JPH10104174A - 電気接続検査装置 - Google Patents

電気接続検査装置

Info

Publication number
JPH10104174A
JPH10104174A JP9241418A JP24141897A JPH10104174A JP H10104174 A JPH10104174 A JP H10104174A JP 9241418 A JP9241418 A JP 9241418A JP 24141897 A JP24141897 A JP 24141897A JP H10104174 A JPH10104174 A JP H10104174A
Authority
JP
Japan
Prior art keywords
image
ray
linear
cross
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP9241418A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10104174A5 (OSRAM
Inventor
John A Adams
ジョン・エー・アダムス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JPH10104174A publication Critical patent/JPH10104174A/ja
Publication of JPH10104174A5 publication Critical patent/JPH10104174A5/ja
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/419Imaging computed tomograph

Landscapes

  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pulmonology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Theoretical Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP9241418A 1996-09-13 1997-09-05 電気接続検査装置 Ceased JPH10104174A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/713,379 US5687209A (en) 1995-04-11 1996-09-13 Automatic warp compensation for laminographic circuit board inspection
US713-379 1996-09-13

Publications (2)

Publication Number Publication Date
JPH10104174A true JPH10104174A (ja) 1998-04-24
JPH10104174A5 JPH10104174A5 (OSRAM) 2005-06-09

Family

ID=24865904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9241418A Ceased JPH10104174A (ja) 1996-09-13 1997-09-05 電気接続検査装置

Country Status (3)

Country Link
US (1) US5687209A (OSRAM)
JP (1) JPH10104174A (OSRAM)
DE (1) DE19723074C2 (OSRAM)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005512707A (ja) * 2001-12-21 2005-05-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ オブジェクト内のターゲットの位置を突き止める方法
JP2006275626A (ja) * 2005-03-28 2006-10-12 Nagoya Electric Works Co Ltd X線検査装置、x線検査方法およびx線検査プログラム
WO2009078415A1 (ja) * 2007-12-17 2009-06-25 Uni-Hite System Corporation X線検査装置および方法
US7723708B2 (en) 2004-07-30 2010-05-25 Canon Kabushiki Kaisha Optical semiconductor device in which an electromagnetic wave is generated in a region of an applied electric field
KR101096366B1 (ko) * 2009-11-27 2011-12-20 한국원자력연구원 스테레오 엑스레이 투과검사 시스템
JP2012503768A (ja) * 2008-09-24 2012-02-09 クロメック リミテッド X線撮影データ判読
JP2021060204A (ja) * 2019-10-03 2021-04-15 株式会社 システムスクエア 検査装置
JP2023053558A (ja) * 2021-10-01 2023-04-13 株式会社サキコーポレーション 検査装置

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29623488U1 (de) * 1995-11-06 1998-09-17 Macrotron Process Technologies GmbH, 81829 München Schaltungsanordnung zur Prüfung von Lötstellen
JPH09172299A (ja) * 1995-12-20 1997-06-30 Matsushita Electric Ind Co Ltd 基板認識装置
US5646733A (en) 1996-01-29 1997-07-08 Medar, Inc. Scanning phase measuring method and system for an object at a vision station
US6028910A (en) * 1998-01-19 2000-02-22 Foster-Miller, Inc. High resolution areal tomosynthesis
US6314201B1 (en) 1998-10-16 2001-11-06 Agilent Technologies, Inc. Automatic X-ray determination of solder joint and view delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography
US6363298B1 (en) * 1998-10-23 2002-03-26 Chrysler Corporation Method and apparatus for generating tool paths
US6201850B1 (en) 1999-01-26 2001-03-13 Agilent Technologies, Inc. Enhanced thickness calibration and shading correction for automatic X-ray inspection
US6292530B1 (en) * 1999-04-29 2001-09-18 General Electric Company Method and apparatus for reconstructing image data acquired by a tomosynthesis x-ray imaging system
US7013038B1 (en) * 1999-11-08 2006-03-14 Teradyne, Inc. Method for inspecting a BGA joint
US6996265B1 (en) * 1999-11-08 2006-02-07 Teradyne, Inc. Inspection method utilizing vertical slice imaging
JP3517388B2 (ja) * 2000-06-14 2004-04-12 新光電気工業株式会社 バンプの検査方法及びバンプの検査装置
AU2000264047A1 (en) * 2000-06-19 2002-01-02 Cyberoptics Corporation Automatic inspection system with x-ray imaging
US6373917B1 (en) * 2000-08-30 2002-04-16 Agilent Technologies, Inc. Z-axis elimination in an X-ray laminography system using image magnification for Z plane adjustment
US6671349B1 (en) 2000-11-13 2003-12-30 Olganix Corporation Tomosynthesis system and registration method
US6748046B2 (en) * 2000-12-06 2004-06-08 Teradyne, Inc. Off-center tomosynthesis
US7562350B2 (en) * 2000-12-15 2009-07-14 Ricoh Company, Ltd. Processing system and method using recomposable software
US6324249B1 (en) 2001-03-21 2001-11-27 Agilent Technologies, Inc. Electronic planar laminography system and method
DE10160398B4 (de) * 2001-12-10 2004-11-11 Dieffenbacher Gmbh + Co. Kg Verfahren und Vorrichtung zur Prüfung einer Matte aus Biomassepartikeln
US6853744B2 (en) * 2001-12-14 2005-02-08 Agilent Technologies, Inc. System and method for confirming electrical connection defects
US6847900B2 (en) * 2001-12-17 2005-01-25 Agilent Technologies, Inc. System and method for identifying solder joint defects
US6850589B2 (en) * 2002-03-27 2005-02-01 Agilent Technologies, Inc. Tomography of curved surfaces
JP4184694B2 (ja) * 2002-04-05 2008-11-19 株式会社ブリヂストン タイヤのx線検査方法及びその装置
US7092484B1 (en) 2002-06-14 2006-08-15 Iowa State University Research Foundation, Inc. Model-assisted reconstruction of volumetric data
WO2004049256A2 (en) * 2002-11-13 2004-06-10 Digitome Corporation Ray tracing kernel calibration
US6738450B1 (en) 2002-12-10 2004-05-18 Agilent Technologies, Inc. System and method for cost-effective classification of an object under inspection
US20040263862A1 (en) * 2003-06-24 2004-12-30 Amparan Alfonso Benjamin Detecting peripheral points of reflected radiation beam spots for topographically mapping a surface
US7326025B2 (en) * 2004-05-04 2008-02-05 Texas Instruments Incorporated System for detecting warped carriers and associated methods
DE102005020149A1 (de) * 2005-04-29 2006-11-09 Yxlon International X-Ray Gmbh Verfahren zur automatischen Fehlererkennung in Prüfteilen mittels einer Röntgenprüfanlage
US7225051B1 (en) * 2005-08-04 2007-05-29 Magnecomp Corporation Closed-loop feedback for maximizing Cpk in progressive forming operations
US20070189460A1 (en) * 2006-02-15 2007-08-16 Buck Dean C Precise x-ray inspection system
WO2007121989A2 (de) * 2006-04-25 2007-11-01 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschunge E.V. Vorrichtung und verfahren zum erzeugen einer zweidimensionalen darstellung eines beliebig innerhalb eines objekts angeordneten objektabschnitts
US20080089567A1 (en) * 2006-10-11 2008-04-17 Eliasson Tracy K Artifact reduction in an x-ray imaging system
US7529336B2 (en) * 2007-05-31 2009-05-05 Test Research, Inc. System and method for laminography inspection
US8331525B2 (en) 2007-10-01 2012-12-11 Pratt & Whitney Rocketdyne, Inc. Characteristic X-ray computed laminography system for home made explosives (HME) detection
JP5559471B2 (ja) * 2008-11-11 2014-07-23 浜松ホトニクス株式会社 放射線検出装置、放射線画像取得システム、放射線検査システム、及び放射線検出方法
EP2256069A1 (en) * 2009-05-29 2010-12-01 Mettler-Toledo Safeline X-Ray Limited Conveyor chain for a radiographic inspection system and radiographic inspection system
JP5559551B2 (ja) * 2010-01-19 2014-07-23 株式会社サキコーポレーション 検査装置
WO2012169374A1 (ja) * 2011-06-08 2012-12-13 村田機械株式会社 ワーク処理システム
US9733193B2 (en) * 2015-03-12 2017-08-15 Proton Products International Limited Measurement of industrial products manufactured by extrusion techniques

Family Cites Families (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2511853A (en) * 1950-06-20 Radiographic scanning unit
US2720596A (en) * 1955-10-11 Spiral laminagraph
FR812792A (fr) * 1935-11-01 1937-05-18 Philips Nv Procédé et dispositif radiographique permettant de représenter des objets en coupe à l'aide de rayons chi
US2259708A (en) * 1937-06-14 1941-10-21 Schiebold Ernst Testing materials by x-ray
BE468984A (OSRAM) * 1939-11-02
US2667585A (en) * 1951-02-15 1954-01-26 Hartford Nat Bank & Trust Co Device for producing screening images of body sections
DE1033844B (de) * 1951-09-04 1958-07-10 Ialicenciaia Talalmanyokat Ert Roentgenapparat fuer Bewegungsbestrahlung
BE533316A (OSRAM) * 1953-11-14
NL207028A (OSRAM) * 1956-05-09
CH355225A (de) * 1958-01-22 1961-06-30 Foerderung Forschung Gmbh Verfahren und Einrichtung zum Kontrollieren und Korrigieren der Lage des durch einen Kathodenstrahl erzeugten Brennflecks auf der Antikathode einer Röntgenröhre
DE1138617B (de) * 1960-01-22 1962-10-25 Zuder Di G Zurli & Dr A De Reg Vorrichtung zur Durchfuehrung von Roentgenaufnahmen, insbesondere von Schichtaufnahmen
US3149257A (en) * 1962-04-25 1964-09-15 Dean E Wintermute X-ray devices for use on the human body
US3499146A (en) * 1966-10-10 1970-03-03 Albert G Richards Variable depth laminagraphy with means for highlighting the detail of selected lamina
US3780291A (en) * 1971-07-07 1973-12-18 American Science & Eng Inc Radiant energy imaging with scanning pencil beam
US3818220A (en) * 1971-11-03 1974-06-18 A Richards Variable depth laminagraphy
US3832546A (en) * 1972-04-14 1974-08-27 Xonics Inc X-ray system with aligned source and slits
DE2218384C3 (de) * 1972-04-15 1980-03-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Holographisches Verfahren zur Herstellung eines dreidimensionalen Bildes aus einer Serie von zweidimensionalen Bildern unterschiedlicher Perspektive
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system
US3928769A (en) * 1973-03-19 1975-12-23 Trw Inc Laminographic instrument
US3894234A (en) * 1974-01-28 1975-07-08 Us Navy Radial scanner
US3984684A (en) * 1974-02-06 1976-10-05 Douglas Fredwill Winnek Three-dimensional radiography
US3962579A (en) * 1974-02-28 1976-06-08 Douglas Fredwill Winnek Three-dimensional radiography
US4032785A (en) * 1974-03-28 1977-06-28 United States Steel Corporation Tire inspection machine presenting an x-ray image of the entire width of the tire
JPS5154793A (OSRAM) * 1974-08-28 1976-05-14 Emi Varian Ltd
US4007375A (en) * 1975-07-14 1977-02-08 Albert Richard D Multi-target X-ray source
GB1558062A (en) * 1975-10-25 1979-12-19 Emi Ltd Radiology
DE2616714A1 (de) * 1976-04-15 1977-10-27 Philips Patentverwaltung Verfahren zur schichtweisen darstellung von objekten aus ueberlagerungsbildern unterschiedlicher bildebenen
GB1579341A (en) * 1976-04-28 1980-11-19 Emi Ltd X-ray generating tubes
FR2351422A1 (fr) * 1976-05-14 1977-12-09 Thomson Csf Dispositif detecteur, localisateur solide d'impacts de rayonnement ionisants
DE2647167C2 (de) * 1976-10-19 1987-01-29 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Herstellung von Schichtaufnahmen mit Röntgen- oder ähnlich durchdringenden Strahlen
DE2658533C2 (de) * 1976-12-23 1987-02-26 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Darstellung von Körperlängsschichten
US4075489A (en) * 1977-01-21 1978-02-21 Simulation Physics Method and apparatus involving the generation of x-rays
US4130759A (en) * 1977-03-17 1978-12-19 Haimson Research Corporation Method and apparatus incorporating no moving parts, for producing and selectively directing x-rays to different points on an object
US4179100A (en) * 1977-08-01 1979-12-18 University Of Pittsburgh Radiography apparatus
US4139776A (en) * 1977-09-22 1979-02-13 Cgr Medical Corporation System for circular and complex tomography
US4234792A (en) * 1977-09-29 1980-11-18 Raytheon Company Scintillator crystal radiation detector
JPS54143290A (en) * 1978-04-28 1979-11-08 Toshiba Corp Soldered part inspecting device
US4228353A (en) * 1978-05-02 1980-10-14 Johnson Steven A Multiple-phase flowmeter and materials analysis apparatus and method
US4260898A (en) * 1978-09-28 1981-04-07 American Science And Engineering, Inc. X-ray imaging variable resolution
US4211927A (en) * 1978-11-24 1980-07-08 Cgr Medical Corporation Computerized tomography system
US4392235A (en) * 1979-08-16 1983-07-05 General Electric Company Electronically scanned x-ray tomography system
DE2946443A1 (de) * 1979-11-17 1981-05-27 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren und vorrichtung zur erzeugung von schichtbildern eines dreidimensionalen objektes
US4287425A (en) * 1979-12-31 1981-09-01 Pfizer, Incorporated Construction of a CT scanner using heavy ions or protons
US4352021A (en) * 1980-01-07 1982-09-28 The Regents Of The University Of California X-Ray transmission scanning system and method and electron beam X-ray scan tube for use therewith
DE3010780A1 (de) * 1980-03-20 1981-09-24 Siemens AG, 1000 Berlin und 8000 München Strahlendiagnostikeinrichtung
US4400620A (en) * 1980-06-26 1983-08-23 Blum Alvin S Photon emission tomographic apparatus
US4414682A (en) * 1980-11-17 1983-11-08 American Science And Engineering, Inc. Penetrating radiant energy imaging system with multiple resolution
EP0054596B1 (fr) * 1980-12-18 1985-05-29 International Business Machines Corporation Procédé d'inspection et de tri automatique d'objets présentant des configurations avec des tolérances dimensionnelles et des critères de rejet variables selon l'emplacement, équipement et circuits de mise en oeuvre
US4415980A (en) * 1981-03-02 1983-11-15 Lockheed Missiles & Space Co., Inc. Automated radiographic inspection system
US4426722A (en) * 1981-03-12 1984-01-17 Bell Telephone Laboratories, Incorporated X-Ray microbeam generator
US4385434A (en) * 1981-06-08 1983-05-31 Visidyne, Inc. Alignment system
DE3134076A1 (de) * 1981-08-28 1983-03-10 Philips Patentverwaltung Gmbh, 2000 Hamburg "vorrichtung zur schichtweisen darstellung eines koerpers"
US4472824A (en) * 1982-08-04 1984-09-18 The Perkin-Elmer Corporation Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography
US4491956A (en) * 1982-09-10 1985-01-01 Winnek Douglas Fredwill Method and apparatus for making three-dimensional radiographs
JPS59157505A (ja) * 1983-02-28 1984-09-06 Hitachi Ltd パタ−ン検査装置
EP0124113B1 (en) * 1983-04-28 1989-03-01 Hitachi, Ltd. Method of detecting pattern defect and its apparatus
US5020086A (en) * 1983-07-05 1991-05-28 Ridge, Inc. Microfocus X-ray system
US4521902A (en) * 1983-07-05 1985-06-04 Ridge, Inc. Microfocus X-ray system
JPS6018833A (ja) * 1983-07-11 1985-01-30 Nippon Kogaku Kk <Nikon> 二波長ビ−ムスプリツタ−を備えた磁気光学記録再生装置
GB2149630A (en) * 1983-09-20 1985-06-12 British Gas Corp Real time radiographic inspection
US4575751A (en) * 1983-11-15 1986-03-11 Rca Corporation Method and subsystem for plotting the perimeter of an object
US4561104A (en) * 1984-01-16 1985-12-24 Honeywell Inc. Automated inspection of hot steel slabs
JPS60161551A (ja) * 1984-01-31 1985-08-23 Shimadzu Corp 多層基板の検査方法
EP0204844B1 (en) * 1984-03-15 1992-06-10 Yokogawa Medical Systems, Ltd X-ray ct image processor
JPS60196654A (ja) * 1984-03-19 1985-10-05 Nippon Steel Corp 放射線による被覆溶接棒の透過検査方法
US4688241A (en) * 1984-03-26 1987-08-18 Ridge, Inc. Microfocus X-ray system
US4618970A (en) * 1984-04-05 1986-10-21 Imatron, Inc. Beam positioning arrangement for use in a scanning electron beam computed tomography scanner and method
US4731855A (en) * 1984-04-06 1988-03-15 Hitachi, Ltd. Pattern defect inspection apparatus
JPH0676975B2 (ja) * 1984-09-26 1994-09-28 新技術事業団 表面原子配列構造の観察方法
JPS61154645A (ja) * 1984-12-28 1986-07-14 株式会社東芝 断層撮影装置
US4707734A (en) * 1985-06-17 1987-11-17 The Perkin-Elmer Corporation Coarse flaw detector for printed circuit board inspection
JPS61293657A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
JPH0646550B2 (ja) * 1985-08-19 1994-06-15 株式会社東芝 電子ビ−ム定位置照射制御方法および電子ビ−ム定位置照射制御装置
JPH0680420B2 (ja) * 1985-09-20 1994-10-12 株式会社日立製作所 X線ct装置
JPH0678993B2 (ja) * 1985-11-15 1994-10-05 株式会社日立メデイコ X線ct装置
US4688939A (en) * 1985-12-27 1987-08-25 At&T Technologies, Inc. Method and apparatus for inspecting articles
US4720633A (en) * 1986-01-17 1988-01-19 Electro-Scan Corporation Scanning electron microscope for visualization of wet samples
DE3605141A1 (de) * 1986-02-18 1987-08-20 Messerschmitt Boelkow Blohm Digitaler positionsgeber
US4809308A (en) * 1986-02-20 1989-02-28 Irt Corporation Method and apparatus for performing automated circuit board solder quality inspections
US4803639A (en) * 1986-02-25 1989-02-07 General Electric Company X-ray inspection system
US4718075A (en) * 1986-03-28 1988-01-05 Grumman Aerospace Corporation Raster scan anode X-ray tube
US4730350A (en) * 1986-04-21 1988-03-08 Albert Richard D Method and apparatus for scanning X-ray tomography
US5097492A (en) * 1987-10-30 1992-03-17 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US5081656A (en) * 1987-10-30 1992-01-14 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US4926452A (en) * 1987-10-30 1990-05-15 Four Pi Systems Corporation Automated laminography system for inspection of electronics
FR2626432B1 (fr) * 1988-01-25 1995-10-13 Commissariat Energie Atomique Appareil de tomographie a rayons x
EP0336282B1 (de) * 1988-04-08 1992-06-10 Siemens Aktiengesellschaft Plasma-Röntgenröhre, insbesondere zur Röntgen-Vorionisierung von Gaslasern, Verfahren zur Erzeugung von Röntgenstrahlung mit einer solchen Röntgenröhre und Verwendung letzterer
US4852131A (en) * 1988-05-13 1989-07-25 Advanced Research & Applications Corporation Computed tomography inspection of electronic devices
US4977328A (en) * 1989-03-02 1990-12-11 U.S. Philips Corporation Method of detecting a marker provided on a specimen
US5259012A (en) * 1990-08-30 1993-11-02 Four Pi Systems Corporation Laminography system and method with electromagnetically directed multipath radiation source
US5199054A (en) * 1990-08-30 1993-03-30 Four Pi Systems Corporation Method and apparatus for high resolution inspection of electronic items
CA2113752C (en) * 1994-01-19 1999-03-02 Stephen Michael Rooks Inspection system for cross-sectional imaging
US5500886A (en) * 1994-04-06 1996-03-19 Thermospectra X-ray position measuring and calibration device
EP0683389A1 (en) * 1994-05-12 1995-11-22 Kabushiki Kaisha Toshiba Laminograph and inspection and repair device using the same
US5465152A (en) * 1994-06-03 1995-11-07 Robotic Vision Systems, Inc. Method for coplanarity inspection of package or substrate warpage for ball grid arrays, column arrays, and similar structures
US5491737A (en) * 1994-08-31 1996-02-13 Thermospectra Corporation Material handling and inspection apparatus and method
US5594770A (en) * 1994-11-18 1997-01-14 Thermospectra Corporation Method and apparatus for imaging obscured areas of a test object
US5583904A (en) * 1995-04-11 1996-12-10 Hewlett-Packard Co. Continuous linear scan laminography system and method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005512707A (ja) * 2001-12-21 2005-05-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ オブジェクト内のターゲットの位置を突き止める方法
US7723708B2 (en) 2004-07-30 2010-05-25 Canon Kabushiki Kaisha Optical semiconductor device in which an electromagnetic wave is generated in a region of an applied electric field
JP2006275626A (ja) * 2005-03-28 2006-10-12 Nagoya Electric Works Co Ltd X線検査装置、x線検査方法およびx線検査プログラム
WO2009078415A1 (ja) * 2007-12-17 2009-06-25 Uni-Hite System Corporation X線検査装置および方法
JP2012503768A (ja) * 2008-09-24 2012-02-09 クロメック リミテッド X線撮影データ判読
JP2014222249A (ja) * 2008-09-24 2014-11-27 クロメック リミテッド X線撮影データ判読
KR101096366B1 (ko) * 2009-11-27 2011-12-20 한국원자력연구원 스테레오 엑스레이 투과검사 시스템
JP2021060204A (ja) * 2019-10-03 2021-04-15 株式会社 システムスクエア 検査装置
JP2023053558A (ja) * 2021-10-01 2023-04-13 株式会社サキコーポレーション 検査装置

Also Published As

Publication number Publication date
DE19723074A1 (de) 1998-03-26
DE19723074C2 (de) 2002-09-05
US5687209A (en) 1997-11-11

Similar Documents

Publication Publication Date Title
US5687209A (en) Automatic warp compensation for laminographic circuit board inspection
US5583904A (en) Continuous linear scan laminography system and method
US6324249B1 (en) Electronic planar laminography system and method
US6665433B2 (en) Automatic X-ray determination of solder joint and view Delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography
US6490368B2 (en) Automatic X-ray determination of solder joint and view Delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography
US6373917B1 (en) Z-axis elimination in an X-ray laminography system using image magnification for Z plane adjustment
KR100863975B1 (ko) 편축 단층영상합성법
US4926452A (en) Automated laminography system for inspection of electronics
US6177682B1 (en) Inspection of ball grid arrays (BGA) by using shadow images of the solder balls
US5081656A (en) Automated laminography system for inspection of electronics
US5097492A (en) Automated laminography system for inspection of electronics
JP4551919B2 (ja) 断層撮影の検査システムおよびその方法
US6853744B2 (en) System and method for confirming electrical connection defects
CN1841053A (zh) 成像检查装置
SE531072C2 (sv) Skanningsbaserad detektering av joniserande strålning för tomosyntes
JPH03180709A (ja) 3次元画像形成方法とその装置
US7231013B2 (en) Precise x-ray inspection system utilizing multiple linear sensors
US20070189460A1 (en) Precise x-ray inspection system
JPH0534131A (ja) 画像処理方法及び画像処理装置
KR102900679B1 (ko) Ct 장비의 원점세팅용 팬텀장치
JPH07303628A (ja) ラミノグラフ

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20040414

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20040416

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20040416

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040906

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040906

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070824

A045 Written measure of dismissal of application [lapsed due to lack of payment]

Free format text: JAPANESE INTERMEDIATE CODE: A045

Effective date: 20071221