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WO2004053957A1 - Surface position detection apparatus, exposure method, and device porducing method - Google Patents

Surface position detection apparatus, exposure method, and device porducing method

Info

Publication number
WO2004053957A1
WO2004053957A1 PCT/JP2003/015736 JP0315736W WO2004053957A1 WO 2004053957 A1 WO2004053957 A1 WO 2004053957A1 JP 0315736 W JP0315736 W JP 0315736W WO 2004053957 A1 WO2004053957 A1 WO 2004053957A1
Authority
WO
Grant status
Application
Patent type
Prior art keywords
surface
detected
light
detection
position
Prior art date
Application number
PCT/JP2003/015736
Other languages
French (fr)
Japanese (ja)
Inventor
Yasuhiro Hidaka
Hideo Mizutani
Nobutaka Magome
Soichi Owa
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70216Systems for imaging mask onto workpiece
    • G03F7/70341Immersion

Abstract

A surface position detection apparatus (100) comprising a light transmitting system (8) for projecting a detection light onto a surface (S) to be detected, and a light receiving system (9) for receiving a reflection light from the surface (S)to be detected, the surface position information of the surface (S) to be detected being detected based on information obtained from the light receiving system (9). A plurality of lights L1, L2 as detection lights are projected on to the surface (S) to be detected at different incident angles θ1, θ2. Surface position information can be corrected based on reflection lights from the lights L1, L2 even when the refractive index of a medium on the surface (S) changes with a change in temperature. The surface position detection apparatus (100) is useful for an immersion exposure system.
PCT/JP2003/015736 2002-12-10 2003-12-09 Surface position detection apparatus, exposure method, and device porducing method WO2004053957A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002-357955 2002-12-10
JP2002357955 2002-12-10
JP2003-072485 2003-03-17
JP2003072485 2003-03-17

Publications (1)

Publication Number Publication Date
WO2004053957A1 true true WO2004053957A1 (en) 2004-06-24

Family

ID=32510634

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/015736 WO2004053957A1 (en) 2002-12-10 2003-12-09 Surface position detection apparatus, exposure method, and device porducing method

Country Status (2)

Country Link
JP (1) JP2009105414A (en)
WO (1) WO2004053957A1 (en)

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