレーション方法の一例は、例えば米国特許5,243,195号に開示されている。 An example of a method for calibrating the system offset of the focus sensor with a reference mark plate on the table, for example, is disclosed in U.S. Patent No. 4,650,983, an example of a calibration method for the various alignment sensor, for example, U.S. It is disclosed in Japanese Patent No. 5,243,195.

【0017】ところで図1に示した通り、本実施例では投影レンズ系PLの先端部を液体LQ内に浸けるので、 [0017] By the way as shown in FIG. 1, in this embodiment, since dipping the tip portion of the projection lens system PL in the liquid LQ,
少なくともその先端部は防水加工されて鏡筒内に液体が染み込まないような構造となっている。 At least the tip portion has a structure that does not soak liquid waterproof processed by the lens barrel. さらに、投影レンズ系PLの先端のレンズ素子の下面(ウエハWとの対向面)は平面、又は曲率半径が極めて大きい凸面に加工され、これにより、走査露光時にレンズ素子の下面とウエハWの表面との間で生じる液体LQの流れをスムーズにできる。 Furthermore, the plane (surface facing the wafer W) the lower surface of the lens element at the end portion of the projection lens system PL, or be processed radius of curvature extremely large convex Thus, the surface of the lower surface and the wafer W of the lens element during the scanning exposure the flow of the liquid LQ occurring between the can smoothly. さらに本実施例では、後で詳細に説明するが、液浸状態における投影レンズ系PLの最良結像面(レチクル共役面)が、先端のレンズ素子の下面から約2〜1mmの位置に形成されるように設計されている。 Further, in the present embodiment is described in detail later, the best imaging plane of the projection lens system PL in the immersed state (reticle conjugate plane) is formed at a position of about 2~1mm from the lower surface of the lens element of the tip It is designed to so that.
従って、先端のレンズ素子の下面とウエハWの表面との間に形成される液体層の厚みも2〜1mm程度になり、 Therefore, also becomes about 2~1mm thickness of the liquid layer is formed between the lower surface and the surface of the wafer W of the lens element of the tip,
これによって液体LQの温度調整の制御精度が緩和されるとともに、その液体層内の温度分布ムラの発生も抑えることが可能となる。 Together with the control accuracy of the temperature adjustment of the liquid LQ is reduced by this, it is possible to suppress the occurrence of the temperature distribution non-uniformity of the liquid layer.

【0018】さて、ホルダテーブルWHは、投影レンズ系PLの光軸AXに沿ったZ方向への並進移動(本実施例では粗移動と微動)と、光軸AXに垂直なXY平面に対する傾斜微動とが可能なように、XYステージ34上に取り付けられる。 [0018] Now, the holder table WH has inclined fine movement and translational movement in the Z direction along the optical axis AX of the projection lens system PL (fine movement and rough movement in the present embodiment), relative to the vertical XY plane to the optical axis AX Doo is to allow, mounted on the XY stage 34. このXYステージ34はベース定盤30上をXY方向に2次元移動し、ホルダテーブルWH The XY stage 34 is two-dimensionally moved to the base table 30 on the XY directions, the holder table WH
はXYステージ34上に3つのZ方向用のアクチュエータ32A、32B、32Cを介して取り付けられる。 The three actuators 32A for Z-direction on the XY stage 34, 32B, is mounted via a 32C. 各アクチュエータ32A,B,Cは、ピエゾ伸縮素子、ボイスコイルモータ、DCモータとリフト・カムの組合わせ機構等で構成される。 Each actuator 32A, B, C is a piezo expansion element, a voice coil motor, and a combination mechanism and the like of the DC motor and lift cams. そして3つのZアクチュエータを同じ量だけZ方向に駆動させると、ホルダテーブルW Then the same amount of three Z actuators when driving in the Z direction, the holder table W
HをZ方向(フォーカス方向)に平行移動させることができ、3つのZアクチュエータを互いに異なる量だけZ H can be moved parallel to the Z direction (focus direction), only the different amounts of three Z actuators Z
方向に駆動させると、ホルダテーブルWHの傾斜(チルト)方向とその量とが調整できる。 When driving in the direction can be adjusted inclination of the holder table WH and (tilt) direction and the amount is.

【0019】また、XYステージ34の2次元移動は、 [0019] In addition, two-dimensional movement of the XY stage 34,
送りネジを回転させるDCモータや非接触に推力を発生させるリニアモータ等で構成される駆動モータ36によって行われる。 Performed by configured drive motor 36 a linear motor or the like for generating a thrust to the DC motor or a non-contact rotating the feed screw. この駆動モータ36の制御は、ホルダテーブルWHの端部に固定された移動鏡MRwの反射面のX方向、Y方向の各位置変化を計測するレーザ干渉計3 The control of the drive motor 36, the laser interferometer 3 for measuring the X-direction, the position change of the Y-direction of the reflecting surface of the movable mirror MRw fixed to the end portion of the holder table WH
3からの計測座標位置を入力するウエハステージ制御器35によって行われる。 Measuring coordinate positions from 3 performed by the wafer stage controller 35 to enter. なお、駆動モータ36をリニアモータとしたXYステージ34の全体構成としては、例えば特開平8−233964号公報に開示された構成を使ってもよい。 As the overall configuration of the XY stage 34 in which the drive motor 36 and linear motor, for example, may be used a structure disclosed in Japanese Patent Laid-Open No. 8-233964.

【0020】さて、本実施例では投影レンズ系PLのワーキングディスタンスが小さく、投影レンズPLの先端のレンズ素子とウエハWとの間の2〜1mm程度の狭い間隔に液体LQを満たすことから、斜入射光方式のフォーカスセンサーの投光ビームを投影レンズ系PLの投影視野に対応したウエハ面上に斜めに投射することが難しい。 [0020] Now, in this embodiment a small working distance of the projection lens system PL, because it meets the liquid LQ in a narrow interval of about 2~1mm between the lens element and the wafer W at the tip of the projection lens PL, swash it is difficult to project obliquely projecting light beams of the focus sensor of the incident light method on the wafer surface corresponding to the projection field of the projection lens system PL. このため本実施例では図1に示す通り、オフ・アクシス方式(投影レンズ系PLの投影視野内にフォーカス検出点がない方式)のフォーカス・レベリング検出系と、オフ・アクシス方式でウエハW上のアライメント用のマークを検出するマーク検出系とを含むフォーカス・ As shown in FIG. 1 in this order this embodiment, the focus leveling detection system of the off-axis method (method no focus detection points in the projection field of the projection lens system PL), on the wafer W in off-axis type focus, including a mark detection system that detects the mark for alignment
アライメントセンサーFADを投影レンズ系PLの鏡筒の下端部周辺に配置する。 The alignment sensor FAD placing the lower end periphery of the barrel of the projection lens system PL.

【0021】このフォーカス・アライメントセンサーF [0021] The focus alignment sensor F
ADの先端に取り付けられた光学素子(レンズ、ガラス板、プリズム等)の下面は、図1に示すように液体LQ The lower surface of the optical element attached to the distal end of AD (lens, a glass plate, a prism, etc.), the liquid LQ as shown in FIG. 1
中に配置され、その光学素子からはアライメント用の照明ビームやフォーカス検出用のビームが液体LQを通してウエハW(又は補助プレート部HRS)の表面上に照射される。 Is placed in, the from the optical element is irradiated onto the surface of the wafer W (or the auxiliary plate portion HRS) beams for illumination beam and focus detection for alignment through the liquid LQ. そしてフォーカス・レベリング検出系はウエハWの表面の最良結像面に対する位置誤差に対応したフォーカス信号Sfを出力し、マーク検出系はウエハW上のマークの光学的な特徴に対応した光電信号を解析して、マークのXY位置又は位置ずれ量を表すアライメント信号Saを出力する。 The focus leveling detection system outputs a focus signal Sf corresponding to the position error for the best imaging plane of the surface of the wafer W, the mark detection system analyzes the photoelectric signal corresponding to the optical characteristics of the mark on the wafer W and outputs the alignment signal Sa representing the XY position or positional shift amount of the mark.

【0022】そして以上のフォーカス信号Sfとアライメント信号Saは主制御器40に送出され、主制御器4 [0022] The above focus signal Sf and the alignment signal Sa is sent to the main controller 40, the main controller 4
0はフォーカス信号Sfに基づいて3つのZアクチュエータ32A,B,Cの各々を最適に駆動するための情報をウエハステージ制御器35に送出する。 0 sends three Z actuators 32A based on the focus signal Sf, B, information for optimally driving each C in the wafer stage controller 35. これによってウエハステージ制御器35は、ウエハW上の実際に投影されるべき領域に対するフォーカス調整やチルト調整が行われるように、各Zアクチュエータ32A,B,Cを制御する。 This wafer stage controller 35 by, like focus adjustment and tilt adjustment for the actual area to be projected on the wafer W is performed, and controls the Z actuators 32A, B, and C.

【0023】また主制御器40は、アライメント信号S [0023] The main controller 40, alignment signal S
aに基づいて、レチクルRとウエハWとの相対的な位置関係を整合させるためのXYステージ34の座標位置を管理する。 Based on a, manages the coordinate position of the XY stage 34 for aligning the relative positional relationship between the reticle R and the wafer W. さらに主制御器40は、ウエハW上の各ショット領域を走査露光する際、レチクルRとウエハWとがY方向に投影レンズ系PLの投影倍率と等しい速度比で等速移動するように、レチクルステージ制御器20とウエハステージ制御器35とを同期制御する。 Further the main controller 40, when the scanning exposure of each shot area on the wafer W, such that the reticle R and the wafer W moves at a constant rate over the projection magnification equal velocity ratio of the projection lens system PL in the Y direction, the reticle synchronously controls the stage controller 20 and wafer stage controller 35.

【0024】なお、図1中のフォーカス・アライメントセンサーFADは投影レンズ系PLの先端部周辺の1ケ所にだけしか設けられていないが、投影レンズ系PLの先端部を挟んでY方向に2ケ所、X方向に2ケ所の計4 [0024] Incidentally, although focus alignment sensor FAD in Figure 1 not only provided only on one place around the tip portion of the projection lens system PL, 2 places in the Y direction across the end portion of the projection lens system PL , a total of four of the two positions in the X direction
ケ所に設けておくのがよい。 Good idea provided in places. また図1中のレチクルRの上方には、レチクルRの周辺部に形成されたアライメント用のマークとウエハW上のアライメント用のマーク(又は基準マーク板上の基準マーク)とを投影レンズ系PLを通して同時に検出して、レチクルRとウエハWとの位置ずれを高精度に計測するTTR(スルーザレチクル)方式のアライメントセンサー45が設けられている。 Also above the reticle R in FIG. 1, a reticle and a projection lens system marks (reference marks or the reference mark plate on) for the alignment of the mark on the wafer W for alignment formed in the peripheral portion of the R PL simultaneously detected through, TTR (through-the-reticle) type alignment sensor 45 for measuring the positional deviation between the reticle R and the wafer W with high precision is provided. そしてこのTTRアライメントセンサー45からの位置ずれ計測信号は主制御器40に送出され、レチクルステージ16やXYステージ34の位置決めに使われる。 The positional deviation measurement signal from the TTR alignment sensor 45 is sent to the main controller 40, it is used for positioning the reticle stage 16 and the XY stage 34.

【0025】ところで図1の露光装置は、XYステージ34をY方向に等速移動させて走査露光を行うものであるが、その走査露光時のレチクルR、ウエハWのスキャン移動とステップ移動とのスケジュールを図2を参照して説明する。 By the way exposure apparatus of Figure 1, but in which scanning exposure is performed by a constant speed moves the XY stage 34 in the Y direction, the scan movement and step movement of the reticle R, the wafer W during the scanning exposure schedule will be described with reference to FIG. 2. 図2において、図1中の投影レンズ系PL 2, the projection lens system PL in FIG. 1
は、前群レンズ系LGaと後群レンズ系LGbとで代表的に表してあり、その前群レンズ系LGaと後群レンズ系LGbとの間には、投影レンズ系PLの射出瞳Epが存在する。 Is Yes representatively expressed in a front group lens system LGa and the rear group lens system LGb, between its front group lens system LGa and the rear group lens system LGb, there is an exit pupil Ep of the projection lens system PL to. また図2に示したレチクルRには、投影レンズ系PLの物体側の円形イメージフィールドの直径寸法よりも大きな対角長を有する回路パターン領域Paが、 Also the reticle R as shown in FIG. 2, the circuit pattern area Pa with a large diagonal length than the diameter of the circular image field of the object side of the projection lens system PL,
遮光帯SBによって区画された内側に形成されている。 It is formed inside partitioned by the light-shielding band SB.

【0026】そしてレチクルR上の領域Paは、レチクルRを例えばY軸に沿った負方向に一定速度Vrでスキャン移動させつつ、ウエハWをY軸に沿った正方向に一定速度Vwでスキャン移動させることによって、ウエハW上の対応したショット領域SAaに走査露光される。 [0026] The region Pa on the reticle R is while scanning moving the reticle R at a constant speed Vr, for example, in the negative direction along the Y-axis, scanning the wafer W in the positive direction along the Y axis at a constant speed Vw movement by, it is scanned and exposed in the corresponding shot area SAa of the wafer W.
このとき、レチクルRを照明するパルス照明光ILの領域AIは、図2に示すようにレチクル上の領域Pa内でX方向に伸びた平行なスリット状又は矩形状に設定され、そのX方向の両端部は遮光帯SB上に位置する。 At this time, the area AI of the pulsed illumination light IL illuminates the reticle R is set to parallel slits or rectangular extending in the X direction in the area Pa of the reticle as shown in FIG. 2, the X-direction both end portions are located on the light-shielding band SB.

【0027】さて、レチクルR上の領域Pa内のパルス光照明領域AIに含まれる部分パターンは、投影レンズ系PL(レンズ系LGa、LGb)によってウエハW上のショット領域SAa内の対応した位置に像SIとして結像される。 [0027] Now, the partial pattern that is included in the pulsed light illumination area AI in the region Pa on the reticle R is the projection lens system PL (lens system LGa, LGb) in corresponding positions in the shot area SAa on the wafer W by It is imaged as an image SI. そしてレチクルR上のパターン領域PaとウエハW上のショット領域SAaとの相対走査が完了すると、ウエハWは例えばショット領域SAaの隣りのショット領域SAbに対する走査開始位置にくるように、 When the relative scanning of the shot area SAa on the pattern area Pa and the wafer W on the reticle R is completed, the wafer W is to come to the scanning start position for the shot area SAb next to e.g. shot areas SAa,
一定量だけY方向にステップ移動される。 Is step moved in the Y direction a predetermined amount. このステップ移動の間、パルス照明光ILの照射は中断される。 During this step movement, irradiation of the pulsed illumination light IL is interrupted. 次に、レチクルRの領域Pa内のパターンの像がウエハW Next, the pattern image is the wafer W in the area Pa of the reticle R
上のショット領域SAbに走査露光されるように、レチクルRをパルス光照明領域AIに対してY軸の正方向に一定速度Vrで移動させつつ、ウエハWを投影像SIに対してY軸の負方向に一定速度Vwで移動させることで、ショット領域SAb上に電子回路のパターン像が形成される。 As scanning exposure to the shot area SAb above, while moving at a constant speed Vr in the positive direction of the Y axis reticle R relative to the pulsed light illumination region AI, a Y axis wafer W relative to the projection image SI by moving at a constant speed Vw in the negative direction, the pattern image of the electronic circuits on the shot area SAb is formed. なお、エキシマレーザ光源からのパルス光を走査露光に用いる技術の一例は、例えば米国特許4,9 Incidentally, an example of a technique using a pulsed beam from the excimer laser light source to the scanning exposure, for example, U.S. Patent 4,9
24,257号に開示されている。 It is disclosed in EP 24,257.

【0028】ところで図1、2に示した投影露光装置は、レチクルR上の回路パターン領域の対角長が投影レンズ系PLの円形イメージフィールドの直径よりも小さい場合、照明系10内のレチクルブラインドの開口の形状や大きさを変えて、照明領域AIの形状をその回路パターン領域に合わせると、図1の装置をステップ・アンド・リピート方式のステッパーとして使うことができる。 By the way the projection exposure apparatus shown in FIGS. 1 and 2, when the diagonal length of the circuit pattern area on the reticle R is smaller than the diameter of the circular image field of the projection lens system PL, a reticle blind in the illumination system 10 by changing the shape and size of the opening, combined with the shape of the illumination area AI in the circuit pattern area, we are possible to use the apparatus of Figure 1 as a stepper step-and-repeat method. この場合、ウエハW上のショット領域を露光している間は、レチクルステージ16とXYステージ34とを相対的に静止状態にしておく。 In this case, during exposure of a shot area on the wafer W is kept by the reticle stage 16 and the XY stage 34 in the relatively stationary state. しかしながらその露光中にウエハWが微動するときは、その微動をレーザ干渉計システム33で計測して投影レンズ系PLに対するウエハWの微小な位置ずれ分をレチクルR側で追従補正するように、レチクルステージ16を微動制御すればよい。 However when the wafer W is finely moved during the exposure, so as to follow correct the minute positional shift amount of the wafer W with respect to the projection lens system PL is measured by the laser interferometer system 33 and the fine movement in the reticle R side, a reticle the stage 16 may be fine motion control.
またレチクルブラインドの開口の形状や大きさを変える場合は、開口形状やサイズの変更に合せて、レチクルブラインドに達する光源からのパルス光を調整後の開口に見合った範囲に集中させるようなズームレンズ系を設けてもよい。 In the case of changing the shape and size of the reticle blind opening, in accordance with the change of the opening shape and size, the zoom lens as be concentrated on a range commensurate with pulsed light from the light source reaching the reticle blind on the opening after the adjustment the system may be provided.

【0029】なお、図2から明らかなように、投影像S [0029] As is clear from FIG. 2, the projected image S
Iの領域はX方向に延びたスリット状又は矩形状に設定されているため、走査露光中のチルト調整は本実施例では専らY軸回りの回転方向、すなわち走査露光の方向に対してローリング方向にのみ行われる。 Since the area of ​​the I is set to a slit shape or a rectangular shape extending in the X direction, the tilt adjustment exclusively around the Y-axis rotation direction in this embodiment in the scanning exposure, i.e. the rolling direction relative to the direction of scanning exposure It is performed only. もちろん、投影像SIの領域の走査方向の幅が大きく、ウエハ表面の走査方向に関するフラットネスの影響を考慮しなけばならないときは、当然にX軸回りの回転方向、すなわちピッチング方向のチルト調整も走査露光中に行われる。 Of course, the width of the scanning direction of the area of ​​the projected image SI is large, when should cry consideration of the influence of the flatness in the scanning direction of the wafer surface, naturally X-axis direction of rotation, i.e., tilt adjustment of the pitching direction carried out during the scanning exposure.

【0030】ここで、本実施例による露光装置の特徴であるホルダテーブルWH内の液体LQの状態について、 [0030] Here, the liquid LQ in the state of the holder table WH is characteristic of an exposure apparatus according to the present embodiment,
図3を参照して説明する。 It will be described with reference to FIG. 図3は投影レンズ系PLの先端部からホルダテーブルWHまでの部分断面を表す。 Figure 3 represents a partial section of the distal end portion of the projection lens system PL to the holder table WH. 投影レンズ系PLの鏡筒内の先端には、下面Peが平面で上面が凸面の正レンズ素子LE1が固定されている。 The distal end of the barrel of the projection lens system PL, the lower surface Pe is the upper surface in a planar positive lens element LE1 convex is fixed. このレンズ素子LE1の下面Peは、鏡筒金物の先端部の端面と同一面となるように加工(フラッシュサーフェス加工)されており、液体LQの流れが乱れることを抑えている。 Underside Pe of the lens element LE1 is machined so that the end surface and the same surface of the distal end portion of the lens barrel hardware (flash surface processing), thereby suppressing the liquid LQ flows is disturbed. さらに投影レンズ系PLの鏡筒先端部で液体L Furthermore the liquid L in the barrel end portion of the projection lens system PL
Q内に浸かる外周角部114は、例えば図3のように大きな曲率で面取り加工されており、液体LQの流れに対する抵抗を小さくして不要な渦の発生や乱流を抑える。 Circumference edge 114 soak in Q is, for example, FIG. Are chamfered with a large curvature as 3, suppressing unwanted vortex generation and turbulence to reduce the resistance to the flow of the liquid LQ.
また、ホルダテーブルWHの内底部の中央には、ウエハWの裏面を真空吸着する複数の突出した吸着面113が形成されてい。 At the center of the inner bottom portion of the holder table WH, have a back surface of the wafer W is suction surface 113 in which a plurality of projections which vacuum suction is formed. この吸着面113は、具体的には1mm The suction surface 113 is specifically 1mm
程度の高さでウエハWの径方向に所定のピッチで同心円状に形成された複数の輪帯状ランド部として作られる。 It made as a plurality of annular lands formed concentrically in the radial direction of the wafer W at a predetermined pitch on the order of height.
そして各輪帯状ランド部の中央に刻設された溝の各々は、テーブルWHの内部で真空吸着用の真空源に接続される配管112につながっている。 And each of the center engraved by grooves in the annular land portion is connected to the piping 112 connected to a vacuum source for vacuum suction inside the table WH.

【0031】さて、本実施例では図3に示したように、 [0031] Now, in the present embodiment shown in FIG. 3,
投影レンズ系PLの先端のレンズ素子LE1の下面Pe Underside Pe lens element LE1 at the end portion of the projection lens system PL
とウエハW(又は補助プレート部HRS)の表面とのベストフォーカス状態での間隔Lは、2〜1mm程度に設定される。 A distance L at the best focus state of the wafer W (or the auxiliary plate portion HRS) surface is set to about 2~1Mm. そのため、ホルダテーブルWH内に満たされる液体LQの深さHqは、間隔Lに対して2〜3倍程度以上であればよく、従ってホルダテーブルWHの周辺に立設された壁部LBの高さは数mm〜10mm程度でよい。 Therefore, the depth Hq of the liquid LQ filled in the holder table WH has only to be not less than 2 to 3 times the distance L, therefore the height of the wall portion LB erected around the holder table WH it may be about a few mm~10mm. このように本実施例では、投影レンズ系PLのワーキングディスタンスとしての間隔Lを極めて小さくしたため、ホルダテーブルWH内に満たされる液体LQの総量も少なくて済み、温度制御も容易になる。 Thus, in this embodiment, because of the very small distance L as the working distance of the projection lens system PL, it requires in total even less of the liquid LQ filled in the holder table WH, also facilitates temperature control.

【0032】ここで本実施例で使う液体LQは、入手が容易で取り扱いが簡単な純水を用いる。 The liquid LQ used herein in the present embodiment, availability is easy to handle using a simple pure water. ただし本実施例では、液体LQの表面張力を減少させるとともに、界面活性力を増大させるために、ウエハWのレジスト層を溶解させず、且つレンズ素子の下面Peの光学コートに対する影響が無視できる脂肪族系の添加剤(液体)をわずかな割合で添加しておく。 However, in this embodiment, fats to reduce the surface tension of the liquid LQ, in order to increase the surface activity, does not dissolve the resist layer of the wafer W, and the influence on the optical coating of the lower surface Pe lens element is negligible previously added family-based additive (liquid) in a small proportion. その添加剤としては、純水とほぼ等しい屈折率を有するメチルアルコール等が好ましい。 As the additive, methyl alcohol, and preferably has a refractive index approximately equal to that of pure water. このようにすると、純水中のメチルアルコール成分が蒸発して含有濃度が変化しても、液体LQの全体としての屈折率変化を極めて小さくできるといった利点が得られる。 In this way, even after changing the content level to evaporate methyl alcohol components in pure water has advantages such change in the refractive index of the entire liquid LQ can be made extremely small.

【0033】さて、液体LQの温度はある目標温度に対して一定の精度で制御されるが、現在比較的容易に温度制御できる精度は±0.01℃程度である。 [0033] Now, with respect to the temperature of the liquid LQ is the target temperature is controlled at a certain accuracy, precision currently relatively easy temperature control is about ± 0.01 ° C.. そこでこのような温調精度のもとでの現実的な液浸投影法を考えてみる。 So consider a realistic immersion projection method under such a temperature control accuracy. 一般に空気の屈折率の温度係数N aは約−9×1 Temperature coefficient of the refractive index of the general air N a is about -9 × 1
-7 /℃であり、水の屈折率の温度係数N qは約−8× 0 -7 / a ° C., the temperature coefficient N q of the refractive index of water is about -8 ×
10 -5 /℃であり、水の屈折率の温度係数N qの方が2 10 is a -5 / ° C., better temperature coefficient N q of the refractive index of water is 2
桁程度も大きい。 Digit order also large. 一方、ワーキングディスタンスをLとすると、ワーキングディスタンスLを満たす媒質の温度変化(温度むら)量ΔTに起因して生じる結像の波面収差量ΔFは近似的に次式で表される。 On the other hand, when the working distance is L, the wavefront aberration amount ΔF of imaging caused by the temperature change (temperature unevenness) amount ΔT of the medium to meet the working distance L is approximately expressed by the following equation. ΔF=L・|N|・ΔT ΔF = L · | N | · ΔT

【0034】ここで、液浸投影法を適用しない通常の投影露光の場合、ワーキングディスタンスLを10mm、 [0034] Here, in the case of normal projection exposure you do not want to apply the liquid immersion projection method, 10mm working distance L,
温度変化量ΔTを0.01℃としたときの波面収差量Δ Wavefront aberration amount when the temperature change amount ΔT was 0.01 ° C. delta
airは以下のようになる。 F air is as follows. ΔF air =L・|N a |・ΔT≒0.09nm また同じワーキングディスタンスLと温度変化量ΔTの下で、液浸投影法を適用した場合に得られる波面収差量ΔF lqは以下のようになる。 ΔF air = L · | N a | under · [Delta] T ≒ 0.09 nm The same working distance L and the temperature change amount [Delta] T, the wavefront aberration amount [Delta] F lq obtained when applying the liquid immersion projection method, as follows Become. ΔF lq =L・|N q |・ΔT≒8nm ΔF lq = L · | N q | · ΔT ≒ 8nm

【0035】この波面収差量は、一般に使用波長λの1 [0035] 1 of the wavefront aberration amount, generally used wavelength λ
/30ないしは1/50〜1/100程度が望ましいとされているから、ArFエキシマレーザを使った場合に許容される最大の波面収差量ΔF maxは、λ/30ないしはλ/50〜λ/100程度の6.43ないしは3. Since / 30 or 1 / 50-1 / about 100 is desirable, the maximum amount of wavefront aberration [Delta] F max allowed when using an ArF excimer laser, lambda / 30 or lambda / 50~Ramuda / 100 the extent of 6.43 or 3.
86〜1.93nmに定められ、望ましくはλ/100 Defined in 86~1.93Nm, preferably lambda / 100
の1.93nm以下に定められる。 It is defined in the following 1.93nm. ところで空気と水の0℃における各熱伝導率は、空気で0.0241W/m Meanwhile the thermal conductivity at 0 ℃ of air and water, 0.0241W / m in air
Kとなり、水で0.561W/mKとなり、水の方が熱伝導が良く、水中に形成される光路内での温度むらは空気中のそれよりも小さくでき、結果的に液体中で発生する屈折率の揺らぎも小さくできる。 K, and the water 0.561W / mK, and the direction of water good thermal conductivity, temperature variations in the optical path which is formed in the water can be smaller than that in the air, resulting in generated in the liquid fluctuation of the refractive index can be reduced. しかしながら、式(3)に表したようにワーキングディスタンスLが10 However, the working distance L is 10 as shown in equation (3)
mm程度の場合、温度変化量ΔTが0.01℃であったとしても、発生する波面収差量ΔF lqは許容収差量ΔF For about mm, even if the temperature variation ΔT was 0.01 ° C., the wavefront aberration amount [Delta] F lq generated allowable aberration amount [Delta] F
maxを大きく越えてしまう。 It would greatly exceed max.

【0036】そこで以上の考察から、許容波面収差量Δ [0036] Therefore, from the above discussion, the allowable amount of wavefront aberration Δ
maxを考慮した温度変化量ΔTとワーキングディスタンスLとの関係は、 ΔF max =λ/30≧L・|N q |・ΔT ないしは、 ΔF max =λ/100≧L・|N q |・ΔT となる。 Relationship between the temperature change amount [Delta] T and the working distance L in consideration of F max is, ΔF max = λ / 30 ≧ L · | N q | · ΔT or, ΔF max = λ / 100 ≧ L · | N q | · ΔT to become. ここで、想定される温度変化量ΔTを0.01 Here, the temperature variation ΔT envisaged 0.01
℃、波長λを193nm、そして液体LQの屈折率変化量N qを−8×10 -5 /℃とすると、必要とされるワーキングディスタンス(液体層の厚み)Lは、8mmないしは2.4mm以下となる。 ° C., and the wavelength lambda 193 nm, and a refractive index change amount N q of the liquid LQ to -8 × 10 -5 / ℃, the working distance is required (thickness of the liquid layer) L is, 8 mm or 2.4mm or less to become. 望ましくは、そのワーキングディスタンスLを液体LQがスムーズに流れる範囲内で2mmよりも小さくした方がよい。 Desirably, the working distance L is better to be smaller than 2mm to the extent that the liquid LQ flows smoothly. 以上のように本実施例のように構成することにより、液体LQの温度制御が容易になるとともに、液体層内の温度変化に起因した波面収差変化で生じる投影像の劣化が抑えられ、極めて高い解像力でレチクルRのパターンを投影露光することが可能となる。 By configuring as in this embodiment as described above, the temperature control of the liquid LQ is facilitated, the deterioration of the projected image caused by the wave front aberration change due to a temperature change of the liquid layer is suppressed, extremely high it is possible to projection exposure of a pattern of the reticle R in resolution.

【0037】 [0037]

【第2の実施例の説明】次に、本発明の第2の実施例について図4を参照して説明する。 [Description of the second embodiment will now be described with reference to FIG. 4 a second embodiment of the present invention. 本実施例は、先の第1 This embodiment, the previous 1
の実施例にも同様に適用可能な液体LQの温度制御法とウエハWの交換時の液体LQの取り扱い方法とを示す。 The examples also show the handling of the liquid LQ at the time of exchange of the temperature control method and the wafer W can be applied the liquid LQ similarly.
従って、図4において先の図1,3中の部材と同じものには同一の符号をつけてある。 Therefore, they are given the same reference numerals the same as the members in the previous figures 1 and 3 in FIG. さて、図4においてホルダテーブルWHの内底部に円形の凹部として形成されたウエハ載置部には複数の吸着面113が形成されている。 Now, it is formed with a plurality of suction surface 113 in the wafer table which is formed as a circular recess in the inner bottom portion of the holder table WH in FIG. そして円形のウエハ載置部の周辺には、液体LQの供給と排出に用いる溝51が環状に形成され、その溝5 And the periphery of the circular wafer table, a groove 51 used for discharging the supply of the liquid LQ is formed annularly, the groove 5
1の一部は、テーブルWH内に形成された通路52を介して、外部のパイプ53につながれている。 Some of the 1, through a passage 52 formed in the table WH, are coupled to the outside of the pipe 53. またホルダテーブルWH内のウエハ載置部の直下と補助プレート部HRSの直下には、ペルチェ素子等の温度調整器50 Also immediately below the wafer placement directly below the auxiliary plate portion HRS in part in the holder table WH, temperature controller 50 such as a Peltier element
A,50Bが埋め込まれ、ホルダテーブルWH上の適当な位置(望ましくは複数ケ所)には温度センサー55が取り付けられて、液体LQの温度が精密に検出される。 A, 50B is embedded, the appropriate position on the holder table WH (preferably multiple locations) in the temperature sensor 55 is attached to, the temperature of the liquid LQ is precisely detected.
そして温度調整器50A,50Bは、温度センサー55 The temperature controller 50A, 50B, the temperature sensor 55
によって検出される液体LQの温度が一定値になるように、制御器60によって制御される。 The temperature of the liquid LQ to be detected as a constant value, which is controlled by controller 60 by.

【0038】一方、パイプ53は、切り替えバルブ62 [0038] On the other hand, the pipe 53, switching valve 62
を介して、液体供給ユニット64と排出ポンプ66に接続されている。 Through, and is connected to the liquid supply unit 64 and the discharge pump 66. 切り替えバルブ62は、制御器60からの指令に応答して、液体供給ユニット64からの液体L Switching valve 62, in response to a command from the controller 60, the liquid L from the liquid supply unit 64
Qをパイプ53に供給する流路か、パイプ53からの液体LQを排出ポンプ66を介して供給ユニット64に戻す流路かを切り替えるように動作する。 Channel or supplying the pipe 53 to Q, operates to switch the flow path or for returning the liquid LQ from the pipe 53 to the supply unit 64 via a discharge pump 66. また供給ユニット64内には、ホルダテーブルWH上の液体LQの全体を収容可能なリザーブタンク(不図示)と、このタンクから液体LQを供給するポンプ64Aと、そのポンプ6 Also In the supply unit 64, and can accommodate reserve tank the whole of the liquid LQ on the holder table WH (not shown), a pump 64A supplies the liquid LQ from the tank, the pump 6
4Aを含めタンク内の液体LQ全体を一定の温度に保つ温調器64Bとが設けられている。 A temperature controller 64B is provided to keep the whole liquid LQ in the tank including 4A at a constant temperature. さらに以上の構成において、バルブ62、ポンプ64A、温調器64B、排出ポンプ66の各動作は、制御器60によって統括的に制御される。 In addition the above configuration, the valve 62, the pump 64A, temperature controller 64B, the operation of the discharge pump 66 is totally controlled by the controller 60.

【0039】さて、このような構成において、ウエハW [0039] Now, in such a configuration, the wafer W
がホルダテーブルWHの載置部上に搬送され、プリアライメントされた状態で複数の吸着面113上に載置されると、図3に示した真空吸着用の配管112を介して減圧固定される。 There is conveyed onto the platform of the holder table WH, when placed on a plurality of suction surface 113 while being pre-alignment, is depressurized secured via a pipe 112 for vacuum suction shown in Fig. 3 . この間、温度調整器50A,50Bは、 During this time, the temperature regulators 50A, 50B are,
目標となる温度に制御され続けている。 It continues to be controlled to a temperature as a target. そしてウエハW And wafer W
の真空吸着が完了すると、切り替えバルブ62がクローズ位置から供給ユニット64側に切り替わり、温度調整された液体LQがポンプ64Aの作動によって、パイプ53、通路52、溝51を介してホルダテーブルWHの壁部LBの内部に一定量だけ注入されて、切り替えバルブ62がクローズ位置に戻る。 Of the vacuum suction is completed, the switching valve 62 is switched from the closed position to the supply unit 64 side, by the operation of the temperature control liquid LQ pump 64A, the pipe 53, the passage 52, the wall of the holder table WH through the groove 51 is injected by a predetermined amount within the Department LB, switching valve 62 is returned to the closed position. その後、ウエハWに対する露光が完了すると、直ちに切り替えバルブ62がクローズ位置から排出ポンプ66側に切り替わり、排出ポンプ66の作動によってテーブルWH上の液体LQが溝5 Then, when exposure to wafer W has been completed, immediately switching valve 62 is switched from the closed position toward the discharge pump 66, the liquid LQ on the table WH by the operation of the discharge pump 66 is a groove 5
1、パイプ53を介して供給ユニット64のリザーブタンク内に戻される。 1, is returned to the reserve tank of the supply unit 64 via a pipe 53. そのタンク内に戻された液体LQ Liquid LQ returned to the tank
は、リザーブタンク内の温度センサーからの検出信号に基づいて、次のウエハが準備できるまで温調器64Bによって精密に温度制御される。 Based on the detection signal from the temperature sensor in the reservoir tank, is precisely temperature controlled by temperature controller 64B until the next wafer is ready.

【0040】このように本実施例によれば、液浸露光中の液体LQはホルダテーブルWH内の温度調整器50 According to the present embodiment, the temperature regulator 50 of the liquid LQ is in the holder table WH in immersion exposure
A,50Bによって温度制御され、ウエハ交換動作中は液体LQを供給ユニット64内に回収して温度制御するようにしたので、ウエハ交換が大気中で可能になるとともに、液体LQの大きな温度変化を防止できると云った利点がある。 A, temperature controlled by 50B, since during wafer exchange operation was such that the temperature control to recover the liquid LQ to the supply unit 64, together with the wafer exchange is possible in the atmosphere, a large temperature change of the liquid LQ there is an advantage that went with can be prevented. さらに本実施例によれば、ウエハ交換後にホルダテーブルWHに注入される液体LQは、たとえ設定温度に対して僅か(例えば0.5℃程度)に異なっていたとしても、液体層の深さHq(図3参照)が総じて浅いために比較的早く設定温度に到達し得るから、温度安定を待つ時間も短縮され得る。 Furthermore, according to this embodiment, the liquid LQ to be injected after the wafer exchange in the holder table WH is, even if slightly different (for example, about 0.5 ° C.) with respect to even the set temperature, depth Hq liquid layer because (see FIG. 3) can reach relatively quickly set temperature for general shallow, it can also be less time to wait for temperature stabilization.

【0041】 [0041]

【第3の実施例の説明】次に第3の実施例について図5 For [third embodiment of Description] Next, a third embodiment of FIG. 5
を参照して説明する。 With reference to the description. 図5は先の図3の構成を改良したホルダテーブルWHの部分断面を表し、この実施例のホルダテーブルWHは、ウエハWを保持するウエハチャック90と、フォーカス・レベリングのためのZ方向移動とチルト移動を行うZLステージ82とに別れており、 Figure 5 represents a partial section of the holder table WH having an improved structure of the previous Figure 3, the holder table WH of this embodiment includes a wafer chuck 90 for holding the the wafer W, and Z-direction movement for focus leveling and farewell to the ZL stage 82 to perform the tilt movement,
ZLステージ82上にウエハチャック90が載置されている。 Wafer chuck 90 is placed on the ZL stage 82. そしてZLステージ82は、3つのZアクチュエータ32A,32C(32Bは省略)を介して、XYステージ34上に設けられる。 The ZL stage 82 includes three Z actuators 32A, through 32C (32B is shown) are provided on the XY stage 34. そしてチャック90には、 And the chuck 90,
図1、3、4と同様に、壁部LB、補助プレート部HR Similar to FIG. 1, 3 and 4, the wall portion LB, auxiliary plate portion HR
S、真空吸着用の配管112、液体LQの供給、排出用のパイプ53(図4参照)に接続される通路53A,5 S, line 112 for vacuum adsorption, the supply of the liquid LQ, the passage 53A is connected to a pipe 53 for discharging (see FIG. 4), 5
3Bがそれぞれ形成されている。 3B are formed. ただし、通路53Aはウエハチャック90内部の補助プレート部HRSの周辺部分につながっており、通路53Bはウエハチャック9 However, the passage 53A is connected to the peripheral portion of the auxiliary plate portion HRS inside the wafer chuck 90, passageway 53B wafer chuck 9
0内底部のウエハ載置部の最も低い部分につながっている。 It has led to the lowest part of the wafer table 0 in the bottom. このようにウエハチャック90内の複数ケ所に液体排出、注入用の通路を形成しておくと、液体の出し入れが迅速に行われる。 Thus the liquid discharge into multiple places in the wafer chuck 90 and keep a passage for injection, and out of the liquid is quickly.

【0042】さらに本実施例では、チャック90の中央部に3つ(2つのみ図示)の貫通孔91が形成され、この貫通孔91を通って上下動する3つ(2つのみ図示) [0042] Furthermore, in this embodiment, three in a central portion of the chuck 90 through holes 91 of (only two shown) are formed, three moved up and down through the through-holes 91 (only two shown)
のセンターアップピン83が、上下動駆動機構85の上に設けられている。 The center-up pin 83 is provided on the vertical movement drive mechanism 85. この上下動駆動機構85は、XYステージ34側に固定される。 The vertical movement drive mechanism 85 is fixed to the XY stage 34 side. その3つのセンターアップピン83は、ウエハ交換時にチャック90上のウエハW Its three center-up pin 83, wafer W on the chuck 90 at the time of wafer exchange
を載置面から一定量だけ持ち上げたり、ウエハWを載置面上に下ろしたりするためのものであり、ウエハWがチャック90の載置面に真空吸着された状態では、図5に示すようにセンターアップピン83の先端面は、チャック90の載置面よりも下がった位置に設定される。 Lifting by a predetermined amount from the mounting surface is for or down on the mounting surface of the wafer W, in the state where the wafer W is vacuum-adsorbed to the mounting surface of the chuck 90, as shown in FIG. 5 the distal end surface of the center-up pin 83 is set to a position drops below the mounting surface of the chuck 90.

【0043】一方、本実施例で使用する投影レンズ系P On the other hand, the projection lens system P used in this embodiment
Lの先端部には、サブ鏡筒80の先端に光軸AXと垂直に固定された石英の平行平板CGが取り付けられ、したがって先端のレンズ素子LE1(平凸レンズ)が液体L The distal end portion of the L, the optical axis AX perpendicular to the parallel plate CG fixed quartz is attached to the end portion of the sub-barrel 80, thus the lens element LE1 tip (plano-convex lens) is liquid L
Qに浸かることがないように構成されている。 And it is configured so as not to soak in Q. 本実施例では、この平行平板CGの下面とウエハWの表面との間隔が、見かけ上のワーキングディスタンスとなり、先の実施例と同様に2mm以下に設定される。 In this embodiment, the spacing between the parallel plate CG of the lower surface and the surface of the wafer W becomes the working distance of the apparent and is set as in the previous examples 2mm or less. またサブ鏡筒80の平行平板CGとの取付け面は防水加工され、サブ鏡筒80の内部には窒素ガスが充填されている。 The mounting surface of the parallel plate CG sub-barrel 80 is waterproof, the nitrogen gas in the interior of the sub-barrel 80 is filled.

【0044】このように投影レンズ系PLの先端に平行平板CGを設けるようにすると、投影レンズ系PLの実質的なバックフォーカス距離(屈折力を持つ先端の光学素子から像面までの距離)が10〜15mm程度であっても、容易にワーキングディスタンスLを1〜2mm程度にして液体の温度変化の影響を低減させた液浸投影法が実現できる。 [0044] With such provision of the parallel plate CG to the tip of the thus projection lens system PL, substantial back focus length of the projection lens system PL (the distance to the image plane from the optical element of the tip having a refractive power) is be about 10-15 mm, easily immersion projection method and the working distance L to about 1~2mm reduce the influence of the temperature change of the liquid can be realized. また、平行平板CGは後付けで設けることができるから、平行平板CGの表面の一部分を波長の数分の1程度のオーダーで研磨することにより、投影像内で生じている局所的な微少歪曲収差(あるいはランダムなディストーション)を容易に修正することが可能となる。 Further, since the parallel plate CG can be provided by retrofitting, by polishing the portion of the surface of the parallel plate CG in a fraction of about the order of the wavelength, the local small distortion occurring in the projection image (or random distortion) can be easily modified to. すなわち、平行平板CGは投影レンズ系PLの最先端のレンズ素子を液体から保護する窓としての機能と、ディストーション補正板としての機能とを兼ね備えることになる。 That is, parallel plate CG would combine the functions as a window for protecting the cutting edge of the lens elements of the projection lens system PL from the liquid, and a function as the distortion correction plate. なお、別の見方をすれば平行平板CGを含めて投影レンズ系PLの結像性能が保証されているので、平行平板CGが投影レンズ系PLの最先端の光学素子であることに変わりはない。 Since imaging performance of the projection lens system PL, including a parallel plate CG Viewed another way is guaranteed, instead it is not to be parallel plate CG is state-of-the-art optical elements of the projection lens system PL .

【0045】 [0045]

【第4の実施例の説明】次に本発明の第4の実施例について図6を参照して説明する。 Referring to FIG. 6 will be described a fourth embodiment of the fourth explanatory embodiment] Next the present invention. 本実施例は、先の図5に示した実施例とも関連し、ワーキングディスタンスを極めて小さくした投影光学系を液浸投影露光法に使用した場合のウエハ交換に関するものである。 This example, in conjunction with the embodiment shown in FIG. 5 earlier, relates wafer exchange in the case of using the extremely small the projection optical system working distance in the immersion projection exposure method. 図6において、 6,
投影レンズ系PLの鏡筒の下端部には、図1に示したレーザ干渉計33からの参照用ビームBSrを受けて反射する参照ミラーML(X方向用とY方向用)が固定されている。 The lower end of the barrel of the projection lens system PL, a reference mirror ML for reflecting receiving a reference beam BSr from the laser interferometer 33 shown (for X-direction and Y-direction) is fixed to 1 . そしてレーザ干渉計33からの測長用ビームB The long beam B measurement from a laser interferometer 33
Smは、先の図5に示したようなZLステージ82の端部に固定された移動鏡MRwに投射され、その反射ビームはレーザ干渉計33に戻り、参照用ビームBSrの反射ビームと干渉して移動鏡MRwの反射面の座標位置、 Sm is projected onto the movement mirror MRw fixed to the end of the ZL stage 82 as shown in FIG. 5 earlier, the reflected beam returns to the laser interferometer 33, to interfere with the reflected beam of the reference beam BSr coordinate position of the reflection surface of movable mirror MRw Te,
すなわちウエハWのX,Y方向の座標位置が、参照ミラーMLを基準として計測される。 That X of the wafer W, the coordinate position in the Y direction is measured the reference mirror ML as a reference. さて、本実施例においても、ZLステージ82は3つのZアクチュエータ32 Well, also in this embodiment, ZL stage 82 is three Z actuators 32
A,32B(32Cは省略)を介してXYステージ34 A, 32B (32C omitted) XY stage via a 34
上に取り付けられ、Z方向とチルト方向とに移動可能となっている。 Attached to the upper, and is movable in the Z direction and the tilt direction. ただし、ZLステージ82は、その周辺の3ケ所で板バネ84A,84B(84Cは省略)を介してXYステージ34と結合され、XYステージ34に対する水平方向(XY面内)の剛性が極めて大きくなるように支持される。 However, ZL stage 82, the leaf springs 84A in 3 places around the, 84B (84C are shown) coupled with the XY stage 34 via the rigidity in the horizontal direction with respect to the XY stage 34 (in the XY plane) becomes extremely large It is supported so.

【0046】そして本実施例でも、先の図5と同様のウエハチャック90がZLステージ82上に設けられるが、図5と異なる点は、ウエハチャック90を複数のZ [0046] Then in this embodiment, the same wafer chuck 90 and FIG preceding is provided on the ZL stage 82, FIG. 5 differs from the wafer chuck 90 more Z
方向の駆動機構88A,88Bによって比較的に大きなストローク(10〜15mm程度)でZLステージ82 Direction of the drive mechanism 88A, ZL stage at a relatively large stroke by 88B (about 10-15 mm) 82
に対してZ方向に移動する構成にしたことである。 It is to have a configuration that moves in the Z direction with respect. この駆動機構88A,88Bは、フォーカス・レベリングのためのZアクチュエータ32A,B,Cと異なり、ウエハチャック90をそのストロークの両端間で移動させるだけでよく、エア・シリンダやリンク機構等を使った簡単なエレベーション機能でよい。 The driving mechanism 88A, 88B is different from the Z actuator 32A for the focus leveling, B, and C, and the wafer chuck 90 may only be moved between both ends of the stroke, with the air cylinder or a link mechanism or the like it is a simple elevation function. さらに図6の実施例では、先の図5に示したセンターアップピン83がXYステージ34上に上下動することなく固定されている。 In yet embodiment of FIG. 6 are fixed without center-up pins 83 previously shown in FIG. 5 is vertically moved on the XY stage 34. そして図6のようにウエハチャック90が最も上昇した状態では、ウエハWの表面が投影レンズ系PLの先端の光学素子の面から1〜2mm程度に設定され、センターアップピン83の先端面はウエハチャック90のウエハ載置面よりもわずかに下側(2〜3mm程度)に下がっている。 And in a state where the wafer chuck 90 is most elevated as in FIG. 6, the surface of the wafer W is set to about 1~2mm from surface of the optical element at the tip of the projection lens system PL, the distal end surface of the center-up pin 83 is wafer It is slightly lowered to the lower (about 2 to 3 mm) than the wafer mounting surface of the chuck 90.

【0047】以上のような構成で、図6はウエハWに対する露光動作時の状態を表し、その露光動作が完了すると先の図4に示した液体LQの排出操作によってウエハチャック90上の液体LQを一時的に排出する。 [0047] In the above-described configuration, FIG. 6 shows a state during the exposure operation for the wafer W, the liquid LQ on the wafer chuck 90 by the discharge operation of the liquid LQ previously shown Figure 4 of the the exposure operation is completed temporarily discharged. その後、ウエハチャック90の真空吸着が解除されると、駆動機構88A,88Bを作動させてウエハチャック90 Thereafter, the vacuum suction of the wafer chuck 90 is released, the drive mechanism 88A, a wafer chuck 90 by actuating the 88B
を図6の位置から最も下にダウンさせる。 The bring down the lowest from the position of FIG. これによってウエハWは3つのセンターアップピン83の先端面上に載せ替えられるとともに、ウエハチャック90周辺の壁部LBの上端面が投影レンズ系PLの先端面(図3中ではレンズ素子LE1の下面Pe、図5中では平行平板C This together with the wafer W is reloaded onto the distal end surface of the three center-up pin 83, the upper end face the distal end surface of the projection lens system PL wall LB near the wafer chuck 90 (lower surface of the lens element LE1 is in FIG. 3 Pe, parallel plate C is in Fig 5
Gの下面)よりも低くなるように位置決めされる。 It is positioned to be lower than G underside of). その状態でXYステージ34をウエハ交換位置まで移動させると、ウエハWは投影レンズ系PLの直下から引き出されて、搬送用のアーム95の方に移動する。 Moving in that state the XY stage 34 to the wafer exchange position, the wafer W is drawn from immediately below the projection lens system PL, it moves toward the arm 95 for transport. このときアーム95は、ウエハチャック90の壁部LBの上端面よりは高く、且つセンターアップピン83上のウエハWよりは低くなるような高さに設定された状態で、ウエハW In this case the arm 95 is higher than the upper end surface of the wall portion LB of the wafer chuck 90, and in a state of being set in such a height lower than the wafer W on the center-up pins 83, the wafer W
の下側に入り込む。 It enters into the lower side of the. それからアーム90はウエハWを上方向にわずかに持ち上げつつ真空吸着を行い、所定のアンロード位置に向けてウエハWを搬送する。 Then the arm 90 is subjected to vacuum suction while slightly lifted upward direction the wafer W, the wafer W is transferred toward a predetermined unload position. ウエハWの搬入は、以上のシーケンスとは全く逆に行われる。 Loading of the wafer W is carried out at all in contrast to the above sequence.

【0048】ところで図6に示したように、レーザ干渉計33が参照ビームBSrを投影レンズ系PLの参照ミラーMLに投射するような方式の場合、参照ビームBS By the way, as shown in FIG. 6, the case of schemes such as laser interferometer 33 projects a reference beam BSr a reference mirror ML in the projection lens system PL, the reference beam BS
rの光路の直下に液体LQのプールが広がっているため、その液体LQの飽和蒸気の上昇によって参照ビームBSrの光路に揺らぎを与えることが考えられる。 Since the spread liquid LQ pool directly below the optical path of the r, it is to give a fluctuation in the optical path of the reference beam BSr by an increase of the saturation vapor of the liquid LQ. そこで本実施例では、参照ビームBSrの光路と液体LQとの間にカバー板87を配置し、液体LQから上昇する蒸気流を遮断して参照ビームBSrの光路で発生する揺らぎを防止する。 In this embodiment, referring to place the cover plate 87 between the optical path and the liquid LQ of the beam BSr, it prevents fluctuations generated in the optical path of the reference beam BSr blocks the vapor stream rising from the liquid LQ.

【0049】なお、カバー板87の上部空間には、参照ビームBSrの光路をより安定にするために、光路と交差する方向に温度制御された清浄な空気を送風してもよい。 [0049] Note that the upper space of the cover plate 87, in order to make the optical path of the reference beam BSr more stable, may be blown clean air with temperature control in the direction intersecting the optical path. この場合、カバー板87は光路空調用の空気が直接液体LQに吹き付けられることを防止する機能も備えることになり、液体LQの不要な蒸発を低減させることができる。 In this case, the cover plate 87 will be provided with a function of air for the optical path conditioning is prevented from being blown directly into the liquid LQ, it is possible to reduce unwanted vaporization of the liquid LQ. また、単なるカバー板87に代えて、参照ビームBSrの光路全体を遮風筒で覆う構成にしてもよい。 Further, instead of the mere cover plate 87, the entire optical path of the reference beam BSr may be configured to cover the wind tube shielding.

【0050】 [0050]

【第5の実施例の説明】次に本発明の第5の実施例を図7(A),(B)を参照して説明する。 [Fifth description of embodiments] Next a fifth embodiment of the present invention FIG. 7 (A), described with reference to (B). 本実施例は先の図1に示したホルダテーブルWHの構造に、図5に示したセンターアップ機構(ピン83、Z駆動部85)を組合わせたものであり、ウエハ交換を簡単にするようにホルダテーブルWHを改良したものである。 This embodiment to the structure of the holder table WH previously shown in FIG. 1, which has a combination of the center-up mechanism (pins 83, Z driving unit 85) shown in FIG. 5, so as to simplify the wafer exchange it is an improvement of the holder table WH in. そして図7 And Figure 7
(B)はその改良されたホルダテーブルWHの平面を表し、図7(A)は図7(B)中の7A矢視の断面を表す。 (B) represents the plane of the improved holder table WH, FIG 7 (A) represents 7A arrow sectional in FIG. 7 (B). その図7(A),(B)から分かるように、ホルダテーブルWHは、XYステージ34上に3つのZアクチュエータ32A、32C(32Bは省略)を介して保持され、ホルダテーブルWHの中央付近には3つの貫通孔91が設けられている。 As FIG. 7 (A), as can be seen from (B), the holder table WH has three Z actuators 32A on the XY stage 34, 32C (32B is shown) are held via a near the center of the holder table WH three through holes 91 are provided. この貫通孔91には、駆動部8 The through hole 91, drive 8
5によって上下動するセンターアップピン83が通る。 5 center-up pin 83 that moves up and down passes by.

【0051】先にも説明したように、投影レンズ系PL [0051] As explained above, the projection lens system PL
の最下端面の高さは、そのままでは補助プレート部HR The height of the lowermost surface is intact auxiliary plate portion HR of
S(ウエハW)の表面から2mm程度しか離れていない。 About 2mm from the surface of the S (wafer W) only away. さらにホルダテーブルWHの周辺に設けられた壁部LBの上端は投影レンズ系PLの最下端面よりも高い。 And that the top of the wall portion LB provided around the holder table WH is higher than the lowermost end surface of the projection lens system PL.
従って、ウエハ交換のためにそのままXYステージ34 Therefore, XY stage for wafer exchange 34
を移動させて投影レンズ系PLの直下からウエハを引き出すように構成した場合、補助プレート部HRSの一部分の幅が投影レンズ系PLの鏡筒の直径寸法程度必要となり、液体LQが注入されるホルダテーブルWHの内容積を大きくすることになる。 Moved when configured to draw the wafer from just below the projection lens system PL, the width of a portion of the auxiliary plate portion HRS is required about the diameter of the barrel of the projection lens system PL, the holder of the liquid LQ is injected It will increase the internal volume of the table WH.

【0052】そこで本実施例では、図7に示すようにホルダテーブルWHの壁部LBの一部を切り欠いて、そこに開閉自在な液密ドア部DBを設けた。 [0052] Therefore, in this embodiment, by cutting out part of the wall LB of the holder table WH 7 and there is provided a closable liquid-tight door unit DB. この液密ドア部DBは、液体LQが注入されている間は常に図7 The liquid-tight door unit DB is always while the liquid LQ is injected 7
(A),(B)のように壁部LBの切り欠き部を液密状態で閉じており、液体LQがホルダテーブルWH上から排出されると、図7(A)中の破線のように開くようになっている。 (A), (B) and closes the notch portion of the wall portion LB in a liquid-tight state as when the liquid LQ is discharged from the holder table WH, as indicated by the broken line in FIG. 7 (A) It has become so open. その液密ドア部DBは、開いた状態では補助プレート部HRSの表面の高さよりも若干低くなるように設定されている。 The liquid-tight door unit DB is in the opened state is set to be slightly lower than the height of the surface of the auxiliary plate portion HRS. また液密ドア部DBの内壁と接するホルダテーブルWH本体側の壁部分(壁部LBの切り欠き部等)には、図7(B)のように液密性を確実にするOリングOLが適宜の位置に設けられている。 Also the wall portion of the holder table WH body in contact with the inner wall of the fluid-tight door unit DB (cut-out of the wall portion LB, etc.), an O-ring OL to ensure liquid-tightness as shown in FIG. 7 (B) It is provided at appropriate positions.

【0053】以上のような構成において、ホルダテーブルWH上のウエハを交換する場合は、まずホルダテーブルWH内の液体LQを排出してから、液密ドア部DBを開く。 [0053] In the above configuration, when replacing the wafer on the holder table WH, first from the discharge of the liquid LQ in the holder table WH, opening the fluid-tight door unit DB. その後、XYステージ34を図7中で右側に移動させると、ウエハは投影レンズ系PLの直下から引き出されることになる。 Then, moving to the right side of the XY stage 34 in FIG. 7, the wafer will be withdrawn from directly below the projection lens system PL. このとき、投影レンズ系PLは丁度開いた液密ドア部DBの上方空間に位置する。 At this time, the projection lens system PL is located above the space just opened liquid-tight door unit DB. それからセンターアップピン83を上昇させてウエハを壁部LB Wall portion LB a wafer and then to raise the center-up pin 83
よりも高く持ち上げれば、ウエハは容易に交換することができる。 If lifted higher than, the wafer can be easily replaced.

【0054】本実施例によれば、ホルダテーブルWHの周囲を取り囲む壁部LBの直径を最小にすることが可能となり、ホルダテーブルWH内に満たされる液体LQの総量を最小限に抑えることが可能となり、液体LQの温度管理が容易になるだけでなく、液体LQの注入排出時間も最小になるといった利点がある。 [0054] According to this embodiment, it is possible to the diameter of the wall portion LB surrounding the holder table WH minimized can be minimized the total amount of the liquid LQ filled in the holder table WH next, not only the temperature control of the liquid LQ is facilitated, there is an advantage also to minimize infusion discharge time of the liquid LQ. なお、前記第4の実施例の構成のときには、ウエハチャックが下降するから特に液密ドア部を設ける必要はないが、第4の実施例の構成において、なおも液密ドア部を設けても良い。 Incidentally, the fourth at the construction of the embodiment of, the wafer chuck is not necessary to particularly specify a fluid-tight door unit from descending, in the configuration of the fourth embodiment, even if still provided a liquid-tight door unit good.

【0055】 [0055]

【第6の実施例の説明】次に図8は本発明の第6の実施例を示し、この実施例では下部容器7と上部容器8を用いている。 [Sixth Embodiment Description of now to FIG. 8 shows a sixth embodiment of the present invention, in this embodiment uses a lower container 7 and an upper container 8. ウエハ3を載置するウエハホルダー3aは下部容器7の内面底部に形成されており、下部容器7の上面は上部容器8の底面によって密閉されており、下部容器7の全容積は浸液7aによって完全に満たされている。 Wafer holder 3a for mounting the wafer 3 is formed on the inner surface the bottom of the lower container 7, the upper surface of the lower container 7 is sealed by the bottom surface of the upper container 8, the total volume of the lower container 7 by immersion 7a It is completely filled. 他方上部容器8にも浸液8aが満たされており、その浸液8a内に投影光学系1の最終レンズ面1aが浸されている。 On the other upper chamber 8 is filled immersion 8a is the last lens surface 1a of the projection optical system 1 is immersed in the immersion liquid within 8a.

【0056】下部容器7内の浸液7aの一部分は、下部容器7の一側面に設けた排出口5より温度調節器6に導かれ、温度調節器6において温度調節を受けた後に、下部容器7の他側面に設けた注入口4より下部容器7に戻るように循環している。 [0056] a portion of the immersion liquid 7a within the lower container 7 is guided to the temperature controller 6 from the discharge port 5 provided on one side surface of the lower container 7, after receiving a temperature regulated in the temperature controller 6, the lower container It circulates back to the lower container 7 from inlet 4 provided on the other side of the 7. 下部容器7内の複数箇所には温度センサー(図示せず)が取り付けられており、温度調節器6は温度センサーからの出力に基づいて、下部容器7内の浸液7aの温度が一定となるように制御している。 The plurality of positions in the lower container 7 is mounted a temperature sensor (not shown), a temperature controller 6 based on the output from the temperature sensor, the temperature of the immersion liquid 7a within the lower container 7 becomes constant It is controlled so. また上部容器8内の浸液8aについても、同様の温度調節機構が設けられている。 Regarding also the immersion liquid 8a in the upper container 8, the same temperature adjustment mechanism is provided.

【0057】この実施例においては、下部容器7と上部容器8を一体として移動することにより、ウエハ3を移動している。 [0057] In this embodiment, by moving the lower container 7 and an upper container 8 integrally, and moving the wafer 3. 他方、ウエハ3を収容した下部容器内の浸液は実質的に密閉されているから、温度安定性の点で有利であるだけでなく、浸液中の渦等の流れによる圧力分布も発生しない。 On the other hand, since the immersion liquid in the lower vessel housing the wafer 3 are substantially closed, not only is advantageous in terms of thermal stability, does not occur pressure distribution due to the flow of eddy or the like in the immersion liquid . すなわち浸液中の圧力分布は、屈折率の揺らぎとなり結像波面収差悪化の要因となるが、この第6の実施例において圧力分布が問題になるのは、上部容器8に満たされた浸液8aのみで、この部分の光路L Immersion or pressure distribution in the immersion liquid is a factor of fluctuation and makes imaging wavefront aberration deterioration in the refractive index, the pressure distribution is a problem in this sixth embodiment, filled into the upper container 8 8a only the optical path L of this part
8を充分に短く形成することにより、ウエハ移動時の浸液流れの影響を実用上問題にならないレベルまで緩和することが出来る。 By forming sufficiently short 8, it can be relaxed to a level as not to practical problems the effects of immersion flow during wafer transfer.

【0058】なお本実施例では下部容器7と上部容器8 [0058] Note that the lower container 7 in this embodiment the upper chamber 8
を一体として移動したが、下部容器7のみを移動し、上部容器8を固定することもできる。 The was moved integrally, move only the lower container 7, it is also possible to fix the upper chamber 8. この構成のときには、上部容器8内の浸液8aは完全に停止することになる。 When in this configuration, the immersion liquid 8a in the upper container 8 will be stopped completely. したがってワーキングディスタンスLのうちで、上部容器8内の浸液8aの厚さL 8よりも、下部容器7内の浸液7aの厚さL 7の方を十分に薄く形成することが好ましい。 Thus among the working distance L, than the thickness L 8 of the immersion liquid 8a in the upper container 8, it is preferable to form sufficiently thin towards the thickness L 7 of the immersion liquid 7a within the lower container 7.

【0059】 [0059]

【その他の変形例の説明】以上、本発明の各実施例を説明したが、先の図1に示したように液浸投影露光時のワーキングディスタンスは1〜2mm程度と極めて小さいため、ウエハWに対する焦点合せはオフ・アクシス方式のフォーカス・アライメントセンサーFADを使うものとした。 [Other variations described examples above, since have been described the embodiments of the present invention, the previous working distance at the time of immersion projection exposure as shown in FIG. 1 is extremely small as about 1 to 2 mm, the wafer W focusing was assumed to use the focus alignment sensor FAD of off-axis type for. しかしながら、例えば米国特許4,801,9 However, for example, US Pat. 4,801,9
77号、米国特許4,383,757号等に開示されているように、投影レンズ系PLの投影視野内の周辺部を介してフォーカス検出用のビームをウエハ上に投射してウエハ表面の高さ位置又は傾きを計測するTTL(スルーザレンズ)方式のフォーカス検出機構を設けてもよい。 No. 77, as disclosed in U.S. Patent 4,383,757 No. and the like, high in the wafer surface through the peripheral portion of the projection field of the projection lens system PL projects a focus detection on the wafer located or to measure the slope TTL (through-the-lens) may be provided with a focus detecting mechanism of the system.

【0060】また、図1に示したフォーカス・アライメントセンサーFADは、オフ・アクシス方式でウエハW [0060] In addition, the focus alignment sensor FAD shown in FIG. 1, the wafer W in the off-axis type
上のアライメントマークを光学的に検出するものとしたが、このアライメントセンサーもレチクルRと投影レンズ系PLとを通してウエハW上のマークを検出する図1 It is assumed to detect the alignment marks of the above optically detects the mark on the wafer W through the alignment sensor is also the reticle R and the projection lens system PL 1
中のTTRアライメントセンサー45の他に、投影レンズ系PLのみを通してウエハW上のマークを検出するT Other TTR alignment sensor 45 in, T for detecting the mark on the wafer W only through the projection lens system PL
TL方式のアライメントセンサーとしてもよい。 It may be used as the alignment sensor of the TL method. さらに本発明は、紫外線域(波長400nm以下)のもとで投影露光する投影光学系を備えていれば、どのような構成の露光装置であっても全く同様に適用し得る。 The present invention, as long as provided with a projection optical system for projecting exposure under ultraviolet range (less than the wavelength 400 nm), can be applied just as well with an exposure apparatus of any configuration.

【0061】 [0061]

【発明の効果】以上のように本発明により、実現可能な温度コントロールの範囲内で、充分な結像性能が保証された液侵型の露光装置が提供された。 The present invention as described above, according to the present invention, within the range of possible temperature control, the exposure apparatus of sufficient imaging performance is guaranteed liquid 侵型 is provided. また、液侵型露光装置におけるウエハのローディングとアンローディングに適したウエハステージの構造も提供された。 The structure of the wafer stage which is suitable for loading and unloading of the wafer in the liquid 侵型 exposure apparatus has been provided.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の第1の実施例による走査型の投影露光装置の全体的な構成を示す図である。 1 is a diagram showing an overall configuration of a scanning type projection exposure apparatus according to a first embodiment of the present invention.

【図2】走査露光のシーケンスを模式的に説明するための斜視図である。 2 is a perspective view for schematically illustrating the sequence of scanning exposure.

【図3】図1中の投影レンズ系付近の詳細な構成を示す部分断面図である。 3 is a partial sectional view showing the detailed structure of the vicinity of the projection lens system in FIG.

【図4】本発明の第2の実施例による液体の温度制御と液体供給システムとを模式的に示すブロック図である。 4 is a block diagram schematically showing a temperature control and the liquid supply system of the liquid according to a second embodiment of the present invention.

【図5】本発明の第3の実施例によるウエハホルダーと投影レンズ系付近の構造を示す部分断面図である。 5 is a third partial cross-sectional view showing the structure near the wafer holder and the projection lens system according to an embodiment of the present invention.

【図6】本発明の第4の実施例によるウエハホルダーと投影レンズ系付近の構造を示す部分断面図である。 6 is a fourth partial cross-sectional view showing the structure near the wafer holder and the projection lens system according to an embodiment of the present invention.

【図7】本発明の第5の実施例によるホルダテーブルの構造を示す(A)断面図と、(B)平面図である。 The fifth embodiment showing a structure of a holder table by (A) a cross-sectional view of the present invention; FIG is a plan view (B).

【図8】本発明の第6の実施例の要部を示す概略断面図である。 8 is a schematic sectional view showing an essential portion of a sixth embodiment of the present invention.

【符号の説明】 DESCRIPTION OF SYMBOLS

1…投影光学系 1a…最終レンズ面 7、8…容器 7a、8a…浸液 3…ウエハ 3a…ウエハホルダー 4…注入口 5…排出口 6…温度調節器 L…ワーキングディスタンス 10…照明系 12…コンデンサーレンズ系 14…ミラー 16…レチクルステージ 17…レーザ干渉計システム 18…モータ 19…コラム構造体 20…レチクルステージ制御器 30…ベース定盤 32A、32B、3 1 ... projection optical system 1a ... last lens surface 7,8 ... container 7a, 8a ... immersion liquid 3 ... wafer 3a ... wafer holder 4 ... Inlet 5 ... outlet 6 ... temperature controller L ... working distance 10 ... illumination system 12 ... condenser lens system 14 ... mirror 16 ... reticle stage 17 ... laser interferometer system 18 ... motor 19 ... column structure 20 ... reticle stage controller 30 ... base plate 32A, 32B, 3
2C…アクチュエータ 33…レーザ干渉計システム 34…XYステージ 35…ウエハステージ制御器 36…駆動モータ 40…主制御器 50A、50B…温度調整器 51…溝51 52…通路 53…パイプ 53A、53B…通路 55…温度センサー 60…制御器 62…切り替えバルブ 64…液体供給ユニット 64A…ポンプ 64B…温調器 66…排出ポンプ66 80…サブ鏡筒 82…ZLステージ 83…センターアップピン 84A、84B…板バネ 85…上下動駆動機構 87…カバー板 88A,88B…駆動機構 90…ウエハチャック 91…貫通孔 95…アーム 112…配管 113…吸着面 114…外周角部 IL…パルス照明光 AI…照明領域 R…レチクル Pa…回路パターン領域 SB…遮光帯 PL…投影レンズ系 AX 2C ... actuator 33 ... laser interferometer system 34 ... XY stage 35 ... wafer stage controller 36 ... drive motor 40 ... main controller 50A, 50B ... temperature controller 51 ... grooves 51 52 ... passage 53 ... pipe 53A, 53B ... passage 55 ... temperature sensor 60 ... controller 62 ... switching valve 64 ... liquid supply unit 64A ... pump 64B ... temperature controller 66 ... discharge pump 66 80 ... sub-barrel 82 ... ZL stage 83 ... center-up pins 84A, 84B ... leaf spring 85 ... vertical movement drive mechanism 87 ... cover plate 88A, 88B ... drive mechanism 90 ... wafer chuck 91 ... through hole 95 ... arm 112 ... pipe 113 ... suction surface 114 ... outer peripheral corner portion IL ... pulsed illumination light AI ... illumination region R ... reticle Pa ... circuit pattern area SB ... shielding band PL ... projection lens system AX …光軸 LGa…前群レンズ系 LGb…後群レンズ系 Ep…射出瞳 LE1…正レンズ素子 Pe…下面 CG…平行平板 W…ウエハ SAa、SAb…ショット領域 SI…投影像 WH…ホルダテーブル LB…壁部 LQ…液体 HRS…補助プレート部 DB…液密ドア部 OL…Oリング FAD…フォーカス・アライメントセンサー MRr、MRw…移動鏡 ML…参照ミラー BSr…参照用ビーム BSm…測長用ビーム Sf…フォーカス信号 Sa…アライメント信号 ... optical axis LGa ... front-group lens system LGb ... rear lens system Ep ... exit pupil LE1 ... positive lens element Pe ... underside CG ... parallel plate W ... wafer SAa, SAb ... shot area SI ... projected image WH ... holder table LB ... wall LQ ... liquid HRS ... auxiliary plate portion DB ... liquid-tight door unit OL ... O-ring FAD ... focus alignment sensor MRr, MRw ... moving mirror ML ... reference mirror BSr ... reference beam BSm ... long beam Sf ... focus measurement signal Sa ... alignment signal

Claims (12)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】レチクル上に描画されたパターンをウエハ上に焼付転写する投影光学系を有し、該投影光学系のウエハに最も近接したレンズ面と前記ウエハとの間のワーキングディスタンスのうちの少なくとも一部分を、露光光を透過する液体で満たした液浸型露光装置において、 前記ワーキングディスタンスの長さをLとし、前記露光光の波長をλとし、前記液体の屈折率の温度係数をN 1. A drawn pattern on the reticle includes a projection optical system for baking transferred onto a wafer, of the working distance between the nearest lens surface on the wafer of the projection optical system and the wafer at least a portion, in an immersion type exposure apparatus is filled with a liquid which transmits exposure light, the length of the working distance is L, the wavelength of the exposure light is lambda, the temperature coefficient of the refractive index of the liquid N
    (1/℃)としたとき、 L≦λ/(0.3×|N|) となるように形成したことを特徴とする液浸型露光装置。 (1 / ° C.) and when, L ≦ λ / (0.3 × | N |) and the formed can to be immersion exposure apparatus according to claim.
  2. 【請求項2】レチクル上に描画されたパターンをウエハ上に焼付転写する投影光学系を有し、該投影光学系のウエハに最も近接したレンズ面と前記ウエハとの間のワーキングディスタンスのうちの少なくとも一部分を、露光光を透過する液体で満たした液浸型露光装置において、 前記液体として、純水の表面張力を減少させ又は純水の界面活性度を増大させる添加剤を前記純水に添加したものを用いたことを特徴とする液浸型露光装置。 Wherein the drawing pattern on the reticle includes a projection optical system for baking transferred onto a wafer, of the working distance between the nearest lens surface on the wafer of the projection optical system and the wafer adding at least a portion, in an immersion type exposure apparatus is filled with a liquid which transmits the exposure light, as the liquid, an additive for increasing the surface activity of the pure surface tension of water is reduced or pure water to the pure water immersion exposure apparatus characterized by using the ones.
  3. 【請求項3】前記ワーキングディスタンスの長さLが2 Wherein the length L of the working distance 2
    mm以下である、請求項1又は2記載の液浸型露光装置。 mm or less, the liquid immersion type exposure apparatus according to claim 1 or 2, wherein.
  4. 【請求項4】前記レチクルとウエハを前記投影光学系の倍率に対応した速度比にて同期して等速に走査可能に配置した、請求項1、2又は3記載の液浸型露光装置。 4. A was disposed to be scanning the reticle and the wafer synchronously constant speed at a speed ratio corresponding to the magnification of the projection optical system, a liquid immersion type exposure apparatus according to claim 1, 2 or 3 wherein.
  5. 【請求項5】前記露光光として紫外域の光を用いた、請求項1、2、3又は4記載の液浸型露光装置。 5. using light in the ultraviolet region as the exposure light, the liquid immersion type exposure apparatus according to claim 1, 2, 3 or 4, wherein.
  6. 【請求項6】前記投影光学系の最もウエハ側の先端光学素子のウエハ側の光学面を平面状に形成し、前記先端光学素子を保持する鏡筒の下端面を前記光学面と同一平面をなすように形成し、前記鏡筒の下端外周面に面取りを施した、請求項1、2、3、4又は5記載の液浸型露光装置。 6. form a wafer-side optical surface closest wafer side of the tip optical element of the projection optical system in a plane, the optical surface flush with the lower end surface of the lens barrel for holding the tip optical element eggplant so formed, chamfered at the lower end outer peripheral surface of the barrel, the liquid immersion type exposure apparatus according to claim 1, 2, 3, 4 or 5, wherein.
  7. 【請求項7】前記先端光学素子が平行平板である、請求項6記載の液浸型露光装置。 Wherein said tip optical element is a parallel plate, immersion exposure apparatus according to claim 6, wherein.
  8. 【請求項8】前記ウエハをホルダテーブルによって保持し、前記液体によってワーキングディスタンスを満たすことができるように前記ホルダテーブルの上面外周に壁部を立設し、前記ホルダテーブル内に前記液体を供給し且つ回収できるように液体供給ユニットを設け、前記ホルダテーブルと液体供給ユニットとの双方に温度調整器を設けた、請求項1〜7のいずれか1項記載の液浸型露光装置。 8. the wafer held by the holder table, the upright wall portion to the upper surface outer periphery of the holder table so as to be able to meet the working distance by the liquid, supplying the liquid into the holder table and a liquid supply unit to be recovered provided, said both provided to the temperature regulator of the holder table and the liquid supply unit, a liquid immersion type exposure apparatus according to any one of claims 1 to 7.
  9. 【請求項9】前記ウエハをウエハチャックによって保持し、前記液体によってワーキングディスタンスを満たすことができるように前記ウエハチャックの上面外周に壁部を立設し、前記ウエハチャックを貫通して少なくとも3本のピンを設け、前記ウエハを前記ウエハチャックの上方に持ち上げることができるように、前記ピンに昇降駆動装置を取り付けた、請求項1〜7のいずれか1項記載の液浸型露光装置。 9. the wafer held by a wafer chuck, provided upright wall portion to the upper surface periphery of the wafer chuck to be able to meet the working distance by the liquid, at least three through said wafer chuck the pin is provided, the wafer so that it can be lifted above the wafer chuck, fitted with a lifting drive to the pin, immersion exposure apparatus according to any one of claims 1-7.
  10. 【請求項10】前記ウエハをウエハチャックによって保持し、前記液体によってワーキングディスタンスを満たすことができるように前記ウエハチャックの上面外周に壁部を立設し、前記ウエハチャックを貫通して少なくとも3本のピンを設け、ウエハチャックの前記壁部の上端を前記投影光学系の下端よりも低くすることができるように、前記ウエハチャックに昇降駆動装置を取り付けた、請求項1〜7のいずれか1項記載の液浸型露光装置。 10. the wafer held by a wafer chuck, provided upright wall portion to the upper surface periphery of the wafer chuck to be able to meet the working distance by the liquid, at least three through said wafer chuck the pin is provided, so that the upper end of the wall portion of the wafer chuck can be made lower than the lower end of the projection optical system, fitted with a lifting drive to the wafer chuck, one of the claims 1-7 1 immersion exposure apparatus of claim wherein.
  11. 【請求項11】前記壁部の一部分に開閉自在な液密ドア部を設けることにより、投影光学系の下端部分との干渉を回避した、請求項1〜10のいずれか1項記載の液浸型露光装置。 By 11. providing a portion to be opened and closed liquid-tight door portion of the wall portion, to avoid interference with the lower end portion of the projection optical system, the immersion of any one of claims 1 to 10 type exposure apparatus.
  12. 【請求項12】前記投影光学系の側面に干渉計用のミラーを取り付け、該ミラーに入射して反射する光束を前記液体から発する蒸気より離隔するように防護手段を設けた、請求項1〜11のいずれか1項記載の液浸型露光装置。 12. Attach the mirror for the interferometer on a side surface of the projection optical system, provided with protection means so as to be separated from the vapor that emits a light beam for reflecting incident on the mirror from the liquid, according to claim 1 immersion exposure apparatus according to any one of 11.
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